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Volumn 3, Issue , 2014, Pages

Ultrafast lasers-reliable tools for advanced materials processing

Author keywords

3D fabrication; industrial application; micromachining; nanofabrication; ultrafast laser

Indexed keywords

COMPOSITE MICROMECHANICS; INDUSTRIAL APPLICATIONS; LASER APPLICATIONS; MICROMACHINING; NANOTECHNOLOGY; ULTRAFAST LASERS; ULTRASHORT PULSES;

EID: 84901450123     PISSN: None     EISSN: 20477538     Source Type: Journal    
DOI: 10.1038/lsa.2014.30     Document Type: Review
Times cited : (1260)

References (139)
  • 1
    • 0001215880 scopus 로고
    • Ablation and etching of polymethylmethacrylate by very short (160 fs) ultraviolet (308 nm) laser pulses
    • Srinivasan R, Sutcliffe E, Braren B. Ablation and etching of polymethylmethacrylate by very short (160 fs) ultraviolet (308 nm) laser pulses. Appl Phys Lett 1987; 51: 1285-1287.
    • (1987) Appl Phys Lett , vol.51 , pp. 1285-1287
    • Srinivasan, R.1    Sutcliffe, E.2    Braren, B.3
  • 2
    • 0023600627 scopus 로고
    • Femtosecond UV excimer laser ablation
    • Kü per S, Stuke M. Femtosecond UV excimer laser ablation. Appl Phys B 1987; 44: 199-204.
    • (1987) Appl Phys B , vol.44 , pp. 199-204
    • Küper, S.1    Stuke, M.2
  • 3
    • 0027704481 scopus 로고
    • Chirped-pulse amplification of 55-fs pulses at a 1-kHz repetition rate in a Ti-Al2O3 regenerative amplifier
    • Rudd JV, Korn G, Kane S, Squier J, Mourou G et al. Chirped-pulse amplification of 55-fs pulses at a 1-kHz repetition rate in a Ti-Al2O3 regenerative amplifier. Opt Lett 1993; 18: 2044-2046.
    • (1993) Opt Lett , vol.18 , pp. 2044-2046
    • Rudd, J.V.1    Korn, G.2    Kane, S.3    Squier, J.4    Mourou, G.5
  • 6
    • 0037670796 scopus 로고    scopus 로고
    • Ablation and cutting of planar silicon devices using femtosecond laser pulses
    • Bä rsch N, Kö rber K, Ostendorf A, Tönshoff KH. Ablation and cutting of planar silicon devices using femtosecond laser pulses. Appl Phys A 2003; 77: 237-242.
    • (2003) Appl Phys A , vol.77 , pp. 237-242
    • Bärsch, N.1    Körber, K.2    Ostendorf, A.3    Tönshoff, K.H.4
  • 7
    • 0037175939 scopus 로고    scopus 로고
    • Fabrication of dot matrix, comb, and nanowire structures using laser ablation by interfered femtosecond laser beams
    • Nakata Y, Okada T, Maeda M. Fabrication of dot matrix, comb, and nanowire structures using laser ablation by interfered femtosecond laser beams. Appl Phys Lett 2002; 81: 4239-4241.
    • (2002) Appl Phys Lett , vol.81 , pp. 4239-4241
    • Nakata, Y.1    Okada, T.2    Maeda, M.3
  • 8
    • 33745552291 scopus 로고
    • Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV excimer laser pulses
    • Kü per S, Stuke M. Ablation of polytetrafluoroethylene (Teflon) with femtosecond UV excimer laser pulses. Appl Phys Lett 1989; 54: 4-6.
    • (1989) Appl Phys Lett , vol.54 , pp. 4-6
    • Küper, S.1    Stuke, M.2
  • 9
    • 0024665492 scopus 로고
    • Ablation of UV-transparent materials with femtosecond UV excimer laser pulses
    • Kü per S, Stuke M. Ablation of UV-transparent materials with femtosecond UV excimer laser pulses. Microelectron Eng 1989; 9: 475-480.
    • (1989) Microelectron Eng , vol.9 , pp. 475-480
    • Küper, S.1    Stuke, M.2
  • 10
    • 0030562966 scopus 로고    scopus 로고
    • Femtosecond-pulse visible laser processing of transparent materials
    • DOI 10.1016/0169-4332(95)00446-7
    • Krü ger J, Kautek W. Femtosecond-pulse visible laser processing of transparent materials. Appl Surf Sci 1996; 96-98: 430-438. (Pubitemid 126373570)
