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Applied Physics A: Materials Science and Processing

Volumn 81, Issue 1, 2005, Pages 1-10

Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture

(3) Sugioka, K a Cheng, Y a Midorikawa, K a

a INST OF PHYS AND CHEMICAL RESEARCH (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; FREE ELECTRON LASERS; HEAT TREATMENT; LASER BEAM EFFECTS; LASER PULSES; MICROMACHINING; MICROOPTICS; MICROPROCESSOR CHIPS; MICROSTRUCTURE; NEODYMIUM LASERS; SILICA; SOLID STATE LASERS; YTTRIUM COMPOUNDS;

LAB-ON-A-CHIP DEVICES; MICROFLUIDICS; MICROLASERS; THREE-DIMENSIONAL (3D) MICROMACHINING;

PHOTOSENSITIVE GLASS;

EID: 18144392005 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-005-3225-1 Document Type: Article

Times cited : (210)

References (23)

1
- 0000164954
- and the references therein
- M.A. Bums, B.N. Johnson, A.N. Brahmasandra, K. Handique, J.R. Webster, M. Krishnan, T.S. Sammarco, P.M. Man, D. Jones, D. Heldsinger, C.H. Mastrangelo, D.T. Burke: Science 282, 484 (1998), and the references therein
- (1998) Science , vol.282 , pp. 484
- Bums, M.A.¹ Johnson, B.N.² Brahmasandra, A.N.³ Handique, K.⁴ Webster, J.R.⁵ Krishnan, M.⁶ Sammarco, T.S.⁷ Man, P.M.⁸ Jones, D.⁹ Heldsinger, D.¹⁰ Mastrangelo, C.H.¹¹ Burke, D.T.¹²

2
- 0002498305
- C.B. Scaffer, A. Brodeur, J.F. Garcia, E. Mazur: Opt. Lett. 26, 93 (2001)
- (2001) Opt. Lett. , vol.26 , pp. 93
- Scaffer, C.B.¹ Brodeur, A.² Garcia, J.F.³ Mazur, E.⁴

3
- 0002038042
- K. Yamada, W. Watanabe, T. Toma, K. Itoh, J. Nishii: Opt. Lett. 26, 19 (2001)
- (2001) Opt. Lett. , vol.26 , pp. 19
- Yamada, K.¹ Watanabe, W.² Toma, T.³ Itoh, K.⁴ Nishii, J.⁵

4
- 0037489260
- A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa: Opt. Lett. 26, 277 (2001)
- (2001) Opt. Lett. , vol.26 , pp. 277
- Marcinkevicius, A.¹ Juodkazis, S.² Watanabe, M.³ Miwa, M.⁴ Matsuo, S.⁵ Misawa, H.⁶

5
- 0001280209
- S.D. Stookey: Ind. Eng. Chem. 45, 115 (1953)
- (1953) Ind. Eng. Chem. , vol.45 , pp. 115
- Stookey, S.D.¹

6
- 18144365082
- See http://www.mikroglas.com/foturane.htm

7
- 0002630846
- W.W. Hansen, S.W. Janson, H. Helvajian: Proc. SPIE 2991, 104 (1997)
- (1997) Proc. SPIE , vol.2991 , pp. 104
- Hansen, W.W.¹ Janson, S.W.² Helvajian, H.³

8
- 0033359270
- P.D. Fuqua, S.W. Janson, W.W. Hansen, H. Helvajian: Proc. SPIE 3618, 213 (1999)
- (1999) Proc. SPIE , vol.3618 , pp. 213
- Fuqua, P.D.¹ Janson, S.W.² Hansen, W.W.³ Helvajian, H.⁴

9
- 0034448211
- P.D. Fuqua, D.P. Taylor, H. Helvajian, W.W. Hansen, M.H. Abraham: Mater. Res. Soc. Symp. Proc. 624, 79 (2000)
- (2000) Mater. Res. Soc. Symp. Proc. , vol.624 , pp. 79
- Fuqua, P.D.¹ Taylor, D.P.² Helvajian, H.³ Hansen, W.W.⁴ Abraham, M.H.⁵

10
- 0034497918
- H. Helvajian, P.D. Fuqua, W.W. Hansen, S. Janson: Proc. SPIE 4088, 319 (2000)
- (2000) Proc. SPIE , vol.4088 , pp. 319
- Helvajian, H.¹ Fuqua, P.D.² Hansen, W.W.³ Janson, S.⁴

