Femtosecond laser fabrication of monolithically integrated microfluidic sensors in glass

Sensors (Switzerland)

Volumn 14, Issue 10, 2014, Pages 19402-19440

  He, Fei ^a,b   Liao, Yang ^a   Lin, Jintian ^a   Song, Jiangxin ^a   Qiao, Lingling ^a   Cheng, Ya ^a   Sugioka, Koji ^b  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b Institute of Physical and Chemical Research   (Japan)

Author keywords

Electrofluidics; Femtosecond laser; Glass material; Lab on a chip; Lab on fiber; Micro nanofluidics; Microfabrication; Optofluidics; Surface enhanced raman scattering

Indexed keywords

FABRICATION; GLASS; LAB-ON-A-CHIP; LASER MATERIALS PROCESSING; MICROFABRICATION; MICROFLUIDICS; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL WAVEGUIDES; RAMAN SCATTERING; SURFACE SCATTERING; ULTRAFAST LASERS;

ELECTROFLUIDICS; GLASS MATERIALS; MICRO-/NANOFLUIDICS; OPTO-FLUIDICS; SURFACE ENHANCED RAMAN SCATTERING (SERS);

ULTRASHORT PULSES;

EID: 84908544038     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s141019402     Document Type: Review

References (156)

1. Whitesides, G.M. The origins and the future of microfluidics. Nature 2006, 442, 368-373.
2. Sackmann, E.K.; Fulton, A.L.; Beebe, D.J. The present and future role of microfluidics in biomedical research. Nature 2014, 507, 181-189.
3. Psaltis, D.; Quake, S.R.; Yang, C. Developing optofluidic technology through the fusion of microfluidics and optics. Nature 2006, 442, 381-386.
4. Schmidt, H.; Hawkins, A.R. The photonic integration of non-solid media using optofluidics. Nat. Photon. 2011, 5, 598-604.
5. Gattass, R.R.; Mazur, E. Femtosecond laser micromachining in transparent materials. Nat. Photon. 2008, 2, 219-225.
6. Sugioka, K.; Cheng, Y. Ultrafast lasers-reliable tools for advanced materials processing. Light Sci. Appl. 2014, doi:10.1038/lsa.2014.30.
7. 3 regenerative amplifier. Opt. Lett. 1993, 18, 2044-2046.
8. Srinivasan, R.; Sutcliffe, E.; Braren, B. Ablation and etching of polymethylmethacrylate by very short (160 fs) ultraviolet (308 nm) laser pulses. Appl. Phys. Lett. 1987, 51, 1285-1287.
9. Küper, S.; Stuke, M. Femtosecond UV excimer laser ablation. Appl. Phys. B 1987, 44, 199-204.
10. Chichkov, B.N.; Momma, C.; Nolte, S.; Von Alvensleben, F.; Tunnermann, A. Femtosecond, picosecond and nanosecond laser ablation of solids. Appl. Phys. A 1996, 63, 109-115.
11. Davis, K.M.; Miura, K.; Sugimoto, N.; Hirao, K. Writing waveguides in glass with a femtosecond laser. Opt. Lett. 1996, 21, 1729-1731.
12. Glezer, E.N.; Milosavljevic, M.; Huang, L.; Finlay, R.J.; Her, T.H.; Callan, J.P.; Mazur, E. Three-dimensional optical storage inside transparent materials. Opt. Lett. 1996, 21, 2023-2025.
13. Bellouard, Y.; Champion, A.; Lenssen, B.; Matteucci, M.; Schaap, A.; Beresna, M.; Corbari, C.; Gecevičius, M.; Kazansky, P.; Chappuis, O.; et al. The femtoprint project. J. Laser Micro Nanoeng. 2012, 7, 1-10.
14. Mielke, M.M.; Booth, T.; Greenberg, M.; Gaudiosi, D.M.; Martinez, C.; Sapers, S.P.; Cline, R.; Srinivas, R.A. Applications of Ultrafast Lasers in Microfabrication. J. Laser Micro Nanoeng. 2013, 8, 115-123.
15. Gottmann, J.; Hermans, M.; Ortmann, J. Microcutting and hollow 3D microstructures in glasses by in-volume selective laser-induced etching (ISLE). J. Laser Micro Nanoeng. 2013, 8, 15-18.
16. Sundaram, S.K.; Mazur, E. Inducing and probing non-thermal transitions in semiconductors using femtosecond laser pulses. Nat. Mater. 2002, 1, 217-224.
17. Stuart, B.C.; Feit, M.D.; Herman, S.; Rubenchik, A.M.; Shore, B.W.; Perry, M.D. Nanosecond-to-femtosecond laser-induced breakdown in dielectrics. Phys. Rev. B 1996, 53, 1749-1761.
