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Volumn 10, Issue 1, 1998, Pages 18-28

A review of ultrashort pulsed laser ablation of materials

Author keywords

Ablation of materials (review); Laser materials processing; Ultrashort pulsed laser

Indexed keywords

DYE LASERS; EXCIMER LASERS; IONIZATION OF SOLIDS; MACHINING; MULTIPHOTON PROCESSES; PULSED LASER APPLICATIONS; RANDOM PROCESSES; SOLID STATE LASERS; ULTRAFAST PHENOMENA;

EID: 0031998927     PISSN: 1042346X     EISSN: None     Source Type: Journal    
DOI: 10.2351/1.521827     Document Type: Review
Times cited : (386)

References (29)
  • 1
    • 0025846111 scopus 로고
    • New opportunities with intense ultrashort pulse lasers
    • M. C. Richardson, "New opportunities with intense ultrashort pulse lasers," Proc. SPIE 1410, 15-25 (1991).
    • (1991) Proc. SPIE , vol.1410 , pp. 15-25
    • Richardson, M.C.1
  • 2
    • 0022236671 scopus 로고
    • Compression of amplified chirped optical pulses
    • D. Strikland and G. Mourou, "Compression of amplified chirped optical pulses," Opt. Commun. 56, 219-221 (1985).
    • (1985) Opt. Commun. , vol.56 , pp. 219-221
    • Strikland, D.1    Mourou, G.2
  • 3
    • 0030164924 scopus 로고    scopus 로고
    • Ten-femtosecond amplifier creates multiterawatt pulses
    • C. P. J. Barty, "Ten-femtosecond amplifier creates multiterawatt pulses," Laser Focus World 32, 93-106 (1996).
    • (1996) Laser Focus World , vol.32 , pp. 93-106
    • Barty, C.P.J.1
  • 4
    • 0024066034 scopus 로고
    • Subpicosecond, widely tunable distributed feedback dye laser
    • S. Szatmari and F. P. Schafer, "Subpicosecond, widely tunable distributed feedback dye laser," Appl. Phys. B: Photophys. Laser Chem. 46, 305-311 (1988).
    • (1988) Appl. Phys. B: Photophys. Laser Chem. , vol.46 , pp. 305-311
    • Szatmari, S.1    Schafer, F.P.2
  • 5
    • 33744691086 scopus 로고
    • Chirped-pulse amplification sustains 30-fs multiterawatt pulses
    • J. R. Hobbs, "Chirped-pulse amplification sustains 30-fs multiterawatt pulses," Laser Focus World 30, 29-30 (1994); 63, 109-115 (1996).
    • (1994) Laser Focus World , vol.30 , pp. 29-30
    • Hobbs, J.R.1
  • 6
    • 33744677534 scopus 로고    scopus 로고
    • J. R. Hobbs, "Chirped-pulse amplification sustains 30-fs multiterawatt pulses," Laser Focus World 30, 29-30 (1994); 63, 109-115 (1996).
    • (1996) Laser Focus World , vol.63 , pp. 109-115
  • 7
    • 84944379274 scopus 로고
    • Generation of high-peak-power 20-fs pulses from a regeneratively initiated, self-modelocked Ti:sapphire laser
    • B. E. Lemoff and C. P. J. Barty, "Generation of high-peak-power 20-fs pulses from a regeneratively initiated, self-modelocked Ti:sapphire laser," Opt. Lett. 17, 1367-1369 (1992).
    • (1992) Opt. Lett. , vol.17 , pp. 1367-1369
    • Lemoff, B.E.1    Barty, C.P.J.2
  • 9
    • 84867199577 scopus 로고
    • Sub-10-fs mirror-dispersion-controlled Ti:sapphire laser
    • A. Stingl, M. Lenzner, Ch. Spielmann, and F. Krausz, "Sub-10-fs mirror-dispersion-controlled Ti:sapphire laser," Opt. Lett. 20, 602-604 (1995).
    • (1995) Opt. Lett. , vol.20 , pp. 602-604
    • Stingl, A.1    Lenzner, M.2    Spielmann, Ch.3    Krausz, F.4
  • 10
    • 0029276030 scopus 로고
    • Laser-induced damage in dielectrics with nanosecond to subpicosecondpulses
    • B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, "Laser-induced damage in dielectrics with nanosecond to subpicosecondpulses," Phys. Rev. Lett. 74, 2248-2251 (1995).
    • (1995) Phys. Rev. Lett. , vol.74 , pp. 2248-2251
    • Stuart, B.C.1    Feit, M.D.2    Rubenchik, A.M.3    Shore, B.W.4    Perry, M.D.5
  • 11
    • 33745552291 scopus 로고
    • Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV excimer laser pulses
    • S. Kuper and M. Stuke, "Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV excimer laser pulses," Appl. Phys. Lett. 54, 4-6 (1988).
    • (1988) Appl. Phys. Lett. , vol.54 , pp. 4-6
    • Kuper, S.1    Stuke, M.2
  • 13
    • 0029219497 scopus 로고
    • Machining of sub-micron holes using a femtosecond laser at 800 nm
    • P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, "Machining of sub-micron holes using a femtosecond laser at 800 nm," Opt. Commun. 114, 106-110 (1995).
