Independent control of aspect ratios in the axial and lateral cross sections of a focal spot for three-dimensional femtosecond laser micromachining

New Journal of Physics

Volumn 13, Issue , 2011, Pages

  He, Fei ^a   Cheng, Ya ^a   Lin, Jintian ^a,b   Ni, Jielei ^a,b   Xu, Zhizhan ^a   Sugioka, Koji ^c   Midorikawa, Katsumi ^c  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c RIKEN   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

3-D SPACE; ANALYTICAL EXPRESSIONS; BEAM SHAPING TECHNIQUE; CROSS SECTION; CROSS-SECTIONAL SHAPE; FEMTOSECOND LASER MICROMACHINING; FOCAL SPOT; FOCUSED FEMTOSECOND LASERS; INDEPENDENT CONTROL; ISOTROPIC RESOLUTION; LATERAL DIRECTIONS; NUMERICAL APERTURE; OBJECTIVE LENS; TEMPORAL BEAM SHAPING; TEMPORAL FOCUSING; THREE-DIMENSIONAL (3D);

ASPECT RATIO; COMPOSITE MICROMECHANICS; FOCUSING; MICROMACHINING; THREE DIMENSIONAL;

ULTRASHORT PULSES;

EID: 80052000689     PISSN: 13672630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1367-2630/13/8/083014     Document Type: Article

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