11
- 0037357191
- M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, K. Midorikawa: Appl. Phys. A 76, 857 (2003)
- (2003) Appl. Phys. A , vol.76 , pp. 857
- Masuda, M.¹ Sugioka, K.² Cheng, Y.³ Aoki, N.⁴ Kawachi, M.⁵ Shihoyama, K.⁶ Toyoda, K.⁷ Helvajian, H.⁸ Midorikawa, K.⁹

12
- 0037217029
- Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, K. Shihoyama: Opt. Lett. 28, 55 (2003)
- (2003) Opt. Lett. , vol.28 , pp. 55
- Cheng, Y.¹ Sugioka, K.² Midorikawa, K.³ Masuda, M.⁴ Toyoda, K.⁵ Kawachi, M.⁶ Shihoyama, K.⁷

13
- 0038339015
- Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, K. Shihoyama: Opt. Lett. 28, 1144 (2003)
- (2003) Opt. Lett. , vol.28 , pp. 1144
- Cheng, Y.¹ Sugioka, K.² Midorikawa, K.³ Masuda, M.⁴ Toyoda, K.⁵ Kawachi, M.⁶ Shihoyama, K.⁷

14
- 1842586802
- M. Masuda, K. Sugioka, Y. Cheng, T. Hongo, K. Shihoyama, K. Toyoda, H. Takai, I Miyamoto, K. Midorikawa: Appl. Phys. A78, 1029 (2004)
- (2004) Appl. Phys. , vol.A78 , pp. 1029
- Masuda, M.¹ Sugioka, K.² Cheng, Y.³ Hongo, T.⁴ Shihoyama, K.⁵ Toyoda, K.⁶ Takai, H.⁷ Miyamoto, I.⁸ Midorikawa, K.⁹

15
- 4544298103
- Y. Cheng, K. Sugioka, K. Midorikawa: Opt. Lett. 29, 2007 (2004)
- (2004) Opt. Lett. , vol.29 , pp. 2007
- Cheng, Y.¹ Sugioka, K.² Midorikawa, K.³

16
- 20444455029
- T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, I. Miyamoto, H. Takai, K. Midorikawa: J. Appl. Phys. 97, 063517 (2005)
- (2005) J. Appl. Phys. , vol.97 , pp. 063517
- Hongo, T.¹ Sugioka, K.² Niino, H.³ Cheng, Y.⁴ Masuda, M.⁵ Miyamoto, I.⁶ Takai, H.⁷ Midorikawa, K.⁸

17
- 5444265256
- J. Kim, H. Berberoglu, X. Xu: J. Microlithogr. Microfabr. Microsyst. 3, 478 (2004)
- (2004) J. Microlithogr. Microfabr. Microsyst. , vol.3 , pp. 478
- Kim, J.¹ Berberoglu, H.² Xu, X.³

18
- 0345252619
- [in Japanese]
- M. Tashiro, N. Soga: Kogyo Zasshi 65, 342 (1962) [in Japanese]
- (1962) Kogyo Zasshi , vol.65 , pp. 342
- Tashiro, M.¹ Soga, N.²

19
- 0033353259
- Y. Kondo, J. Qui, T. Mitsuyu, K. Hirao, T. Yoko: Jpn. J. Appl. Phys. 38, L1146 (1999)
- (1999) Jpn. J. Appl. Phys. , vol.38
- Kondo, Y.¹ Qui, J.² Mitsuyu, T.³ Hirao, K.⁴ Yoko, T.⁵

20
- 5444229865
- K. Sugioka, Y. Cheng, M. Masuda, K. Midorikawa: Proc. SPIE Vol. 5339, 205 (2004)
- (2004) Proc. SPIE , vol.5339 , pp. 205
- Sugioka, K.¹ Cheng, Y.² Masuda, M.³ Midorikawa, K.⁴

21
- 18144406088
- K. Sugioka, T. Hongo, H. Takai, K. Midorikawa: to be published
- K. Sugioka, T. Hongo, H. Takai, K. Midorikawa: to be published

22
- 0000122656
- A.W. Poon, F. Courvoisier, R.K. Chang: Opt. Lett. 26, 632 (2001)
- (2001) Opt. Lett. , vol.26 , pp. 632
- Poon, A.W.¹ Courvoisier, F.² Chang, R.K.³

23
- 0034300170
- H.J. Moon, Y.T. Chough, K. An: Phys. Rev. Lett. 85, 3161 (2000)
- (2000) Phys. Rev. Lett. , vol.85 , pp. 3161
- Moon, H.J.¹ Chough, Y.T.² An, K.³

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