Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography

New Journal of Physics

Volumn 8, Issue , 2006, Pages

  Kondo, Toshiaki ^a   Juodkazis, Saulius ^a   Mizeikis, Vygantas ^a   Matsuo, Shigeki ^b   Misawa, Hiroaki ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

^b UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HOLOGRAPHY; LASER PULSES; LITHOGRAPHY; PHASE CONTROL; PHOTORESISTORS;

MICROMETRE RANGE; THREE-DIMENSIONAL (3D) PERIODIC DIELECTRIC STRUCTURES; TI: SAPPHIRE LASER;

MICROSTRUCTURE;

EID: 33750363761     PISSN: 13672630     EISSN: 13672630     Source Type: Journal    
DOI: 10.1088/1367-2630/8/10/250     Document Type: Article

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