Two-photon photopolymerization and 3D lithographic microfabrication

Advances in Polymer Science

Volumn 170, Issue , 2004, Pages 169-273

  Sun, Hong Bo ^a,b   Kawata, Satoshi ^a,c  

^a OSAKA UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

3D lithography; Femtosecond laser; Micro nanodevice; Micro nanofabrication; Two photon photopolymerization

Indexed keywords

RESIN;

DEVICE; DIFFRACTION; ISOMERIZATION; LASER; MATERIALS; NONLINEAR SYSTEM; PHOTON; POLYMERIZATION; QUANTUM YIELD; REVIEW; SEMICONDUCTOR; TECHNOLOGY; VISCOSITY;

EID: 1642288753     PISSN: 00653195     EISSN: None     Source Type: Book Series    
DOI: 10.1007/b94405     Document Type: Review

References (201)

1. Odian G (1991) Principles of polymerization, 3rd edn. Wiley, New York
2. Fouassier JP, Rabek JF (1990) Lasers in polymer science and technology. CRC Press, Boca Taton, FL
3. Reiser A (1989) Photoreactive polymers: The science and technology of resists. Wiley, New York
4. Fouassier JP, Rabek JF (1993) (eds) Radiation curing in polymer science and technology. Elsevier, London
5. Fouassier JP (1995) Photoinitiation, photopolymerization and photocuring: Fundamentals and applications. Hanser, Munich Vienna New York
6. Nakagawa T, Marutani Y (1996) (eds) Layered manufacturing systems: the latest development of three-dimensional copying technnologies (in Japanese). Kogyo Chosakai, Japan
7. Zhang X, Jiang XN, Sun C (1999) Sensor Actual 77:149
8. Jiang XN, Sun C, Zhang X, Xu B, Ye YH (2000) Sensor Actual 87:72
9. Bertsch A, Lorenz H, Renaud (1999) Sensor Actuat 73:14
10. Maruo S, Nakamura O, Kawata S (1997) Opt Lett 22:132
11. Parthenopoulos DA, Rentzepis PM (1989) Science 245:843
12. Denk W, Strickler JH, Webb WW (1990) Science 248:73
13. Kawata S, Sun HB, Tanaka T, Takada K (2001) Nature 412:697
14. Tanaka T, Sun HB, Kawata S (2002) Appl Phys Lett 80:312
15. Sun HB, Matsuo S, Misawa H (1999) Appl Phys Lett 74:786
16. Sun HB, Kawakami T, Xu Y, Ye JY, Matsuo S, Misawa H, Miwa M, Kaneko R (2000) Opt Lett 25:1110
17. Sun HB, Mizeikis V, Xu Y, Juodkazis S, Ye JY, Matsuo S, Misawa H (2001) Appl Phys Lett 79:1
18. Sun HB, Tanaka T, Takada K, Kawata S (2001) Appl Phys Lett 79:1411
19. Sun HB, Takada K, Kawata S (2001) Appl Phys Lett 79:3173
20. Sun HB, Tanaka T, Kawata S (2002) Appl Phys Lett 80:3673
21. Albota M, Beljonne D, Bredas JL, Ehrlich JE, Fu JY, Heikal AA, Hess SE, Kogej T, Levin MD, Marder SR, McCord-Maughon D, Perry JW, Rockel H, Rumi M, Subramaniam C, Webb WW, Wu XL, Xu C (1998) Science 281:1653
22. Cumpston BH, Ananthavel SP, Barlow S, Dyer DL, Ehrlich JE, Erskine LL, Heikal AA, Kuebler SM, Lee IYS, McCord-Maughon D, Qin JQ, Rockel H, Rumi M, Wu XL, Marder SR, Perry JW (1999) Nature 398:51
