SCOPUS 정보 검색 플랫폼

Volumn 13, Issue 17, 2005, Pages 6635-6644

Integrating optics and micro-mechanics in a single substrate: A step toward monolithic integration in fused silica

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ETCHING; FUSED SILICA; LASER PULSES; OPTICAL SENSORS; SIGNAL PROCESSING;

DISPLACEMENT SENSORS; FEMTOSECOND LASER ILLUMINATION; MONOLITHIC OPTICAL MICROSYSTEMS; MONOLITHIC SUBSTRATES;

INTEGRATED OPTICS;

EID: 24144454786 PISSN: 10944087 EISSN: 10944087 Source Type: Journal
DOI: 10.1364/OPEX.13.006635 Document Type: Review

Times cited : (153)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.