On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing

Optics Express

Volumn 20, Issue 9, 2012, Pages 10212-10217

  Lin, Jintian ^a,c   Yu, Shangjie ^b   Ma, Yaoguang ^b   Fang, Wei ^b   He, Fei ^a   Qiao, Lingling ^a   Tong, Limin ^b   Cheng, Ya ^a   Xu, Zhizhan ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b ZHEJIANG UNIVERSITY   (China)

^c Graduate School of Chinese Academic of Sciences   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE; THREE DIMENSIONAL; ULTRASHORT PULSES;

FEMTOSECONDS; HIGH-Q MICROCAVITY; HIGHER RESOLUTION; LASER ANNEALING; LASER DIRECT WRITING; LASER PATTERNING; MICRODISKS; MOTION STAGE; ON CHIPS; SPATIAL RESOLUTION; TILTING ANGLE; WET CHEMICALS; WHISPERING GALLERY;

MICROCAVITIES;

ARTICLE; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; LASER; SURFACE PLASMON RESONANCE;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LASERS; SURFACE PLASMON RESONANCE;

EID: 84861154529     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.010212     Document Type: Article

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