23. Zhou WH, Kuebler SM, Braun KL, Yu TY, Cammack JK, Ober CK, Perry JW, Marder SR (2002) Science 296:1106
24. Belfield KD, Schafer KJ, Liu YU, Liu J, Ren XB, Van Stryland EW (2000) J Phys Org Chem 13:837
25. Bhawalkar JD, He GS, Prasad PN (1996) Rep Prog Phys 59:1041
26. Lehmann O, Stuke M (1995) Science 270:1644
27. Wanke MC, Lehmann O, Muller K, Wen QZ, Stuke M (1997) Science 275:1284
28. Daneshvar K, Raissi M, Bobbio SM (2000) J Appl Phys 88:2205
29. Shiomi M, Yoshidome A, Abe F, Osakada K (1999) Int J Mach Tool Manu 39:237
30. Zhang YZ, Shi LK, Zhang PZ, Xu J (2000) Rare Metal Mat Eng 29:361
31. Sun HB, Xu Y, Juodkazis S, Sun K, Watanabe M, Matsuo S, Misawa H, Nishii J (2001) Opt Lett 26:325
32. Sun HB, Xu Y, Matsuo S, Misawa H (1999) Opt Rev 6:396
33. Menzel R (2001) Photonics: Linear and nonlinear interactions of laser light and matter, Springer, Berlin Heidelberg New York
34. Saleh BEA, Teich MC (1991) Fundamentals of photonics. Wiley, New York
35. Milonni PW, Eberly JH (1988) Lasers. Wiley, New York
36. Mei DB, Cheng BY, Hu W, Li ZL, Zhan DH (1995) Opt Lett 20:429
37. Campbell M, Sharp DN, Harrison MT, Denning RG, Turberfield AJ (2000) Nature 404:53
38. Shoji S, Kawata S (2000) Appl Phys Lett 76:2668
39. Kondo T, Matsuo S, Juodkazis S, Misawa H (2001) Appl Phys Lett 79:725
40. Allmen M, Blatter A (1995) Laser-beam interactions with materials. 2nd edn. Springer Berlin Heidelberg New York
41. Grigoryants AG (1994) Basics of laser material processing. CRC, New York
42. Shen YR (1984) The principles of nonlinear optics. Wiley, New York
43. Boyd RW (1992) Nonlinear optics. Academic, San Diego
44. Kieffer JC, Matte JP, Belair S, Chaker M, Audebert P, Pepin H, Maine P, Strickland D, Bado P, Mourou G (1989) IEEE J Quantum Elect 25:2640
45. Bado P (2000) Laser Focus World 36:73
46. Diels JC, Rudolph W (1996) Ultrashort laser pulse phenomena: fundamentals, techniques, and applications on a femtosecond time scale (Optics and Photonics). Academic, New York
47. Saeta P, Wang JK, Siegal Y, Bloembergen N, Mazur E (1991) Phys Rev Lett 67:1023
48. Glezer EN, Milosavljevic M, Huang L, Finlay RJ, Her TH, Callan JP, Mazur E (1996) Opt Lett 21:2023
49. Glezer EN, Mazur E (1997) Appl Phys Lett 71:882
50. Goeppert-Mayer M (1931) Ann Phys 9:273
51. Kaiser W, Garrett CGB (1961) Phys Rev Lett 7:229
52. Eberly JH, Lambropoulos P (1978) (eds) Multiphoton processes : proceedings of an international conference at the University of Rochester, Rochester, N.Y., June 6-9, 1977. Wiley, New York
53. Kano H, Kawata S (1996) Opt Lett 21:1848
54. Higdon PD, Torok P, Wilson T (1999) J Microsc-Oxford 193:127
55. Hell S, Stelzer EHK (1992) Opt Commun 93:277
56. Bhawalkar JD, He GS, Park CK, Zhao CF, Ruland G, Prasad PN (1996) Opt Commun 124:33
