Surface micromachined integrated optic polarization beam splitter

IEEE Photonics Technology Letters

Volumn 10, Issue 7, 1998, Pages 988-990

  Pu, Chuan ^a,c   Zhu, Zuhua ^a,b,c   Lo, Yu Hwa ^a,c  

^a Cornell University   (United States)

^b ZHEJIANG UNIVERSITY   (China)

^c IEEE   (United States)

Author keywords

Binary phase Fresnel lens; MEMS; Polarization beam splitter; Surface micromachining

Indexed keywords

COMPUTER AIDED DESIGN; INTEGRATED OPTICS; LIGHT EXTINCTION; LIGHT POLARIZATION; LIGHT REFLECTION; LIGHT TRANSMISSION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL INSTRUMENT LENSES; SEMICONDUCTING SILICON;

BINARY PHASE FRESNEL LENSES; POLARIZATION BEAM SPLITTERS (PBS); SURFACE MICROMACHINING;

OPTICAL BEAM SPLITTERS;

EID: 0032122681     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.681293     Document Type: Article

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