Applications of ultrafast lasers in microfabrication

Journal of Laser Micro Nanoengineering

Volumn 8, Issue 2, 2013, Pages 115-123

  Mielke, Michael M ^a   Booth, Timothy ^a   Greenberg, Michael ^a   Gaudiosi, David M ^a   Martinez, Carolyn ^a   Sapers, Steven P ^a   Cline, Robert ^a   Srinivas, Ramanujapuram A ^a  

^a Raydiance Inc   (United States)

Author keywords

Ad vanced manufacturing; Athermal machining; Femtosecond lasers; Materials processing; Precision microfabrication; Ultrafast lasers

Indexed keywords

AUTOMOTIVE COMPONENT; BIOSCIENCE APPLICATIONS; ELECTRONICS SECTORS; FEMTOSECOND LASER MICROFABRICATION; INFLECTION POINTS; MATERIALS PROCESSING; MULTIPLE MARKETS; PHOTOLITHOGRAPHY TECHNOLOGY;

BIOMEDICAL EQUIPMENT; CONSUMER ELECTRONICS; MANUFACTURE; MICROANALYSIS; MICROFABRICATION; PHOTOLITHOGRAPHY; ULTRASHORT PULSES;

ULTRAFAST LASERS;

EID: 84884676534     PISSN: None     EISSN: 18800688     Source Type: Journal    
DOI: 10.2961/jlmn.2013.02.0001     Document Type: Article

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