18. Gleizes, A.; Gonzalez, J.J.; Freton, P. Thermal plasma modelling. J. Phys. D Appl. Phys. 2005, 38, R153-R183.
19. Joglekar, A.P.; Liu, H.H.; Meyhöfer, E., Mourou, G.; Hunt, A.J. Optics at critical intensity: Applications to nanomorphing. Proc. Natl. Acad. Sci. USA 2004, 101, 5856-5861.
20. Liao, Y.; Shen, Y.; Qiao, L.; Chen, D.; Cheng, Y.; Sugioka, K.; Midorikawa, K. Femtosecond laser nanostructuring in porous glass with sub-50 nm feature sizes. Opt. Lett. 2013, 38, 187-189.
21. Tan, D.; Li, Y.; Qi, F.; Yang, H.; Gong, Q.; Dong, X.; Duan, X. Reduction in feature size of two-photon polymerization using SCR500. Appl. Phys. Lett. 2007, doi:10.1063/1.2535504.
22. Shimotsuma, Y.; Sakakura, M.; Kazansky, P.G.; Beresna, M.; Qiu, J.; Miura, K.; Hirao, K. Ultrafast Manipulation of Self-Assembled Form Birefringence in Glass. Adv. Mater. 2010, 22, 4039-4043.
23. Sansoni, L.; Sciarrino, F.; Vallone, G.; Mataloni, P.; Crespi, A.; Ramponi, R.; Osellame, R. Polarization entangled state measurement on a chip. Phys. Rev. Lett. 2010, doi:10.1103/ PhysRevLett.105.200503.
24. Osellame, R.; Hoekstra, H.J.W.M.; Cerullo, G.; Pollnau, M. Femtosecond laser microstructuring: An enabling tool for optofluidic lab-on-chips. Laser Photon. Rev. 2011, 5, 442-463.
25. Sugioka, K.; Cheng, Y. Femtosecond laser processing for optofluidic fabrication. Lab Chip 2012, 12, 3576-3589.
26. Kanehira, S.; Si, J.; Qiu, J.; Fujita, K.; Hirao, K. Periodic nanovoid structures via femtosecond laser irradiation. Nano Lett. 2005, 5, 1591-1595.
27. Shimotsuma, Y.; Kazansky, P.G.; Qiu, J.; Hirao, K. Self-organized nanogratings in glass irradiated by ultrashort light pulses. Phys. Rev. Lett. 2003, doi:10.1103/PhysRevLett.91.247405.
28. Liu, Y.; Shimizu, M.; Zhu, B.; Dai, Y.; Qian, B.; Qiu, J.R.; Shimotsuma, Y.; Miura, K.; Hirao, K. Micromodification of element distribution in glass using femtosecond laser irradiation. Opt. Lett. 2009, 34, 136-138.
29. Cheng, Y.; Sugioka, K.; Masuda, M.; Shihoyama, K.; Toyoda, K.; Midorikawa, K. Optical gratings embedded in photosensitive glass by photochemical reaction using a femtosecond laser. Opt. Express 2003, 11, 1809-1816.
30. Yang, W.; Kazansky, P.G.; Svirko, Y.P. Non-reciprocal ultrafast laser writing. Nat. Photon. 2008, 2, 99-104.
31. Itoh, K.; Watanabe, W.; Nolte, S.; Schaffer, C.B. Ultrafast processes for bulk modification of transparent materials. MRS Bull. 2006, 31, 620-625.
32. Liu, X.; Du, D.; Mourou, G. Laser ablation and micromachining with ultrashort laser pulses. IEEE J. Quantum Electron. 1997, 33, 1706-1716.
33. Shirk, M.D.; Molian, P.A. A review of ultrashort pulsed laser ablation of materials. J. Laser. Appl. 1998, 10, 18-28.
34. Plech, A.; Leiderer, P.; Boneberg, J. Femtosecond laser near field ablation. Laser. Photon. Rev. 2009, 3, 435-451.
35. Sugioka, K.; Cheng, Y. A tutorial on optics for ultrafast laser materials processing: Basic microprocessing system to beam shaping and advanced focusing methods. Adv. Opt. Technol. 2012, 1, 353-364.
36. Duocastella, M.; Arnold, C.B. Bessel and annular beams for materials processing. Laser Photon. Rev. 2012, 6, 607-621.
37. Fischer, J.; Wegener, M. Three-dimensional optical laser lithography beyond the diffraction limit. Laser Photon. Rev. 2013, 7, 22-44.
38. Della Valle, G.; Osellame, R.; Laporta, P. Micromachining of photonic devices by femtosecond laser pulses. J. Opt. A Pure Appl. Opt. 2009, doi:10.1088/1464-4258/11/1/013001.
39. Juodkazis, S.; Mizeikis, V.; Misawa, H. Three-dimensional microfabrication of materials by femtosecond lasers for photonics applications. J. Appl. Phys. 2009, doi:10.1063/1.3216462.
