Microcutting and hollow 3d microstructures in glasses by in-volume selective laser-induced etching (Isle)

Journal of Laser Micro Nanoengineering

Volumn 8, Issue 1, 2013, Pages 15-18

  Gottmann, Jens ^a   Hermans, Martin ^a   Ortmann, Jürgen ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Digital photonic production; High speed microscanner; In volume selective laser induced etching; Microchannel; Microstructuring in glass

Indexed keywords

3D MICROSTRUCTURES; DIGITAL PHOTONICS; HIGH-SPEED SCANNING SYSTEM; LASER-INDUCED ETCHING; MEDICAL DIAGNOSTICS; MICRO STRUCTURING; MICROSCANNER; POTENTIAL PRODUCTIVITY;

ETCHING; GLASS; MICROCHANNELS;

COMPUTER AIDED DESIGN;

EID: 84877685894     PISSN: None     EISSN: 18800688     Source Type: Journal    
DOI: 10.2961/jlmn.2013.01.0004     Document Type: Article

References (12)

1. Y. Bellouard, A. Said, M. Dugan, P. Bado: "Fabrica-tion of high-aspect ratio micro fluidic channels and tunnels using femtosecond laser pulses and chemical etching", Optics Express, 12, (2004), 2120
2. C. Hnatovsky, R. S. Taylor, E. Simova, V. R. Bhardwaj, D. M. Rayner, P. B. Corkum: "Polarization-selective etching in femtosecond laser-assisted micro-fluidic channel fabrication in fused silica", Optics Letters, 30, (2005), 1867-1869
3. S. Matsuo, Y. Shickijo, T. Tomita, S. Hashimoto: "La-ser fabrication of ship-in-a-bottle microstructures in sapphire", JLMN, 2, (2007), 114-116
4. D. Wortmann, J. Gottmann, N. Brandt, H. Horn-Solle: "Micro- and nanostructures inside sapphire by fs-laser irradiation and selective etching", Optics Express, 16, (2008), 1517-1522
5. R. Osellame, H.J.W.M. Hoekstra, G. Cerullo, M. Pollnau: "Femtosecond laser microstructuring: an enabling tool for optofluidic lab-on-chips", Laser Photonics Rev., 5, (2011), 442-463
6. Y. Liao, J. Song, E. Li, Y. Luo, Y. Shen, D. Chen, Y. Chen, Z. Xu, K. Sugioka, K. Midorikawa: "Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing", Lab on a Chip, 12, (2012), 746-749
7. J. Gottmann, M. Hörstmann-Jungemann, M. Hermans, D. Beckmann: "High speed and high precision fs-laser writing using a scanner with large numerical aperture", JLMN, 4, (2009), 192-196
8. Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna et. al.: "The femtoprint project", JLMN, 7, (2012), 1-10
9. J. Gottmann, M. Hermans, M. Hörstmann-Jungemann, D. Schaefer: "Selective laser etching of sapphire and glasses", Industrial Laser Solutions, 2, (2012), 8-13
10. S. Kiyama, S. Matsuo, S. Hashimoto, Y. Morihira: "Examination of etching agent and etching mechanism on femtosecond laser microfabrication of channels in-side vitreous silica substrates", J. Phys. Chem. C, 113, (2009), 11560-11566
11. M. Hermans, J. Gottmann, A. Schiffer: "In-situ diag-nostics on fs-laser-induced modifications of glasses for selective etching", Proc. SPIE, 8244, (2012), 82440E
12. I. Miyamoto, K. Cvecek, M. Schmidt: "Evaluation of nonlinear absorptivity in internal modification of bulk glass by ultrashort laser pulses", Optics Express, 19, (2011), 10714-10727