Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining

Optics Express

Volumn 22, Issue 12, 2014, Pages 14792-14802

  Song, Jiangxin ^a,b   Lin, Jintian ^a,b   Tang, Jialei ^a,b   Liao, Yang ^a   He, Fei ^a   Wang, Zhaohui ^a,b   Qiao, Lingling ^a   Sugioka, Koji ^c   Cheng, Ya ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b Graduate School of Chinese Academic of Sciences   (China)

^c Institute of Physical and Chemical Research   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE LASERS; COMPOSITE MICROMECHANICS; FLUIDIC DEVICES; MICROFLUIDICS; MICROMACHINING; Q FACTOR MEASUREMENT; REFRACTIVE INDEX; RESONATORS;

CRITICAL COUPLING CONDITION; FEMTOSECOND LASER MICROMACHINING; MICRO FLUIDIC SYSTEM; MICROFLUIDIC CHANNEL; REFRACTIVE INDEX SENSING; REFRACTIVE INDEX UNITS; SENSING APPLICATIONS; THREE-DIMENSIONAL (3D) MICROMACHINING;

ULTRASHORT PULSES;

EID: 84902987779     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.22.014792     Document Type: Article

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