40. Ams, M.; Marshall, G.D.; Dekker, P.; Dubov, M.; Mezentsev, V.K.; Bennion, I.; Withford, M.J. Investigation of ultrafast laser-photonic material interactions: Challenges for directly written glass photonics. IEEE J. Sel. Top. Quantum Electron. 2008, 14, 1370-1381.
41. Ams, M.; Marshall, G.D.; Dekker, P.; Piper, J.A.; Withford, M.J. Ultrafast laser written active devices. Laser Photon. Rev. 2009, 3, 535-544.
42. Szameit, A.; Nolte, S. Discrete optics in femtosecond-laser-written photonic structures. J. Phys. B Atom. Mol. Opt. Phys. 2010, doi:10.1088/0953-4075/43/16/163001.
43. Thomas, J.; Voigtlaender, C.; Becker, R.G.; Richter, D.; Tünnermann, A.; Nolte, S. Femtosecond pulse written fiber gratings: A new avenue to integrated fiber technology. Laser Photon. Rev. 2012, 6, 709-723.
44. Chen, F.; Aldana, J.R. Optical waveguides in crystalline dielectric materials produced by femtosecond-laser micromachining. Laser Photon. Rev. 2013, 8, 251-275.
45. Sugioka, K.; Cheng, Y.; Midorikawa, K. Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture. Applied Physics A 2005, 81, 1-10.
46. Sugioka, K.; Hanada, Y.; Midorikawa, K. Three-dimensional femtosecond laser micromachining of photosensitive glass for biomicrochips. Laser Photon. Rev. 2010, 4, 386-400.
47. Sugioka, K.; Cheng, Y. Integrated microchips for biological analysis fabricated by femtosecond laser direct writing. Mrs Bull. 2011, 36, 1020-1027.
48. Buividas, R.; Mikutis, M.; Juodkazis, S. Surface and bulk structuring of materials by ripples with long and short laser pulses: Recent advances. Prog. Quant. Electron. 2014, 38, 119-156.
49. Taylor, R.; Hnatovsky, C.; Simova. E. Applications of femtosecond laser induced self-organized planar nanocracks inside fused silica glass. Laser Photon. Rev. 2008, 2, 26-46.
50. Stratakis, E.; Ranella, A.; Farsari, M.; Fotakis, C. Laser-based micro/nanoengineering for biological applications. Prog. Quant. Electron. 2009, 33, 127-163.
51. Vorobyev, A.Y.; Guo, C. Direct femtosecond laser surface nano/microstructuring and its applications. Laser Photon. Rev. 2013, 7, 385-407.
52. Sun, H.B.; Kawata, S. Two-Photon Photopolymerization and 3D Lithographic Microfabrication. In NMR 3D Analysis Photopolymerization; Springer: Berlin, Germany, 2004; Volume 170, pp. 169-273.
53. LaFratta, C.N.; Fourkas, J.T.; Baldacchini, T.; Farrer, R.A. Multiphoton fabrication. Angew. Chem. Int. Ed. 2007, 46, 6238-6258.
54. Maruo, S.; Fourkas, J.T. Recent progress in multiphoton microfabrication. Laser Photon. Rev. 2008, 2, 100-111.
55. Zhang, Y.L.; Chen, Q.D.; Xia, H.; Sun, H.B. Designable 3D nanofabrication by femtosecond laser direct writing. Nano Today 2010, 5, 435-448.
56. Malinauskas, M.; Farsari, M.; Piskarskas, A.; Juodkazis, S. Ultrafast laser nanostructuring of photopolymers: A decade of advances. Phys. Rep. 2013, 533, 1-31.
57. Xu, B.B.; Zhang, Y.L.; Xia, H. Dong, W.F.; Ding, H.; Sun, H.B. Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing. Lab Chip 2013, 13, 1677-1690.
58. Sekkat, Z.; Kawata, S. Laser nanofabrication in photoresists and azopolymers. Laser Photon. Rev. 2014, 8, 1-26.
59. Vogel, A.; Venugopalan, V. Mechanisms of pulsed laser ablation of biological tissues. Chem. Rev. 2003, 103, 577-644.
60. Vogel, A.; Noack, J.; Hüttman, G.; Paltauf, G. Mechanisms of femtosecond laser nanosurgery of cells and tissues. Appl. Phys. B 2005, 81, 1015-1047.
61. Hoy, C.L.; Ferhanoglu, O.; Yildirim, M.; Kim, K.H.; Karajanagi, S.S.; Chan, K.M.C.; Kobler, J.; Zeitels, S.M.; Ben-Yakar, A. Clinical ultrafast laser surgery: Recent advances and future directions. IEEE J. Sel. Top. Quant. Electron. 2014, 20, 1-14.
