A femtosecond laser-induced two-photon photopolymerization technique for structuring microlenses

Journal of Optics

Volumn 12, Issue 3, 2010, Pages

  Malinauskas, Mangirdas ^a   Gilbergs, Holger ^a   Ukauskas, Albertas ^a   Purlys, Vytautas ^a   Paipulas, Domas ^a   Gadonas, Roaldas ^a  

^a VILNIUS UNIVERSITY   (Lithuania)

Author keywords

3D nano structuring; Femtosecond laser microfabrication; Hybrid organicinorganic photopolymer; Microlenses; Polymerization; Two photon absorption

Indexed keywords

DIFFRACTION; FEMTOSECOND LASERS; LASER EXCITATION; LIGHT; ORGANIC-INORGANIC MATERIALS; PHOTONS; PHOTOPOLYMERIZATION; POLYMERIZATION; SOL-GELS; SURFACE ROUGHNESS; TWO PHOTON PROCESSES;

EXCITATION WAVELENGTH; FEMTOSECOND LASER MICROFABRICATION; HIGH NUMERICAL APERTURES; HYBRID ORGANIC-INORGANIC; NANO-STRUCTURING; THREE-DIMENSIONAL STRUCTURE; TWO PHOTON ABSORPTION; TWO-PHOTON PHOTOPOLYMERIZATION;

MICROLENSES;

EID: 77951842307     PISSN: 20408978     EISSN: 20408986     Source Type: Journal    
DOI: 10.1088/2040-8978/12/3/035204     Document Type: Article

References (37)

