Laser ablation and micromachining with ultrashort laser pulses

IEEE Journal of Quantum Electronics

Volumn 33, Issue 10, 1997, Pages 1706-1716

  Liu, X ^a   Du, D ^a,b   Mourou, G ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b Clark MXR Inc   (United States)

Author keywords

Ablation; Laser materials; Processing applications; Ultrafast optics

Indexed keywords

DIELECTRIC MATERIALS; INDUSTRIAL APPLICATIONS; LASER PULSES; MICROMACHINING; NONLINEAR OPTICS; ULTRAFAST PHENOMENA;

LASER INTENSITY; LASER MATERIALS; ULTRAFAST LASER SYSTEM; ULTRAFAST OPTICS;

LASER ABLATION;

EID: 0031258062     PISSN: 00189197     EISSN: None     Source Type: Journal    
DOI: 10.1109/3.631270     Document Type: Article

References (40)

1. Picosecond Phenomena I-III, and Ultrafast Phenomena IV-X, Springer Series in Chemical Physics, Springer-Verlag, Berlin.
2. D. Strickland and G. Mourou, "Compression of amplified chirped optical pulses," Opt. Commun., vol. 56, pp. 219-221, 1985.
3. N. Bloembergen, "Laser-induced electric breakdown in solids," IEEE J. Quantum Electron., vol. QE-10, pp. 375-386, 1974.
4. W. L. Smith, "Laser-induced breakdown in optical materials," Opt. Eng., vol. 17, pp. 489-503, 1978.
5. S. C. Jones, P. Braunlich, R. T. Casper, X.-A. Shen, and P. Kelly, "Recent progress on laser-induced modifications and intrinsic bulk damage of wide-gap optical materials," Opt. Eng., vol. 28, pp. 1039-1067, 1989.
6. 2 with pulse widths from 7 ns to 150 fs," Appl. Phys. Lett., vol. 64, pp. 3071-3073, 1994.
7. D. Du, X. Liu, J. Squier, and G. Mourou, "Laser induced breakdown as a function of pulse duration: From 7 ns to 150 fs," in SPIE Proc. Laser-Induced Damage in Optical Materials: 1994, 1995, vol. 2428, pp. 422-433.
8. B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses," Phys. Rev. Lett., vol. 74, pp. 2248-2251, 1995.
9. P. Pronko, S. Dutta, J. Squier, J. Rudd, D. Du, and G. Mourou, "Machining of sub-micron holes using a femtosecond laser at 800 nm," Opt. Commun., vol. 114, pp. 106-110, 1995.
10. J. R. Bettis, R. A. House, II, and A. H. Guenther, "Spot size and pulse duration dependence of laser-induced damage," in Laser Induced Damage in Optical Materials: 1976, NBS Spec. Pub., vol. 462, pp. 338-345, 1976.
11. P. Pronko, P. van Rompay, R. Singh, F. Qian, D. Du, and X. Liu, "Laser induced avalanche ionization and electron-lattice heating of silicon with intense near IR femtosecond pulses," in MRS Proc., 1996, vol. 397, pp. 45-51.
12. A. E. Siegman, Lasers. Mill Valley, CA: University Science, 1986.
13. D. E. Spence, P. N. Kean, and W. Sibbet, "60-fsec pulse generation from a self-mode-locked Ti:Sapphire laser," Opt. Lett., vol. 16, pp. 42-44, 1991.
14. E. P. Ippen, H. A. Haus, and L. Y. Liu, "Additive pulse modelocking," J. Opt. Soc. Amer. B, vol. 6, pp. 1736-1745, 1989.
15. U. Keller, D. A. B. Miller, G. D. Boyd, T. H. Chiu, J. F. Ferguson, and M. T. Asom, "Solid-state low-loss intracavity saturable absorber for Nd: YLF lasers: An antiresonant semiconductor Fabry-Perot saturable absorber," Opt. Lett., vol. 17, pp. 505-507, 1992.
16. D. Kopf, F. X. Kartner, U. Keller, and K. J. Weingarten, "Diode-pumped mode-locked Nd:glass lasers with an antiresonant Fabry-Perot saturable absorber," Opt. Lett., vol. 20, pp. 1169-1171, 1995.
17. 4 laser," Opt. Lett., vol. 21, pp. 1171-1173, 1996.
18. R. L. Fork, O. E. Martinez, and J. P. Gordon, "Negative dispersion using pairs of prisms," Opt. Lett., vol. 9, pp. 150-152, 1984.
19. O. E. Martinez, J. P. Gordon, and R. L. Fork, "Negative group-velocity dispersion using refraction," J. Opt. Soc. Amer. A, vol. 1, pp. 1003-1006, 1984.