62. He, F.; Sun, H.; Huang, M.; Xu, J.; Liao, Y.; Zhou, Z.; Cheng, Y.; Xu, Z.; Sugioka, K.; Midorikawa, K. Rapid fabrication of optical volume gratings in Foturan glass by femtosecond laser micromachining. Appl. Phys. A 2009, 97, 853-857.
63. Stoian, R.; Boyle, M.; Thoss, A.; Rosenfeld, A.; Korn, G.; Hertel, I.V.; Campbell, E.E.B. Laser ablation of dielectrics with temporally shaped femtosecond pulses. Appl. Phys. Lett. 2002, 80, 353-355.
64. Eaton, S.M.; Zhang, H.; Ng, M.L.; Li, J.; Chen, W.J.; Ho, S.; Herman, P.R. Transition from thermal diffusion to heat accumulation in high repetition rate femtosecond laser writing of buried optical waveguides. Opt. Express 2008, 16, 9443-9458.
65. Wu, Y.; Wang, C.Y.; Jia, W.; Ni, X.; Hu, M.; Chai, L. Influence of scanning velocity on femtosecond laser direct writing lines on FOTURAN glass. Chin. Opt. Lett. 2008, 6, 51-53.
66. Kazansky, P.G.; Inouye, H.; Mitsuyu, T.; Miura, K.; Qiu, J.; Hirao, K.; Starrost, F. Anomalous anisotropic light scattering in Ge-doped silica glass. Phys. Rev. Lett. 1999, 82, 2199-2202.
67. Bhardwaj, V.R.; Simova, E.; Rajeev, P.P.; Hnatovsky, C.; Taylor, R.S.; Rayner, D.M.; Corkum, P.B. Optically produced arrays of planar nanostructures inside fused silica. Phys. Rev. Lett. 2006, doi:10.1103/PhysRevLett.96.057404.
68. Salter, P.S.; Booth, M.J. Dynamic control of directional asymmetry observed in ultrafast laser direct writing. Appl. Phys. Lett. 2012, doi:10.1063/1.4756904.
69. Zhang, H.; Eaton, S.M.; Herman, P.R. Single-step writing of Bragg grating waveguides in fused silica with an externally modulated femtosecond fiber laser. Opt. Lett. 2007, 32, 2559-2561.
70. Matsuo, S.; Miyamoto, T.; Tomita, T.; Hashimoto, S. Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array. Appl. Opt. 2007, 46, 8264-8267.
71. Kondo, T.; Juodkazis, S.; Mizeikis, V.; Matsuo, S.; Misawa, H. Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography. New J. Phys. 2006, doi:10.1088/1367-2630/8/10/250.
72. Cerullo, G.; Osellame, R.; Taccheo, S.; Marangoni, M.; Polli, D.; Ramponi, R.; Laporta, P.; de Silvestri, S. Femtosecond micromachining of symmetric waveguides at 1.5 μm by astigmatic beam focusing. Opt. Lett. 2002, 27, 1938-1940.
73. Cheng, Y.; Sugioka, K.; Midorikawa, K.; Masuda, M.; Toyoda, K.; Kawachi, M.; Shihoyama, K. Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser. Opt. Lett. 2003, 28, 55-57.
74. Ams, M.; Marshall, G.; Spence, D.; Withford, M. Slit beam shaping method for femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses. Opt. Express 2005, 13, 5676-5681.
75. Sugioka, K.; Cheng, Y.; Midorikawa, K.; Takase, F.; Takai, H. Femtosecond laser microprocessing with three-dimensionally isotropic spatial resolution using crossed-beam irradiation. Opt. Lett. 2006, 31, 208-210.
76. He, F.; Xu, H.; Cheng, Y.; Ni, J.; Xiong, H.; Xu, Z.; Sugioka, K.; Midorikawa, K. Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses. Opt. Lett. 2010, 35, 1106-1108.
77. He, F.; Cheng, Y.; Lin, J.; Ni, J.; Xu, Z.; Sugioka, K.; Midorikawa, K. Independent control of aspect ratios in the axial and lateral cross sections of a focal spot for three-dimensional femtosecond laser micromachining. New J. Phys. 2011, doi:10.1088/1367-2630/13/8/083014.
78. He, F.; Zeng, B.; Chu, W.; Ni, J.; Sugioka, K.; Cheng, Y.; Durfee, C.G. Characterization and control of peak intensity distribution at the focus of a spatiotemporally focused femtosecond laser beam. Opt. Express 2014, 22, 9734-9748.
79. Miura, K.; Qiu, J.; Inouye, H.; Mitsuyu, T.; Hirao, K. Photowritten optical waveguides in various glasses with ultrashort pulse laser. Appl. Phys. Lett. 1997, 71, 3329-3331.
80. Schaffer, C.B.; Brodeur, A.; Garcia, J.F.; Mazur, E. Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy. Opt. Lett. 2001, 26, 93-95.
