Scanning and rotating micromirrors using thermal actuators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3131, Issue , 1997, Pages 134-144

  Butler, Jeffrey T ^a   Bright, Victor M ^a   Reid, J Robert ^b  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Micro electro mechanical systems; Micro opto electro mechanical systems; Thermal actuators

Indexed keywords

ACTUATORS; APPLICATIONS; CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; COMPUTER CONTROL SYSTEMS; DIGITAL DEVICES; HINGES; IMAGING SYSTEMS; INTERFACES (COMPUTER); LASER RECORDING; MECHANICAL ENGINEERING; MECHANICS; MECHANISMS; MECHATRONICS; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL COMMUNICATION; OPTICAL DEVICES; OPTICAL SWITCHES; POLYSILICON; RADAR; ROTATION; SUBSTRATES; SURFACE MICROMACHINING;

ACTUATOR ARRAYS; AIR FORCE (AF); COMPLEMENTARY METAL OXIDE (CMOS) TECHNOLOGY; DIGITAL INTERFACES; DRIVE SYSTEMS; MICRO-ELECTRO-MECHANICAL SYSTEMS; MICRO-MIRRORS; MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS; SUBSTRATE SURFACES; SUPPORT MECHANISM; THERMAL ACTUATORS;

SCANNING;

EID: 0003370080     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.277741     Document Type: Conference Paper

References (8)

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2. J.R. Reid, V.M. Bright, and J.H. Comtois, "Arrays of thermal micro-actuators coupled to micro-optical components," Proc. SPIE, vol. 2865, pp. 74-82, 1996.
3. D. Koester, R. Majedevan, A. Shishkoff, and K. Marcus, Multi-User MEMS Processes (MUMPS) Introduction and Design Rules, rev. 4, MCNC MEMS Technology Applications Center, Research Triangle Park, NC 27709, July 1996.
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5. J.R. Reid, V.M. Bright, and J.H. Comtois, "Automated assembly of flip-up micromirrors," to be published in Technical Digest of the 9th International Conference on Solid-State Sensors and Actuators, Transducers '97, 1997.
6. J.R. Reid, V.M. Bright, and J.H. Comtois, "Force measurements of polysilicon thermal micro-actuators," Proc. SPIE, vol. 2882, pp. 296-306, 1996.
7. J.H. Comtois and V.M. Bright, "Surface micromachined polysilicon thermal actuator arrays and applications," Technical Digest, Solid State Sensor and Actuator Workshop, pp. 174-177, 1996.
8. M. C. Wu, L. Y. Lin, and S. S. Lee, "Micromachined free-space integrated optics," Proc. SPIE, vol. 2291, pp. 40-51, 1994.