Femtosecond laser nanostructuring in porous glass with sub-50 nm feature sizes

Optics Letters

Volumn 38, Issue 2, 2013, Pages 187-189

  Liao, Yang ^a   Shen, Yinglong ^a   Qiao, Lingling ^a   Chen, Danping ^a   Cheng, Ya ^a   Sugioka, Koji ^b   Midorikawa, Katsumi ^b  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b RIKEN   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FEATURE SIZES; FEMTOSECONDS; LASER DIRECT WRITING; LASER NANO-STRUCTURING; LATERAL SIZES; PEAK INTENSITY; POROUS GLASS; SUB-50 NM;

LASERS;

ULTRASHORT PULSES;

EID: 84872504512     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.38.000187     Document Type: Article

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