Tunable three-dimensional solid Fabry-Perot etalons fabricated by surface-micromachining

IEEE Photonics Technology Letters

Volumn 8, Issue 1, 1996, Pages 101-103

  Lin, L Y ^a,c   Shen, J L ^a   Lee, S S ^a   Wu, M C ^a,c   Sergent, A M ^b  

^a University of California   (United States)

^b LUCENT TECHNOLOGIES   (United States)

^c IEEE

Author keywords

[No Author keywords available]

Indexed keywords

ETALONS; INTEGRATED OPTOELECTRONICS; MICROMACHINING; OPTICAL PROPERTIES; SEMICONDUCTING SILICON; THREE DIMENSIONAL;

FREE SPACE MICROOPTICAL BENCH TECHNOLOGY; SURFACE MICROMACHINING;

FABRY-PEROT INTERFEROMETERS;

EID: 0029734570     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.475792     Document Type: Article

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