57. He GS, Xu GC, Prasad PN, Reinhardt BA, Bhatt JC, Dillard AG (1995) Opt Lett 20:435
58. Fisher WG, Partridge WP, Dees C, Wachter EA (1997) Photochem Photobiol 66:141
59. He GS, Bhawalkar JD, Zhao CF, Park CK, Prasad PN (1995) Opt Lett 20:2393
60. Smith NI, Fujita K, Nakamura O, Kawata S (2001) Appl Phys Lett 78:999
61. Schaffer CB, Nishimura N, Glezer EN, Kim AMT, Mazur E (2002) Opt Express 10:196
62. Strickler JH, Webb WW (1991) Opt Lett 16:1780
63. Kawata S, Kawata Y (2000) Chem Rev 100:1777
64. Liphardt M, Goonesekera A, Jones BE, Ducharme S, Takacs JM, Zhang L (1994) Science 263:367
65. Moerner WE (1987) (ed) Persistent spectral hole burning: Science and applications. Springer, Berlin Heidelberg New York
66. Kim MK, Kachru R (1989) Opt Lett 14:423
67. Irie M (2000) Chem Rev 100:1685
68. Toriumi A, Herrmann JM, Kawata S (1997) Opt Lett 22:555
69. Sekkat Z, Knoll WJ (1995) J Opt Soc Am B 12:1855
70. Toriumi A, Kawata S, Gu M (1998) Opt Lett 23:1924
71. Kawata Y, Ishitobi H, Kawata S (1998) Opt Lett 23:756
72. Meerholz K, Volodin BL, Sandalphon, Kippelen B, Peyghambarian, N (1994) Nature 371:497
73. Day D, Gu M, Smallridge A (2001) Adv Mater 13:1005
74. Day D, Gu M (1999) Opt Lett 24:288
75. Tanaka T, Yamaguchi K, Yamamoto S (2002) Opt Commun 212:45
76. Qiu JR, Kojima K, Miura K, Mitsuyu T, Hirao K (1999) Opt Lett 24:786
77. Miura K, Qiu JR, Fujiwara S, Sakaguchi S, Hirao K (2002) Appl Phys Lett 80:2263
78. Sun HB, Juodkazis S, Watanabe M, Matsuo S, Misawa H, Nishii J (2000) J Phys Chem B 104:3450
79. Yamasaki K, Juodkazis S, Watanabe M, Sun HB, Matsuo S, Misawa H (2000) Appl Phys Lett 76:1000
80. Watanabe M, Sun HB, Juodkazis S, Takahashi T, Matsuo S, Suzuki Y, Nishii J, Misawa H (1999) Jpn J Appl Phys 37: L1527
81. Watanabe M, Juodkazis S, Sun HB, Matsuo S, Misawa H, Miwa M, Kaneko R (1999) Appl Phys Lett 74:3957
82. Watanabe M, Juodkazis S, Sun HB, Matsuo S, Misawa H (2000) Appl Phys Lett 77:13
83. Watanabe M, Juodkazis S, Sun HB, Matsuo S, Misawa H (1999) Phys Rev B 60:9959
84. Miura K, Qiu JR, Inouye H, Mitsuyu T, Hirao K (1997) Appl Phys Lett 71:3329
85. Minoshima K, Kowalevicz AM, Hartl I, Ippen EP, Fujimoto JG (2001) Opt Lett 26:1516
86. Homoelle D, Wielandy S, Gaeta AL, Borrelli NF, Smith C (1999) Opt Lett 24:1311
87. Minoshima K, Kowalevicz AM, Ippen EP, Fujimoto JG (2002) Opt Express 10:645
88. Li Y, Watanabe W, Yamada K, Shinagawa T, Itoh K, Nishii J, Jiang YY (2002) Appl Phys Lett 80:1508
89. Kawamura K, Sarukura N, Hirano M, Hosono H (2001) Appl Phys Lett 78:1038
90. Kawamura K, Sarukura N, Hirano M, Ito N, Hosono H (2001) Appl Phys Lett 79:1228
91. Watanabe W, Kuroda D, Itoh K, Nishii J (2002) Opt Express 10:978
92. Yablonovitch E (1987) Phys Rev Lett 58:2059
93. John S (1987) Phys Rev Lett 58:2486