81. Li, Y.; Gao, X.; Jiang, M.; Sun, Q.; Tian, J. Fabrication of magneto-optical microstructure by femtosecond laser pulses. Chin. Opt. Lett. 2012, 10, 102201-102201.
82. Marcinkevičius, A.; Juodkazis, S.; Watanabe, M.; Miwa, M.; Matsuo, S.; Misawa, H.; Nishii, J. Femtosecond laser-assisted three-dimensional microfabrication in silica. Opt. Lett. 2001, 26, 277-279.
83. Hnatovsky, C.; Taylor, R.S.; Simova, E.; Bhardwaj, V.R.; Rayner, D.M.; Corkum, P.B. Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica. Opt. Lett. 2005, 30, 1867-1869.
84. Yu, X.; Liao, Y.; He, F.; Zeng, B.; Cheng, Y.; Xu, Z.; Sugioka, K.; Midorikawa, K. Tuning etch selectivity of fused silica irradiated by femtosecond laser pulses by controlling polarization of the writing pulses. J. Appl. Phys. 2011, doi:10.1063/1.3555080.
85. Kiyama, S.; Matsuo, S.; Hashimoto, S.; Morihira, Y. Examination of etching agent and etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica substrates. J. Phys. Chem. C 2009, 113, 11560-11566.
86. Hermans, M.; Gottmann, J.; Riedel, F. Selective, Laser-Induced Etching of Fused Silica at High Scan-Speeds Using KOH. J. Laser Micro Nanoeng. 2014, 9, 126-131.
87. He, F.; Cheng, Y.; Xu, Z.; Liao, Y.; Xu, J.; Sun, H.; Wang, C.; Zhou, Z.; Sugioka, K.; Midorikawa, K.; et al. Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser. Opt. Lett. 2010, 35, 282-284.
88. He, F.; Cheng, Y.; Qiao, L.; Wang, C.; Xu, Z.; Sugioka, K.; Midorikawa, K.; Wu, J. Two-photon fluorescence excitation with a microlens fabricated on the fused silica chip by femtosecond laser micromachining. Appl. Phys. Lett. 2010, doi:10.1063/1.3294627.
89. He, F.; Lin, J.; Cheng, Y. Fabrication of hollow optical waveguides in fused silica by three-dimensional femtosecond laser micromachining. Appl. Phys. B 2011, 105, 379-384.
90. Lin, J.; Yu, S.; Ma, Y.; Fang, W.; He, F.; Qiao, L.; Tong, L.; Cheng, Y.; Xu, Z. On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing. Opt. Express 2012, 20, 10212-10217.
91. Masuda, M.; Sugioka, K.; Cheng, Y.; Aoki, N.; Kawachi, M.; Shihoyama, K.; Tiyoda, K.; Helvajian, H.; Midorikawa, K. 3-D microstructuring inside photosensitive glass by femtosecond laser excitation. Appl. Phys. A 2003, 76, 857-860.
92. Li, Y.; Itoh, K.; Watanabe, W.; Yamada, K.; Kuroda, D.; Nishii, J.; Jiang, Y. Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses. Opt. Lett. 2001, 26, 1912-1914.
93. Li, Y.; Qu, S. Femtosecond laser-induced breakdown in distilled water for fabricating the helical microchannels array. Opt. Lett. 2011, 36, 4236-4238.
94. Liao, Y.; Ju, Y.; Zhang, L.; He, F.; Zhang, Q.; Shen, Y.; Midorikawa, K. Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing. Opt. Lett. 2010, 35, 3225-3227.
95. Liao, Y.; Song, J.; Li, E.; Luo, Y.; Shen, Y.; Chen, D.; Cheng, Y.; Xu, Z.; Sugioka, K.; Midorikawa, K. Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing. Lab Chip 2012, 12, 746-749.
96. Liao, Y.; Cheng, Y.; Liu, C.; Song, J.; He, F.; Shen, Y.; Chen, D.; Xu, Z.; Fan, Z.; Wei, X.; Sugioka, K.; Midorikawa, K. Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration. Lab Chip 2013, 13, 1626-1631.
97. Xu, J.; Liao, Y.; Zeng, H.; Zhou, Z.; Sun, H.; Song, J.; Wang, X.; Cheng, Y.; Xu, Z.; Sugioka, K.; Midorikawa, K. Selective metallization on insulator surfaces with femtosecond laser pulses. Opt. Express 2007, 15, 12743-12748.
98. Zhou, Z.; Xu, J.; Cheng, Y.; Xu, Z.; Sugioka, K.; Midorikawa, K. Surface-enhanced Raman scattering substrate fabricated by femtosecond laser direct writing. Jpn. J. Appl. Phys. 2008, doi:10.1143/JJAP.47.189.
99. Xu, J.; Wu, D.; Hanada, Y.; Chen, C.; Wu, S.; Cheng, Y.; Sugioka, K.; Midorikawa, K. Electrofluidics fabricated by space-selective metallization in glass microfluidic structures using femtosecond laser direct writing. Lab Chip 2013, 13, 4608-4616.