    • (1995) Opt. Commun. , vol.114 , pp. 106-110
    • Pronko, P.P.1    Dutta, S.K.2    Squier, J.3    Rudd, J.V.4    Du, D.5    Mourou, G.6
  • 16
    • 0030695596 scopus 로고    scopus 로고
    • Elimination of recast layer and microcracking in laser machining with femtosecond pulses
    • 1997 OSA Technical Digest Series Optical Society of America, Washington DC
    • X. Liu, X. Chen, W. T. Lotshaw, and A. C. Tien, "Elimination of recast layer and microcracking in laser machining with femtosecond pulses," Conference on Lasers and Electro-optics, 1997 OSA Technical Digest Series (Optical Society of America, Washington DC, 1997), Vol. 11, p. 162.
    • (1997) Conference on Lasers and Electro-optics , vol.11 , pp. 162
    • Liu, X.1    Chen, X.2    Lotshaw, W.T.3    Tien, A.C.4
  • 17
    • 0030215762 scopus 로고    scopus 로고
    • A study of thermal and mechanical effects on materials induced by pulsed laser drilling
    • A. Luft, U. Franz, A. Emsermann, and J. Kaspar, "A study of thermal and mechanical effects on materials induced by pulsed laser drilling," Appl. Phys. A: Solids Surf. 63, 93-101 (1996).
    • (1996) Appl. Phys. A: Solids Surf. , vol.63 , pp. 93-101
    • Luft, A.1    Franz, U.2    Emsermann, A.3    Kaspar, J.4
  • 20
    • 0029765376 scopus 로고    scopus 로고
    • Laser induced avalanche ionization and electron-lattice heating of silicon with intense near IR femtosecond pulses
    • P. P. Pronko, P. A. VanRompay, R. K. Singh, F. Qian, D. Du, and X. Liu, "Laser induced avalanche ionization and electron-lattice heating of silicon with intense near IR femtosecond pulses," Mater.-Res. Soc. Symp. Proc. 397, 45-51 (1996).
    • (1996) Mater.-Res. Soc. Symp. Proc. , vol.397 , pp. 45-51
    • Pronko, P.P.1    VanRompay, P.A.2    Singh, R.K.3    Qian, F.4    Du, D.5    Liu, X.6
  • 23
    • 0343703840 scopus 로고
    • Nanosecond and femtosecond excimer laser ablation of fused silica
    • J. Ihlemann, B. Wolff, and P. Simon, "Nanosecond and femtosecond excimer laser ablation of fused silica," Appl. Phys. A: Solids Surf. 54, 363-368 (1992).
    • (1992) Appl. Phys. A: Solids Surf. , vol.54 , pp. 363-368
    • Ihlemann, J.1    Wolff, B.2    Simon, P.3
  • 25
    • 0346706096 scopus 로고    scopus 로고
    • Laser-induced microstructuring of dielectrics using ultrashort laser pulses
    • 1997 OSA Technical Digest Series Optical Society of America, Washington DC
    • D. Ashkenasi, A. Rosenfeld, H. Varel, and E. E. B. Campbell, "Laser-induced microstructuring of dielectrics using ultrashort laser pulses," Conference on Lasers and Electro-optics, 1997 OSA Technical Digest Series (Optical Society of America, Washington DC, 1997), Vol. 11, p. 161.
    • (1997) Conference on Lasers and Electro-optics , vol.11 , pp. 161
    • Ashkenasi, D.1    Rosenfeld, A.2    Varel, H.3    Campbell, E.E.B.4
  • 26
    • 0001912017 scopus 로고
    • Laser-material interactions; fundamentals and applications
    • N. Bloembergen, "Laser-material interactions; fundamentals and applications," Proceedings of LAMP, pp. 3-8, 1992.
    • (1992) Proceedings of LAMP , pp. 3-8
    • Bloembergen, N.1
  • 27
    • 0000004889 scopus 로고
    • Recent progress on laser-induced modifications and intrinsic bulk damage of wide-gap optical materials
    • S. C. Jones, P. Braunlich, R. T. Casper, X. A. Shen, and P. Kelly, "Recent progress on laser-induced modifications and intrinsic bulk damage of wide-gap optical materials," Opt. Lett. 28, 1039-1068 (1989).
    • (1989) Opt. Lett. , vol.28 , pp. 1039-1068
    • Jones, S.C.1    Braunlich, P.2    Casper, R.T.3    Shen, X.A.4    Kelly, P.5
  • 28
    • 36449004926 scopus 로고
    • Thermophysical effects in laser processing of materials with picosecond and femtosecond pulses
    • P. P. Pronko, S. K. Dutta, and D. Du, "Thermophysical effects in laser processing of materials with picosecond and femtosecond pulses," J. Appl. Phys. 15, 6233-6240 (1995).
    • (1995) J. Appl. Phys. , vol.15 , pp. 6233-6240
    • Pronko, P.P.1    Dutta, S.K.2    Du, D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.