94. Joannopoulos JD, Meade RD, Winn JN (1995) Photonic crystals: Modeling the flow of light. Princeton Univ Press, Singapore
95. Ho KM, Chan CT, Soukoulis (1990) Phys Rev Lett 65:3152
96. Fukuda K, Sun H, Matsuo S, Misawa H (1998) Jpn J Appl Phys 37: L508
97. Sun HB, Song JF, Xu Y, Matsuo S, Misawa H, Du GT, Liu SY (2000) J Opt Soc Am B 17:476
98. Sun HB, Xu Y, Ye JY, Matsuo S, Misawa H, Song JF, Du GT, Liu SY (2000) Jpn J Appl Phys 39: L591
99. Wu PW, Cheng W, Martini IB, Dunn B, Schwartz BJ, Yablonovitch E (2000) Adv Mater 12:1438
100. Stellacci F, Bauer CA, Meyer-Friedrichsen T, Wenseleers W, Alain V, Kuebler SM, Pond SJK, Zhang YD, Marder SR, Perry JW (2002) Adv Mater 14:194
101. Horiyama M, Sun HB, Miwa M, Matsuo S, Misawa H (1999) Jpn J Appl Phys Lett 38: L212
102. Maruo S, Ikuta K (2000) Appl Phys Lett 76:2656
103. Maruo S, Ikuta K (2002) Sensor Actual A-Phys 100:70
104. Pappas SP (1985) Radiation Phys Chem 25:633
105. Pappas SP (1992) (ed) Radiation curing science and technology. Plenum, New York
106. Fouassier JP, Rabek JF (1993) (eds) Radiation curing in polymer science and technology. Elsevier, London
107. Scully MO, Zubairy MS (1997) Cambridge Univ Press
108. Hopfield JJ, Worlock JM, Park KJ (1963) Phys Rev Lett 11:414
109. Frohlich D, Staginnus B (1967) Phys Rev Lett 19:476
110. Pao YH and Rentzepis PM (1965) Appl Phys Lett 6:93
111. Chin SL, Bedard G (1971) Phys Lett 36A: 271
112. Papouskova Z, Pola J, Bastl Z, Tiaskal J (1990) J Mecromol Sci Chem A27:1015
113. Morita H, Sadakiyo T (1995) J Photochem Photobiol A 87:163
114. Lee KS, Lee JH, Choi HY, Cha M, Chung MA, Kim YJ, Jung SD (2001) Mol Cryst Liq Cryst 370:155
115. Chung MA, Lee KS, Jung SD (2002) ETRI J 24:221
116. Li CD, Luo L, Wang SF, Huang WT, Gong QH, Yang YY, Feng SJ (2001) Chem Phys Lett 340:444
117. Belfield KD, Schafer KJ, Mourad WJ (2000) J Org Chem 65:4475
118. Jortner J, Ratner M (1997) (eds) Molecular electronics. Blackwell Science, London
119. Belfield KD, Hagan DJ, Van Stryland EW, Schafer KJ, Negres RA (1999) Org Lett 1:1575
120. Belfield KD, Schafer KJ, Alexander MD Jr (2000) Chem Mater 12:1184
121. Adronov A, Frechet JMJ, He GS, Kim KS, Chung SJ, Swiatkiewicz J, Prasad PN (2000) Chem Mater 12:2838
122. Hu Y (2001) MRS Bull 26:595
123. Adronov A, Frechet JMJ, He GS, Kim KS, Chung SJ, Swiatkiewicz J, Prasad PN (2000) Chem Mater 12:2838
124. Rentzepis PM (1989) US Patent 07 342 978
125. Bradbury S, Bracegirdle B (1998) Introduction to light microscopes. Springer, Berlin Heildelberg New York
126. Born M, Wolf E (1999) Principle of Optics, 7th edn. Cambridge Univ Press, Cambridge
127. Witzgall G, Vrijen R, Yablonovitch E, Doan V, Schwartz BJ (1998) Opt Lett 23:1745