100. Reinhardt, C.; Passinger, S.; Chichkov, B.N.; Marquart, C.; Radko, I.P.; Bozhevolnyi, S.I. Laser-fabricated dielectric optical components for surface plasmon polaritons. Opt. Lett. 2006, 31, 1307-1309.
101. Malinauskas, M.; Žukauskas, A.; Purlys, V.; Belazaras, K.; Momot, A.; Paipulas, D.; Gadonas, R.; Piskarskas, A.; Gilbergs, H.; Gaidukevičiūtė, A.; et al. Femtosecond laser polymerization of hybrid/integrated micro-optical elements and their characterization. J. Opt. 2010, doi:10.1088/ 2040-8978/12/12/124010.
102. Wu, D.; Wu, S.Z.; Xu, J.; Niu, L.G.; Midorikawa, K.; Sugioka, K. Hybrid femtosecond laser microfabrication to achieve true 3D glass/polymer composite biochips with multiscale features and high performance: The concept of ship-in-a-bottle biochip. Laser Photon. Rev. 2014, 8, 458-467.
103. Lan, X.; Han, Y.; Wei, T.; Zhang, Y.; Jiang, L.; Tsai, H.L.; Xiao, H. Surface-enhanced Raman-scattering fiber probe fabricated by femtosecond laser. Opt. Lett. 2009, 34, 2285-2287.
104. Lin, J.; Xu, Y.; Song, J.; Zeng, B.; He, F.; Xu, H.; Sugioka, K.; Fang, W.; Cheng, Y. Low-threshold whispering-gallery-mode microlasers fabricated in a Nd: Glass substrate by three-dimensional femtosecond laser micromachining. Opt. Lett. 2013, 38, 1458-1460.
105. Lenssen, B.; Bellouard, Y. Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching. Appl. Phys. Lett. 2012, doi:10.1063/1.4750236.
106. Xu, B.B.; Xia, H.; Niu, L.G.; Zhang, Y.L.; Sun, K.; Chen, Q.D.; Xu, Y.; Lv, Z.; Li, Z.; Misawa, H.; et al. Flexible nanowiring of metal on nonplanar substrates by femtosecond-laser-induced electroless plating. Small 2010, 6, 1762-1766.
107. Bellouard, Y.; Said, A.; Dugan, M.; Bado, P. Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching. Opt. Express 2004, 12, 2120-2129.
108. Crespi, A.; Gu, Y.; Ngamsom, B.; Hoekstra, H.J.; Dongre, C.; Pollnau, M.; Ramponi, R.; Vlekkert, H.H.; Watts, P.; Cerullo, G.; et al. Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection. Lab Chip 2010, 10, 1167-1173.
109. Bellini, N.; Vishnubhatla, K.C.; Bragheri, F.; Ferrara, L.; Minzioni, P.; Ramponi, R.; Cristiani, I.; Osellame, R. Femtosecond laser fabricated monolithic chip for optical trapping and stretching of single cells. Opt. Express 2010, 18, 4679-4688.
110. Qiao, L.; He, F.; Wang, C.; Cheng, Y.; Sugioka, K.; Midorikawa, K. A microfluidic chip integrated with a microoptical lens fabricated by femtosecond laser micromachining. Appl. Phys. A 2011, 102, 179-183.
111. Matsuo, S.; Kiyama, S.; Shichijo, Y.; Tomita, T.; Hashimoto, S.; Hosokawa, Y.; Masuhara, H. Laser microfabrication and rotation of ship-in-a-bottle optical rotators. Appl. Phys. Lett. 2008, doi:10.1063/1.2967872.
112. Bellouard, Y.; Said, A.; Bado, P. Integrating optics and micro-mechanics in a single substrate: A step toward monolithic integration in fused silica. Opt. Express 2005, 13, 6635-6644.
113. Zhou, Z.; Xu, J.; Liao, Y.; Cheng, Y.; Xu, Z.; Sugioka, K.; Midorikawa, K. Fabrication of an integrated Raman sensor by selective surface metallization using a femtosecond laser oscillator. Opt. Commun. 2009, 282, 1370-1373.
114. Hanada, Y.; Sugioka, K.; Kawano, H.; Ishikawa, I.S.; Miyawaki, A.; Midorikawa, K. Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass. Biomed. Microdev. 2008, 10, 403-410.
115. Cheng, Y.; Tsai, H.L.; Sugioka, K.; Midorikawa, K. Fabrication of 3D microoptical lenses in photosensitive glass using femtosecond laser micromachining. Appl. Phys. A 2006, 85, 11-14.
116. Cheng, Y.; Sugioka, K.; Midorikawa, K.; Masuda, M.; Toyoda, K.; Kawachi, M.; Shihoyama, K. Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser. Opt. Lett. 2003, 28, 1144-1146.