20. Ch. Spielmann, M. Lenzner, F. Krausz, R. Szipocs, and K. Ferencz, "Chirped dielectric mirrors improve Ti:sapphire lasers," Laser Focus World, vol. 31, Dec. 1995.
21. Ch. Spielmann, A. Stingl, F. Krausz, and R. Szipocs, "Chirped multilayer mirrors for dispersion control of femtosecond pulses," in Proc. Conf. Lasers and Electro-Optics Europe - Tech. Dig. 1994, p. 30.
22. E. B. Treacy, "Optical pulse compression with diffraction gratings," IEEE J. Quantum Electron., vol. QE-5, pp. 454-458, 1969.
23. O. E. Martinez, "Design of high-power ultrashort pulse amplifiers by expansion and recompression," IEEE J. Quantum Electron., vol. QE-23, pp. 1385-1387, 1987.
24. C. V. Shank, R. L. Fork, R. Yen, R. H. Stolen, and W. J. Tomlinson, "Compression of femtosecond optical pulses," Appl. Phys. Lett., vol. 40, pp. 761-763, 1982.
25. W. J. Tomlinson, R. H. Stolen, and C. V. Shank, "Compression of optical pulses chirped by self-phase modulation in fibers," J. Opt. Soc. Amer. B, vol. 1, pp. 139-149, 1984.
26. J. E. Murray and W. H. Lowdermilk, "Nd:YAG regenerative amplifier," J. Appl. Phys., vol. 51, p. 2436, 1980.
27. T. Norris, T. Sizer, and I. N. Duling, "Kilohertz synchronous amplification of 85-femtosecond optical pulses," J. Opt. Soc. Amer. B, vol. 2, pp. 616-618, 1985.
28. 3 regenerative amplifier," Opt. Lett., vol. 18, pp. 2044-2046, 1993.
29. A. Braun, X. Liu, G. Mourou, D. Kopf, and U. Keller, "Diode-pumped Nd:glass kHz regenerative amplifier for subpicosecond microjoule level pulse," Conf. Proc. - Lasers and Electro-Optics Soc. Annu. Meet. 1996, 1996, p. 188.
30. C. Momma, B. N. Chichkov, S. Nolte, F. von Alvensleben, A. Tunnermann, H. Welling, and B. Wellegehausen, "Short-pulse laser ablation of solid targets," Opt. Commun., vol. 129, pp. 134-142, 1996.
31. B. N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, and A. Tuennermann, "Femtosecond, picosecond and nanosecond laser ablation of solids," Appl. Phys. A, vol. 63, pp. 109-115, 1996.
32. S. Nakamura, K. Midorikawa, H. Kumagai, M. Obara, and K. Toyoda, "Effect of pulse duration on ablation characterislics of tetrafluoroethylene-hexafluoropropylene copolymer film using Ti:sapphire laser," Jpn. J. Appl. Phys., vol. 35, pp. 101-106, 1996.
33. M. D. Feit, A. M. Rubenchik, and B. W. Shore, "Unique aspects of laser energy deposition in the fs pulse regime," in Proc. SPIE, 1996, vol. 2672, pp. 243-249.
34. G. Herbst, M. Steiner, G. Marowsky, and E. Matthias, "Ablation of Si and Ge using UV femtosecond laser pulses," MRS Symp. Proc., 1996, vol. 397, pp. 69-74.
35. W. Kautek and J. Krueger, "Femtosecond-pulse laser microstructuring of semiconducting materials," Mater. Sci. Forum, vols. 173-174, pp. 17-22, 1995.
36. S. Nakamura, T. Okamoto, H. Kumagai, K. Midorikawa, M. Obara, and K. Toyoda, "Ablation of polyfluorocarbon films with femtosecond Ti:sapphire laser pulses," in Conf. Proc. - Lasers and Electro-Optics Soc., 1994, vol. 8, pp. 385-386.
37. H. Kumagai, K. Midorikawa, K. Toyoda, S. Nakamura, T. Okamoto, and M. Obara, "Ablation of polymer films by a femtosecond high-peak-power Ti:sapphire laser at 798 nm," Appl. Phys. Lett., vol. 65, pp. 1850-1852, 1994.
38. X. Liu, D. Du, A.-C. Tien, and G. Mourou, "Laser micromachining with ultrashort pulses," Conf. Proc.-Lasers and Electro-Optics Soc. Annu. Meet. 1996, p. 376.
39. E. N. Glezer, M. Milosavljevic, L. Huang, R. L. Finlay, H.-H. Her, J. P. Callan, and E. Mazur, "3-D optical storage and engraving inside transparent materials," Ultrafast Phenomena X, pp. 157-158, 1996.
40. J. Machan, M. Valley, G. Holleman, M. Mitchell, D. Burchman, J. Zamel, G. Harpole, H. Injeyan, and L. Marabella, "Diode-pumped Nd:YAG laser for precision laser machining," J. Laser Appl., vol. 8, pp. 225-232, 1996.