1. Wu M H and Whitesides G M 2002 Fabrication of two-dimensional arrays of microlenses and their applications in photolithography J. Micromech. Microeng. 12 747-58 (Pubitemid 35359536)
2. Möller S and Forrest S R 2002 Improved light out-coupling in organic light emitting diodes employing ordered microlens arrays J. Appl. Phys. 91 3324 (Pubitemid 34598820)
3. Akatay A and Urey H 2007 Design and optimization of microlens array based high resolution beam steering system Opt. Express 15 4523-9 (Pubitemid 46608999)
4. Abookasis D and Rosen J 2004 Microlens array help imaging hidden objects for medical applications ICECS: Proc. 11th IEEE Int. Conf. on Electronics, Circuits and Systems (Dec. 2004) pp431-4 (Pubitemid 41551167)
5. Völkel R, Eisner M and Weible K J 2003 Miniaturized imaging systems Microelectron. Eng. 67 461-72
6. Lee D S, Min S S and Lee M S 2003 Design and analysis of spatially variant microlens-array diffuser with uniform illumination for short-range infrared wireless communications using photometric approach Opt. Commun. 219 49-55
7. Thienpont H, Debaes C, Baukens V, Ottevaera H, Vynck P, Tuteleers P, Verschaffelt G, Volkaerts B, Hermanne A and Hanney M 2000 Plastic microoptical interconnection modules for parallel free-space inter-and intra-MCM data communication Proc. IEEE 2000 (June 2000) vol 88 pp769-79
8. Hsiung S K and Lee G B 2007 A controllable micro-lens structure for bioanalytical applications Proc. IEEE 20th Int. Conf. on MEMS (Jan. 2007) pp763-6
9. Ottevaere H, Cox R, Herzig H P, Miyashita T, Naessens K, Taghizadeh M, lkel R V, Woo H J and Thienpont H 2006 Comparing glass and plastic refractive microlenses fabricated with different technologies J. Opt. A: Pure Appl. Opt. 8 S407-29 (Pubitemid 43910500)
10. Woo H J, Kim Y S, Choi H W, Hong W, Lee S, Kufner M and Kufner S 2001 Optimisation of microlenses fabricated by deep proton irradiation and styrene diffusion Microelectron. Eng. 57 945-51 (Pubitemid 32798290)
11. Lee S K, Lee K C and Lee S S 2002 Microlens fabrication by the modified LIGA process Proc. 15th IEEE Int. Conf. on MEMS (Jan. 2002) pp520-3
12. 2 sol-gel glass by electron beam lithography Opt. Express 11 899-903
13. Jensen M F, Kruhne U, Christensen L H and Geschke O 2005 Refractive microlenses produced by excimer laser irradiation of poly(methyl methacrylate) J. Micromech. Microeng. 15 91-7
14. Fu Y Q, Kok N and Bryan A 2000 Microfabrication of microlens array by focused ion beam technology Microelectron. Eng. 54 211-21 (Pubitemid 32035504)
15. Ottevaere H, Volckaerts B, Lamprecht J, Schwider J, Hermanne A, Veretennicoff I and Thienpont H 2002 Two-dimensional plastic microlens arrays by deep lithography with protons: fabrication and characterization J. Opt. A: Pure Appl. Opt. 4 S22-8 (Pubitemid 34882507)
16. Klein S, Barsella A, Leblond H, Bulou H, Fort A, Andraud C, Lemercier G, Mulatier J C and Dorkenoo K 2005 One-step waveguide and optical circuit writing in photopolymerizable materials processed by two-photon absorption Appl. Phys. Lett. 86 211118 (Pubitemid 40861494)
17. Park S H, Yang D Y and Lee K S 2009 Two-photon stereolithography for realizing ultraprecise three-dimensional nano/microdevices Laser Photon. Rev. 3 1-11
18. Maruo S, Nakamura O and Kawata S 1997 Three-dimensional microfabrication with two-photon-absorbed photopolymerization Opt. Lett. 22 132-4 (Pubitemid 127593253)
19. Chichkov B N, Koch J, Ovsianikov A, Passinger S, Reinhardt C and Serbin J 2005 Direct-write micro-and nanostructuring with femtosecond lasers Proc. Mater. Res. Soc. Symp. 850 251-8 (Pubitemid 41146801)
20. Maruo S and Fourkas J 2008 Recent progress in multiphoton microfabrication Laser Photon Rev. 2 100-11
21. Juodkazis S, Mizeikis V, Seet K K, Miwa M and Misawa H 2005 Two-photon lithography of nanorods in SU-8 photoresist Nanotechnology 16 846-9 (Pubitemid 40666593)
22. Kato J, Takeyasu N, Adachi Y, Sun H B and Kawata S 2005 Multiple-spot parallel processing for laser micronanofabrication Appl. Phys. Lett. 86 044102 (Pubitemid 40232208)
23. Passinger S, Ovsianikov A, Kiyan R, Reinhardt C, Ostendorf A and Chichkov B 2007 Two-photon polymerization for industrial applications Proc. 8th Int. Symp. on Laser Precision Microfabrication (Vienna, April 2007)
24. Malinauskas M, Purlys V, Rutkauskas M and Gadonas R 2009 Two-photon polymerization for fabrication of three-dimensional micro-and nanostructures over a large area Proc. SPIE Conf. on Micromachining and Microfabrication Process Technology XIV (San Jose, CA, Jan. 2009) vol 7204 p72040C
25. Guo R, Xiao S, Zhai X, Li J, Xia A and Huang W 2006 Micro lens fabrication by means of femtosecond two photon photopolymerization Opt. Express 14 810-6 (Pubitemid 43133633)
26. Nishiyama H, Nishii J, Mizoshiri M and Hirata Y 2009 Microlens arrays of high-refractive-index glass fabricated byfemtosecond laser lithography Appl. Surf. Sci. 255 9750-3
27. Malinauskas M, Gilbergs H, Purlys V, Zukauskas A, Rutkauskas M and Gadonas R 2009 Femtosecond laser-induced two-photon photopolymerization for structuring of micro-optical and photonic devices Proc. SPIE Conf. on Photonic Materials, Devices, and Applications III (Dresden, May 2009) vol 7366 p736622
28. Baldacchini T, Zimmerley M, Potmab E O and Zadoyan R 2009 Chemical mapping of three-dimensional microstructures fabricated by two-photon polymerization using CARS microscopy Proc. SPIE Conf. on Laser Applications in Microelectronic and Optoelectronic Manufacturing VII (San Jose, CA, Jan. 2009) vol 7201 p72010Q
29. Malinauskas M, Purlys V, Rutkauskas M, Gaidukeviciute A and Gadonas R 2009 Femtosecond visible light induced two-photon photopolymerization for 3D nanostructuring of various polymeric materials Lithuanian J. Phys. submitted
30. 3D Meshes Research Database 2009 http://www-c.inria.fr/gamma/gamma.php
31. Liu Y, Nolte P L and Nolte D 2008 General 3D microporous structures fabricated with two-photon laser machining Proc. SPIE Conf. on Microfluidics, BioMEMS, and Medical Microsystems VI (San Jose, CA, Jan. 2008) vol 6886 p68860Y
32. NanoCube XYZ Piezo Stage datasheet 2009 http://www.physikinstrumente.com/
33. Ovsianikov A, et al. 2008 Two-photon polymerization of hybrid sol-gel materials for photonics applications Laser Chem. 493059
34. Ovsianikov A, et al. 2008 Ultra-low shrinkage hybrid photosensitive material for two-photon polymerization microfabrication ACS Nano 2 2257-62
35. Dong X Z, Zhao Z S and Duan X M 2008 Improving spatial resolution and reducing aspect ratio in multiphoton polymerization nanofabrication Appl. Phys. Lett. 92 091113
36. Park S H, Kim K H, Lim T W, Yang D Y and Lee K S 2008 Investigation of three-dimensional pattern collapse owing to surface tension using an imperfection finite element model Microelectron. Eng. 85 432-9
37. DeVoe R J, Kalweit H, Leatherdale C A and Williams C R 2003 Voxel shapes in two-photon microfabrication Proc. SPIE on Multiphoton Absorption and Nonlinear Transmission Processes: Materials, Theory, and Applications (Seattle, WA, July 2002) vol 4797 pp310-6