Micromachined polysilicon microscanners for barcode readers

IEEE Photonics Technology Letters

Volumn 8, Issue 12, 1996, Pages 1707-1709

  Kiang, Meng Hsiung ^a,b   Solgaard, Olav ^a,c   Muller, Richard S ^a,b   Lau, Kam Y ^a,b  

^a IEEE

^b UNIVERSITY OF CALIFORNIA   (United States)

^c University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BAR CODES; COST EFFECTIVENESS; ELECTROOPTICAL DEVICES; MICROMACHINING; MIRRORS; NATURAL FREQUENCIES; SEMICONDUCTOR DEVICE MANUFACTURE;

BARCODE READERS; POLYSILICON MICROSCANNERS;

SCANNING;

EID: 0030381609     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.544726     Document Type: Article

References (7)

1. M.-H. Kiang, O. Solgaard, M. Daneman, N. C. Tien, R. S. Muller, and K. Y. Lau, "High-precision silicon-micromachined micromirrors with onchip actuation for external-cavity semiconductor lasers," Conf. Lasers and Electro-Optics (Tech. Dig. Series), Baltimore, MD, May 1995, vol. 15, pp. 248-249.
2. M.-H. Kiang, O. Solgaard, R. S. Muller, and K. Y. Lau, "Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers," IEEE Photon. Technol. Lett., vol. 8, no. 1, pp. 95-97, 1996.
3. _, "Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners," in Proc. IEEE Micro Electro Mech. Sys. Workshop. San Diego, CA, Feb. 1996, pp. 192-197.
4. O. Solgaard, M. Daneman, N. C. Tien, A. Friedberger, R. S. Muller, and K. Y. Lau, "Optoelectronic packaging using silicon surface-micromachined alignment mirrors," IEEE Photon. Technol. Lett., vol. 7, no. 1, pp. 41-43, 1995.
5. Y. Lin, S. S. Lee, K. S. Pister, and M. C. Wu, "Micro-machined three-dimensional micro-optics for free-space optical system," IEEE Photon. Technol. Lett., vol. 6, no. 12, pp. 1445-1447, 1994.
6. K. Deng, H. Miyajima, V. R. Dhuler, M. Mehregany, S. W. Smith, F. L. Merat, and S. Furukawa, "The development of polysilicon micromotors for optical scanning applications," in Tech. Dig., Solid-State Sensor & Actuator Workshop, Hilton Head, SC, June 1994, pp. 234-238.
7. A. Yasseen, S. W. Smith, M. Mehregany, and F. L. Merat, "Diffraction gratings scanners using polysilicon micromotors," in Proc. IEEE Micro Electro Mech. Sys. Workshop, Amsterdam, The Netherlands, Jan. 1995, pp. 175-180.