117. Cheng, Y.; Sugioka, K.; Midorikawa, K. Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing. Opt. Lett. 2004, 29, 2007-2009.
118. Masuda, M.; Sugioka, K.; Cheng, Y.; Hongo, T.; Shihoyama, K.; Takai, H.; Midorikawa, K. Direct fabrication of freely movable microplate inside photosensitive glass by femtosecond laser for lab-on-chip application. Appl. Phys. A 2004, 78, 1029-1032.
119. Sugioka, K.; Hongo, T.; Takai, H.; Midorikawa, K. Selective metallization of internal walls of hollow structures inside glass using femtosecond laser. Appl. Phys. Lett. 2005, doi:10.1063/1.1921355.
120. Paiè, P.; Bragheri, F.; Vazquez, R.M.; Osellame, R. Straightforward 3D hydrodynamic focusing in femtosecond laser fabricated microfluidic channels. Lab Chip 2014, 14, 1826-1833.
121. Monat, C.; Domachuk, P.; Eggleton, B.J. Integrated optofluidics: A new river of light. Nat. Photon. 2007, 1, 106-114.
122. Kim, M.; Hwang, D.J.; Jeon, H.; Hiromatsu, K.; Grigoropoulos, C.P. Single cell detection using a glass-based optofluidic device fabricated by femtosecond laser pulses. Lab Chip 2009, 9, 311-318.
123. Choudhury, D.; Ramsay, W.T.; Kiss, R.; Willoughby, N.A.; Paterson, L.; Kar, A.K. A 3D mammalian cell separator biochip. Lab Chip 2012, 12, 948-953.
124. Sun, H.; He, F.; Zhou, Z.; Cheng, Y.; Xu, Z.; Sugioka, K.; Midorikawa, K. Fabrication of microfluidic optical waveguides on glass chips with femtosecond laser pulses. Opt. Lett. 2007, 32, 1536-1538.
125. Vazquez, R.M.; Osellame, R.; Nolli, D.; Dongre, C.; van den Vlekkert, H.; Ramponi, R.; Pollnaub, M.; Cerullo, G. Integration of femtosecond laser written optical waveguides in a lab-on-chip. Lab Chip 2009, 9, 91-96.
126. Vollmer, F.; Arnold, S. Whispering-gallery-mode biosensing: label-free detection down to single molecules. Nat. Methods 2008, 5, 591-596.
127. Zhu, J.; Ozdemir, S.K.; Xiao, Y.; Li, L.; He, L.; Chen, D.; Yang, L. On-chip single nanoparticle detection and sizing by mode splitting in an ultrahigh-Q microresonator. Nat. Photon. 2010, 4, 46.
128. Song, J.; Lin, J.; Tang, J.; Liao, Y.; He, F.; Wang, Z.; Sugioka, K; Cheng, Y. Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining. Opt. Express 2014, 22, 14792-14802.
129. Kuiper, S.; Hendriks, B.H.W. Variable-focus liquid lens for miniature cameras. Appl. Phys. Lett. 2004, 85, 1128-1130.
130. Fleischmann, M.; Hendra, P.J.; McQuillan, A.J. Raman spectra of pyridine adsorbed at a silver electrode. Chem. Phys. Lett. 1974, 26, 163-166.
131. Jeanmaire, D.L.; van Duyne, R.P. Surface Raman spectroelectrochemistry. Part 1. Heterocyclic, aromatic, and aliphatic amines adsorbed on the anodized silver electrode. J. Electroanal. Chem. 1977, 84, 1-20.
132. Albrecht, M.G.; Creighton, J.A. Anomalously intense raman spectra of pyridine at a silver electrode. J. Am. Chem. Soc. 1977, 99, 5215-5217.
133. Kneipp, K.; Wang, Y.; Kneipp, H.; Perelman, L.T.; Itzkan, I.; Dasari, R.R.; Feld, M.S. Single molecule detection using surface-enhanced raman scattering (SERS). Phys. Rev. Lett. 1997, 78, 1667-1670.
134. Nie, S.; Emory, S.R. Probing Single Molecules and Single Nanoparticles by Surface-Enhanced Raman Scattering. Science 1997, 275, 1102-1106.
135. Lin, C.H.; Jiang, L.; Chai, Y.H.; Xiao, H.; Chen, S.J.; Tsai, H.L. One-step fabrication of nanostructures by femtosecond laser for surface-enhanced Raman scattering. Opt. Express 2009, 17, 21581-21589.
136. Ma, X.; Huo, H.; Wang, W.; Tian, Y.; Wu, N.; Guthy, C.; Shen, M.Y.; Wang, X. Surface-enhanced Raman scattering sensor on an optical fiber probe fabricated with a femtosecond laser. Sensors 2010, 10, 11064-11071.
