Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing

Optics Letters

Volumn 35, Issue 19, 2010, Pages 3225-3227

  Liao, Yang ^a,b   Ju, Yongfeng ^a,b   Zhang, Long ^a   He, Fei ^a,b   Zhang, Qiang ^a,b   Shen, Yinglong ^a,b   Chen, Danping ^a   Cheng, Ya ^a   Xu, Zhizhan ^a   Sugioka, Koji ^c   Midorikawa, Katsumi ^c  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c RIKEN   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION PROCESS; FEMTO-SECOND LASER; FEMTOSECOND LASER ABLATION; GLASS SUBSTRATES; GLASS SURFACES; POROUS GLASS; POST ANNEALING; THREE-DIMENSIONAL MICROFLUIDICS; TOTAL LENGTH;

ABLATION; FABRICATION; FLUIDIC DEVICES; GLASS; MICROFLUIDICS; PULSED LASER APPLICATIONS; SUBSTRATES; THREE DIMENSIONAL; ULTRASHORT PULSES;

GLASS LASERS;

BORIC ACID; GLASS; SILICATE; SILICON DIOXIDE;

ARTICLE; CHEMISTRY; INSTRUMENTATION; LASER; METHODOLOGY; MICROFLUIDICS; POROSITY; TIME;

BORATES; GLASS; LASERS; MICROFLUIDICS; POROSITY; SILICATES; SILICON DIOXIDE; TIME FACTORS;

EID: 78149232274     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.35.003225     Document Type: Article

References (14)

1. G. M. Whitesides, Nature 442, 368 (2006).
2. B. H. Jo, L. M. Van Lerberghe, K. M. Motsegood, and D. J. Beebe, J. Microelectromech. Syst. 9, 76 (2000).
3. Y. Cheng, K. Sugioka, and K. Midorikawa, Opt. Lett. 29, 2007 (2004).
4. A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, Opt. Lett. 26, 277 (2001).
5. K. Sugioka, Y. Cheng, and K. Midorikawa, Appl. Phys. A 81, 1 (2005).
6. C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Appl. Phys. A 84, 47 (2006).
7. S. Matsuo, H. Sumia, S. Kiyamaa, T. Tomitaa, and S. Hashimoto, Appl. Surf. Sci. 255, 9758 (2009).
8. Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Y. Jiang, Opt. Lett. 26, 1912 (2001).
9. D. J. Hwang, T. Y. Choi, and C. P. Grigoropoulos, Appl. Phys. A 79, 605 (2004).
10. K. C. Vishnubhatla, N. Bellini, R. Ramponi, G. Cerullo, and R. Osellame, Opt. Express 17, 8685 (2009).
11. D. Chen, H. Miyoshi, T. Akai, and T. Yazawa, Appl. Phys. Lett. 86, 231908 (2005).
12. Y. Cheng, K. Sugioka, K. Midorikawa, M. Masuda, K. Toyoda, M. Kawachi, and K. Shihoyama, Opt. Lett. 28, 55 (2003).
13. F. He, Y. Cheng, Z. Z. Xu, Y. Liao, J. Xu, H. Y. Sun, C. Wang, Z. H. Zhou, K. Sugioka, K. Midorikawa, Y. H. Xu, and X. F. Chen, Opt. Lett. 35, 282 (2010).
14. S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 11560 (2009).