128. Madou MJ (2002) Fundamentals of microfabrication: The science of miniaturization, 2nd edn. CRC Press, New York
129. Lyshevski SE (2002) MEMS and NEMS: Systems, devices, and structures. CRC Press, New York
130. (Anon) (2002) Laser Focused World 38 11
131. Cartlidge E (2002) Phys World 15:10
132. Quake SR, Scherer A (2000) Science 290:1536
133. Xia YN, Whitesites GM (1998) Ann Rev Mater Sci 28:153
134. Kumar A, Whitesides GM (1993) Appl Phys Lett 63:2002
135. Chou SY, Krauss PR, Renstrom PJ (1995) Appl Phys Lett 67:3114
136. Kim E, Xia Y, Whitesides GM (1995) Nature 376:581
137. Terris BD, Mamin HJ, Best ME, Logan JA, Rugar D (1996) Appl Phys Lett 69:4262
138. Masuda H, Fukuda K (1995) Science 268:1446
139. Xia Y, Kim E, Zhao X-M, Rogers JA, Prentiss M, Whitesides GM (1996) Science 273:347
140. Wu ES, Strickler JH, Harrell WR, Webb WW (1990) SPIE Proc 1674:776
141. Maruo S, Kawata S (1998) J IEEE MEMS, 7:411
142. Wu PW, Dunn B, Yablonovitch E, Doan V, Schwartz BJ (1999) J Opt Soc Am B 16:605
143. Brodeur A, Chin SL (1999) J Opt Soc Am B 16:637
144. Stuart BC, Feit MD, Herman S, Rubenchik AM, Shore BW, Perry MD (1996) Phys Rev B 53:1749
145. vonderLinde D, Schuler H (1996) J Opt Soc Am B 13:216
146. Boiko Y, Costa JM, Wang M, Esener S (2001) Opt Express 8:571
147. Joshi MP, Pudavar HE, Swiatkiewicz J, Prasad PN, Reianhardt BA (1999) Appl Phys Lett 74:170
148. Kirkpatrick SM, Baur JW, Clark CM, Denny LR, Tomlin DW, Reinhardt BR, Kannan R, Stone MO (1999) Appl Phys A 69:461
149. Matsumoto K (1997) P IEEE 85:612
150. Sauer BB, McLean RS, Thomas RR (1998) Langmuir 14:3045
151. Tarun A, Daza MRH, Hayazawa N, Inouye Y, Kawata S (2002) Appl Phys Lett 80:3400
152. Flory PJ (1952) Principles of polymer chemistry. Cornell University Press, New York
153. Schulz GV (1997) Chem Ber 80:232
154. Bolon DA, Webb KK (1978) J Appl Polymer Sci 22:2543
155. Decker C, Faure J, Fizet M, Rychla L (1979) Photog Sci Eng 23:137
156. Hageman HJ (1985) Prog Organic Coatings 13:123
157. Booth MJ, Wilson T (2001) J Biomed Opt 6:266
158. Booth MJ, Wilson T (2001) J Microsc-Oxford 201:416
159. Booth MJ, Neil MAA, Juskaitis R, Wilson T (2002) P Natl Acad Sci USA 99:5788
160. Fujimoto M, Aoshima S, Hosoda M, Tsuchiya Y (1999) Opt Lett 24:850
161. DeVoe RJ, Kalveit H, Leatherdale CA, Williams TR (2002) Proc SPIE
162. Stamners J (1986) Waves in focal region. Adam Hilgar, Bristol
163. Gu M (1999) Advanced optical imaging Theory. Springer, Berlin Heidelberg New York
164. Bahlmann K, Hell SW (2000) Appl Phys Lett 77:612
165. T. Wilson (1990) (ed) Confocal microscopy. Academic, London
166. Berger V, GauthierLafaye O, Costard E (1997) J Appl Phys 82:60
167. Berger V, GauthierLafaye O, Costard E (1997) Electron Lett 33:425
168. Nakata Y, Okada T, Maeda M (2002) 81:4239