137. Xu, B.; Ma, Z.; Wang, L.; Zhang, R.; Niu, L.; Yang, Z.; Zhang, Y.; Zheng, W.; Zhao, B.; Xu, Y.; et al. Localized flexible integration of high-efficiency surface enhanced Raman scattering (SERS) monitors into microfluidic channels. Lab Chip 2011, 11, 3347-3351.
138. Hanada, Y.; Sugioka, K.; Shihira-Ishikawa, I.; Kawano, H.; Miyawaki, A.; Midorikawa, K. 3D microfluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria. Lab Chip 2011, 11, 2109-2115.
139. Schaap, A.; Rohrlack, T.; Bellouard, Y. Optical classification of algae species with a glass lab-on-a-chip. Lab Chip 2012, 12, 1527-1532.
140. Consales, M.; Pisco, M.; Cusano, A. Lab-on-fiber technology: A new avenue for optical nanosensors. Photon. Sens. 2012, 2, 289-314.
141. Ricciardi, A.; Consales, M.; Quero, G.; Crescitelli, A.; Esposito, E.; Cusano, A. Lab-on-fiber devices as an all-around platform for sensing. Opt. Fiber Technol. 2013, 19, 772-784.
142. Ricciardi, A.; Consales, M.; Quero, G.; Crescitelli, A.; Esposito, E.; Cusano, A. Versatile optical fiber nanoprobes: From plasmonic biosensors to polarization-sensitive devices. ACS Photon. 2013, 1, 69-78.
143. Lai, Y.; Zhou, K.; Zhang, L.; Bennion, I. Microchannels in conventional single-mode fibers. Opt. Lett. 2006, 31, 2559-2561.
144. Wang, Y.; Wang, D.N.; Yang, M.; Hong, W.; Lu, P. Refractive index sensor based on a microhole in single-mode fiber created by the use of femtosecond laser micromachining. Opt. Lett. 2009, 34, 3328-3330.
145. Brakel, A.; Grivas, C.; Petrovich, M.N.; Richardson, D.J. Micro-channels machined in microstructured optical fibers by femtosecond laser. Opt. Express 2007, 15, 8731-8736.
146. Wei, T.; Han, Y.; Tsai, H.L.; Xiao, H. Miniaturized fiber inline Fabry-Perot interferometer fabricated with a femtosecond laser. Opt. Lett. 2008, 33, 536-538.
147. Yu, Y.; Jiang, L.; Li, B.; Cao, Z.; Wang, S. Fiber inline interferometric refractive index sensors fabricated by femtosecond laser and fusion splicing. Chin. Opt. Lett. 2013, 11, 110603.
148. Yi, L.; Qu, S.; Li, Y. Single microchannel high-temperature fiber sensor by femtosecond laser-induced water breakdown. Opt. Lett. 2013, 38, 335-337.
149. Rao, Y.J.; Deng, M.; Duan, D.W.; Yang, X.C.; Zhu, T.; Cheng, G.H. Micro Fabry-Perot interferometers in silica fibers machined by femtosecond laser. Opt. Express 2007, 15, 14123-14128.
150. Wei, T.; Han, Y.; Li, Y.; Tsai, H.L.; Xiao, H. Temperature-insensitive miniaturized fiber inline Fabry-Perot interferometer for highly sensitive refractive index measurement. Opt. Express 2008, 16, 5764-5769.
151. Marshall, G.D.; Dekker, P.; Ams, M.; Piper, J.A.; Withford, M.J. Directly written monolithic waveguide laser incorporating a distributed feedback waveguide-Bragg grating. Opt. Lett. 2008, 33, 956-958.
152. Zhu, Y.; Mei, H.; Zhu, T.; Zhang, J.; Yin, S. Dual-wavelength FBG inscribed by femtosecond laser for simultaneous measurement of high temperature and strain. Chin. Opt. Lett. 2009, 7, 675-678.
153. Kondo, Y.; Nouchi, K.; Mitsuyu, T.; Watanabe, M.; Kazansky, P.G.; Hirao, K. Fabrication of long-period fiber gratings by focused irradiation of infrared femtosecond laser pulses. Opt. Lett. 1999, 4, 646-648.
154. Fang, X.; Liao, C.R.; Wang, D.N. Femtosecond laser fabricated fiber Bragg grating in microfiber for refractive index sensing. Opt. Lett. 2010, 35, 1007-1009.
155. Malinauskas, M.; Gilbergs, H.; Žukauskas, A.; Purlys, V.; Paipulas, D.; Gadonas, R. A femtosecond laser-induced two-photon photopolymerization technique for structuring microlenses. J. Opt. 2010, doi:10.1088/2040-8978/12/3/035204.
156. Guo, R.; Xiao, S.; Zhai, X.; Li, J.; Xia, A.; Huang, W. Micro lens fabrication by means of femtosecond two photon photopolymerization. Opt. Express 2006, 14, 810-816.