Dynamic actuation of polyimide V-groove joints by electrical heating

Sensors and Actuators, A: Physical

Volumn 67, Issue 1-3, 1998, Pages 199-204

  Ebefors, Thorbjörn ^a   Kälvesten, Edvard ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

3 D silicon microstructures; Dynamic actuation; Electrical heating; Polyimide joints

Indexed keywords

ACTUATORS; ELECTRIC HEATING; MICROELECTROMECHANICAL DEVICES; SENSORS; SILICON WAFERS;

DYNAMIC ACTUATION; POLYIMIDE JOINTS;

POLYIMIDES;

EID: 0041526122     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01769-X     Document Type: Article

References (10)

1. K.S.J. Pister, M.W. Judy, S.R. Burgett, R.S. Fearing, Microfabricated hinges, Sensors and Actuators A 33 (1992) 249-256.
2. N.C. Tien, M.-H. Klang, M.J. Daneman, O. Solgaard, K.Y. Lau, R.S. Muller, Actuation of polysilicon surface-micromachined mirrors, Proc. SPIE, vol. 2687, Miniaturized System with Micro-Optical and Micromechanics, San Jose, CA, USA, 1996, pp. 53-59.
3. L. Fan, M.C. Wu, K.D. Choquette, M.H. Crawford, Self-assembled microactuated XYZ stages for optical scanning and alignment, Tech. Digest, 9th Int. Conf. Solid-State Sensors and Actuators (Transducers '97), Chicago, IL, USA. 16-19 June, 1997, pp. 319-322.
4. G. Lin, C.-J. Kim, S. Konishi, H. Fujita, Design, fabrication, and testing of a C-shape actuator, Tech. Digest, 8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95/Eurosensors IX), Stockholm, Sweden, 25-29 June, 1995, pp. 416-419.
5. T. Yasuda, I. Shimonoyama, H. Mirura, CMOS drivable electostatic microactuator with large deflection, Proc. IEEE 10th Int. Workshop on Micro Electro Mechanical Systems (MEMS '97), Nagoya, Japan, 26-30 Jan., 1997, pp. 90-95.
6. P.W. Green, R.R.A. Syms, E.M. Yeatman, Demonstration of three-dimensional microstructure self-assembly, J. Micromelectromech. Syst. 4 (1995) 170-176.
7. E. Smela, O. Inganäs, I. Lundström, Controlled folding of micrometer-size structures, Science 268 (1995) 1735-1738.
8. T. Ebefors, E. Kälvesten, C. Vieider, G. Stemme, New robust small radius joints based on thermal shrinkage of polyimide in V-grooves, Tech. Digest, 9th Int. Conf. Solid-State Sensors and Actuators (Transducers '97), Chicago, IL, USA, 16-19 June, 1997, pp. 675-678.
9. B. van Oudheusden, Integrated silicon flow sensors, Ph.D. Thesis, Delft University of Technology, The Netherlands, 1989.
10. E. Kälvesten, C. Vieider, L. Löfdahl, G. Stemme, An integrated pressure-flow sensor for correlation measurements in turbulent gas flows, Sensors and Actuators A 52 (1996) 51-58.