169. Sharp DN, Campbell M, Dedman ER, Harrison MT, Denning RG, Turberfield A (2002) J Opt Quant Electron 34:3
170. Yang S, Megens M, Aizenberg J, Wiltzius P, Chaikin PM, Russel WB (2002) Chem Mater 14:2831
171. Segawa H, Yoshida K, Kondo T, Matsuo S, Misawa H (2003) J Sol-Gel Sci Techn 26:1023
172. Campagnola PJ, Delguidice DM, Epling GA, Hoffacker KD, Howell AR, Pitts JD, Goodman SL (2000) Macromolecules 33:1511
173. Nakayama Y, Matsuda T (1999) J Biomed Mater Res 48:511
174. Okino H, Nakayama Y, Tanaka M, Matsuda T (2002) J Biomed Mater Res 59:233
175. Pitts JD, Campagnola PJ, Epling GA, Goodman SL (2000) Macromolecules 33:1514
176. Zhou WH, Kuebler SM, Carrig D, Perry JW, Marder SR (2002) J Am Chem Soc 124:1897
177. Zhou WH, Kuebler SM, Braun KL, Yu TY, Cammack JK, Ober CK, Perry JW, Marder SR (2002) Science 296:1106
178. Blanco A, Chomski E, Grabtchak S, Ibisate M, John S, Leonard SW, Lopez C, Meseguer F, Miguez H, Mondia JP, Ozin GA, Toader O, van Driel HM (2000) Nature 405:437
179. Gruning U, Lehmann V, Engelhardt CM (1995) Appl Phys Lett 66:3254
180. Xu Y, Sun HB, Ye JY, Matsuo S, Misawa H (2001) J Opt Soc Am B 18:1084
181. Noda S, Tomoda K, Yamamoto N, Chutinan A (2000) Science 289:604
182. Kawakami S (1997) Electron Lett 33:1260
183. Biswas R, Chan CT, Sigalas M, Soukoulis CM, Ho KM (1995) In: Soukoulis CM (ed) Photonic band gap materials. Kluwer Academic Press, London, p 23
184. Straub M, Gu M (2002) Opt Lett 27:1824
185. Noda S, Chutinan A, Imada M (2000) Nature 407:608
186. Noda S, Yokoyama M, Imada M, Chutinan A, Mochizuki M (2001) Science 293:1123
187. Salaneck WR, Seki K, Kahn A, Pireaux JJ (2001) (eds) Conjugated polymer and molecular interfaces: science and technology for photonic and optoelectronic applications. Marcel Dekker, New York
188. Taton TA, Norris DJ (2002) Nature 416:685
189. Lee WM, Pruzinsky SA, Braun PV (2002) Adv Mater 14:271
190. Ashkin A (1970) Phys Rev Lett 24:156
191. Ashkin A, Schutze K, Dziedzic JM, Eutenuer U, Schliwa M (1990) Nature 348:346
192. Ashkin A (1992) Biophys J 61:569
193. Higurashi E, Sawada R, Ito T (1998) Appl Phys Lett 71:2951
194. Gauthier RC (1995) Appl Phys Lett 67:2269
195. Galajda P, Ormos P (2001) Appl Phys Lett 78:249
196. Friese MEJ, Enger J, Rubinsztein-Dunlop H, Heckenberg NR (1996) Phys Rev A 54:1593
197. He H, Friese MEJ, Heckenberg NR, Rubinsztein-Dunlop H (1995) Phys Rev Lett 75:826
198. Sekkat Z, Knoll W (2002) (eds) Photorefractive organic thin films. Academic, New York
199. Kaneuchi Y, Kawai T, Hamaguchi M, Yoshino K, Irie M (1997) Jpn J Appl Lett, 36:3736
200. Masuda S, Sertowa N, Petkov I (1997) J Polymer Sci A 35:3683
201. Watanabe T, Akiyama M, Totani K, Kuebler SM, Stellacci F, Wenseleers W, Braun K, Marder SR, Perry JW (2002) Adv Funct Mater 12:611