    • (1996) Applied Surface Science , vol.96-98 , pp. 430-438
    • Kruger, J.1    Kautek, W.2
  • 11
    • 0001597046 scopus 로고    scopus 로고
    • Writing waveguides in glass with a femtosecond laser
    • Davis KM, Miura K, Sugimoto N, Hirao K. Writing waveguides in glass with a femtosecond laser. Opt Lett 1996; 21: 1729-1731. (Pubitemid 126569133)
    • (1996) Optics Letters , vol.21 , Issue.21 , pp. 1729-1731
    • Davis, K.M.1    Miura, K.2    Sugimoto, N.3    Hirao, K.4
  • 14
    • 75249097815 scopus 로고    scopus 로고
    • UV waveguides light fabricated in fluoropolymer CYTOP by femtosecond laser direct writing
    • Hanada Y, Sugioka K, Midorikawa K. UV waveguides light fabricated in fluoropolymer CYTOP by femtosecond laser direct writing. Opt Express 2010; 18: 446-450.
    • (2010) Opt Express , vol.18 , pp. 446-450
    • Hanada, Y.1    Sugioka, K.2    Midorikawa, K.3
  • 15
    • 33748323072 scopus 로고    scopus 로고
    • Ultrafast processes for bulk modification of transparent materials
    • Itoh K, Watanabe W, Nolte S, Schaffer CB. Ultrafast processes for bulk modification of transparent materials. MRS Bull 2006; 31: 620-625. (Pubitemid 44324663)
    • (2006) MRS Bulletin , vol.31 , Issue.8 , pp. 620-625
    • Itoh, K.1    Watanabe, W.2    Nolte, S.3    Schaffer, C.B.4
  • 16
    • 84865242422 scopus 로고    scopus 로고
    • Femtosecond laser processing for optofluidic fabrication
    • Sugioka K, Cheng Y. Femtosecond laser processing for optofluidic fabrication. Lab Chip 2012; 12: 3576-3589.
    • (2012) Lab Chip , vol.12 , pp. 3576-3589
    • Sugioka, K.1    Cheng, Y.2
  • 17
    • 0035899361 scopus 로고    scopus 로고
    • Finer features for functional microdevices
    • DOI 10.1038/35089130
    • Kawata S, Sun HB, Tanaka T, Takada K. Finer features for functional microdevices. Nature 2001; 412: 697-698. (Pubitemid 32771982)
    • (2001) Nature , vol.412 , Issue.6848 , pp. 697-698
    • Kawata, S.1    Sun, H.-B.2    Tanaka, T.3    Takada, K.4
  • 18
    • 33847095935 scopus 로고    scopus 로고
    • Reduction in feature size of two-photon polymerization using SCR500
    • Tan DF, Li Y, Qi FJ, Yang H, Gong QH et al. Reduction in feature size of two-photon polymerization using SCR500. Appl Phys Lett 2007; 90: 071106.
    • (2007) Appl Phys Lett , vol.90 , pp. 071106
    • Tan, D.F.1    Li, Y.2    Qi, F.J.3    Yang, H.4    Gong, Q.H.5
  • 19
    • 0001059982 scopus 로고    scopus 로고
    • Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin
    • Sun HB, Matsuo S, Misawa H. Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin. Appl Phys Lett 1999; 74: 786-788. (Pubitemid 129615181)
    • (1999) Applied Physics Letters , vol.74 , Issue.6 , pp. 786-788
    • Sun, H.-B.1    Matsuo, S.2    Misawa, H.3
  • 20
    • 0037421393 scopus 로고    scopus 로고
    • Submicron manipulation tools driven by light in a liquid
    • Maruo S, Ikuta K, Korogi H. Submicron manipulation tools driven by light in a liquid. Appl Phys Lett 2003; 82: 133-135.
    • (2003) Appl Phys Lett , vol.82 , pp. 133-135
    • Maruo, S.1    Ikuta, K.2    Korogi, H.3
  • 21
    • 84875792420 scopus 로고    scopus 로고
    • Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing
    • Xu BB, Zhang YL, Xia H, Dong WF, Ding H et al. Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing. Lab Chip 2013; 13: 1677-1690.
    • (2013) Lab Chip , vol.13 , pp. 1677-1690
    • Xu, B.B.1    Zhang, Y.L.2    Xia, H.3    Dong, W.F.4    Ding, H.5
  • 22
    • 4243454487 scopus 로고    scopus 로고
    • Ripples revisited: Non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics
    • DOI 10.1016/S0169-4332(02)00450-6, PII S0169433202004506
    • Reif J, Costache F, Henyk M, Pandelov SV. Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics. Appl Surf Sci 2002; 197-198: 891-895. (Pubitemid 35344672)
    • (2002) Applied Surface Science , vol.197-198 , pp. 891-895
    • Reif, J.1    Costache, F.2    Henyk, M.3    Pandelov, S.V.4
  • 23
    • 0037451426 scopus 로고    scopus 로고
    • Femtosecond laser-induced periodic surface structure on diamond film
    • Wu QH, Ma YR, Fang RC, Liao Y, Yu QX et al. Femtosecond laser-induced periodic surface structure on diamond film. Appl Phys Lett 2003; 82: 1703-1705.
    • (2003) Appl Phys Lett , vol.82 , pp. 1703-1705
    • Wu, Q.H.1    Ma, Y.R.2    Fang, R.C.3    Liao, Y.4    Yu, Q.X.5
  • 24
    • 1542635131 scopus 로고    scopus 로고
    • Composition influence of non-oxidic ceramics on selfassembled nanostructures due to fs-laser irradiation
    • Rudolph P, Kautek W. Composition influence of non-oxidic ceramics on selfassembled nanostructures due to fs-laser irradiation. Thin Solid Films 2004; 453-454: 537-541.
    • (2004) Thin Solid Films , vol.453-454 , pp. 537-541
    • Rudolph, P.1    Kautek, W.2
  • 25
    • 33750914929 scopus 로고    scopus 로고
    • Ultrafast dynamics of periodic nanostructure formation on diamondlike carbon films irradiated with femtosecond laser pulses
    • Miyaji G, Miyazaki K. Ultrafast dynamics of periodic nanostructure formation on diamondlike carbon films irradiated with femtosecond laser pulses. Appl Phys Lett 2006; 89: 191902.
    • (2006) Appl Phys Lett , vol.89 , pp. 191902
    • Miyaji, G.1    Miyazaki, K.2
  • 26
    • 23144463140 scopus 로고    scopus 로고
    • Visible and near-infrared responsivity of femtosecond-laser microstructured silicon photodiodes
    • Carey JE, Crouch CH, Shen M, Mazur E. Visible and near-infrared responsivity of femtosecond-laser microstructured silicon photodiodes. Opt Lett 2005; 30: 1773-1775. (Pubitemid 41083726)
    • (2005) Optics Letters , vol.30 , Issue.14 , pp. 1773-1775
    • Carey, J.E.1    Crouch, C.H.2    Shen, M.3    Mazur, E.4
  • 27
    • 33745773501 scopus 로고    scopus 로고
    • Superhydrophobic surfaces prepared by microstructuring of silicon using a femtosecond laser
    • DOI 10.1021/la053374k
    • Baldacchini T, Carey JE, Zhou M, Mazur E. Superhydrophobic surfaces prepared by microstructuring of silicon using a femtosecond laser. Langmuir 2006; 22: 4917-4919. (Pubitemid 44017640)
    • (2006) Langmuir , vol.22 , Issue.11 , pp. 4917-4919
    • Baldacchini, T.1    Carey, J.E.2    Zhou, M.3    Mazur, E.4
  • 28
    • 33749827693 scopus 로고    scopus 로고
    • Fiber chirped pulse amplification system for micromachining
    • Arai A, Bovatsek J, Yoshino F, Liu Z, Cho GC et al. Fiber chirped pulse amplification system for micromachining. Proc SPIE 2006; 6343: 63430S.
    • (2006) Proc SPIE , vol.6343
    • Arai, A.1    Bovatsek, J.2    Yoshino, F.3    Liu, Z.4    Cho, G.C.5
  • 32
    • 0343887991 scopus 로고    scopus 로고
    • The role of electron-phonon coupling in femtosecond laser damage of metals
    • Wellershoff SS, Hohlfeld J, Güdde J, Matthias E. The role of electron-phonon coupling in femtosecond laser damage of metals. Appl Phys A 1999; 69: S99-S107.
    • (1999) Appl Phys A , vol.69
    • Wellershoff, S.S.1    Hohlfeld, J.2    Güdde, J.3    Matthias, E.4
  • 34
  • 37
    • 84876727778 scopus 로고    scopus 로고
    • Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration
    • Liao Y, Cheng Y, Liu CN, Song JX, He F et al. Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration. Lab Chip 2013; 13: 1626-1631.
    • (2013) Lab Chip , vol.13 , pp. 1626-1631
    • Liao, Y.1    Cheng, Y.2    Liu, C.N.3    Song, J.X.4    He, F.5
  • 38
    • 24344489459 scopus 로고    scopus 로고
    • Periodic nanovoid structures via femtosecond laser irradiation
    • DOI 10.1021/nl0510154
    • Kanehira S, Si J, Qiu J, Fujita K, Hirao K. Periodic nanovoid structures via femtosecond laser irradiation. Nano Lett 2005; 5: 1591-1595. (Pubitemid 41251693)
    • (2005) Nano Letters , vol.5 , Issue.8 , pp. 1591-1595
    • Kanehira, S.1    Si, J.2    Qiu, J.3    Fujita, K.4    Hirao, K.5
  • 39
    • 0942289993 scopus 로고    scopus 로고
    • Self-organized nanogratings in glass irradiated by ultrashort light pulses
    • Shimotsuma Y, Kazansky PG, Qiu JR, Hirao K. Self-organized nanogratings in glass irradiated by ultrashort light pulses. Phys Rev Lett 2003; 91: 247405.
    • (2003) Phys Rev Lett , vol.91 , pp. 247405
    • Shimotsuma, Y.1    Kazansky, P.G.2    Qiu, J.R.3    Hirao, K.4
  • 40
    • 58349105576 scopus 로고    scopus 로고
    • QianBet al.Micromodification of element distribution in glass using femtosecond laser irradiation
    • Liu Y, Shimizu M, Zhu B, Dai Y, QianBet al.Micromodification of element distribution in glass using femtosecond laser irradiation. Opt Lett 2009; 34: 136-138.
    • (2009) Opt Lett , vol.34 , pp. 136-138
    • Liu, Y.1    Shimizu, M.2    Zhu, B.3    Dai, Y.4
  • 41
    • 2942750109 scopus 로고    scopus 로고
    • Optical gratings embedded in photosensitive glass by photochemical reaction using a femtosecond laser
    • Cheng Y, Sugioka K, Masuda M, Shihoyama K, Toyoda K et al. Optical gratings embedded in photosensitive glass by photochemical reaction using a femtosecond laser. Opt Express 2003; 11: 1809-1816.
    • (2003) Opt Express , vol.11 , pp. 1809-1816
    • Cheng, Y.1    Sugioka, K.2    Masuda, M.3    Shihoyama, K.4    Toyoda, K.5
  • 42
    • 34247219649 scopus 로고    scopus 로고
    • Quill writing with ultrashort light pulses in transparent materials
    • Kazansky PG, Yang W, Bricchi E, Bovatsek J, Arai A et al. "Quill" writing with ultrashort light pulses in transparent materials. Appl Phys Lett 2007; 90: 151120.
    • (2007) Appl Phys Lett , vol.90 , pp. 151120
    • Kazansky, P.G.1    Yang, W.2    Bricchi, E.3    Bovatsek, J.4    Arai, A.5
  • 43
    • 41549088314 scopus 로고    scopus 로고
    • Femtosecond laser micromachining in transparent materials
    • Gattass RR, Mazur E. Femtosecond laser micromachining in transparent materials. Nature Photon 2008; 2: 219-225.
    • (2008) Nature Photon , vol.2 , pp. 219-225
    • Gattass, R.R.1    Mazur, E.2
  • 44
    • 79955010397 scopus 로고    scopus 로고
    • Femtosecond laser microstructuring: An enabling tool for optofluidic lab-on-chips
    • Osellame R, Hoekstra HJ, Cerullo G, Pollnau M. Femtosecond laser microstructuring: an enabling tool for optofluidic lab-on-chips. Laser Photonics Rev 2011; 5: 442-463.
    • (2011) Laser Photonics Rev , vol.5 , pp. 442-463
    • Osellame, R.1    Hoekstra, H.J.2    Cerullo, G.3    Pollnau, M.4
  • 47
    • 0019584252 scopus 로고
    • Periodic surface ripples in laser-treated aluminum and their use to determine absorbed power
    • DOI 10.1063/1.329296
    • Jain AK, Kulkarni VN, Sood DK, Uppal JS. Periodic surface ripples in laser-treated aluminum and their use to determine absorbed power. J Appl Phys 1981; 52: 4882-4884. (Pubitemid 12429996)
    • (1981) Journal of Applied Physics , vol.52 , Issue.7 , pp. 4882-4884
    • Jain Animesh, K.1    Kulkarni, V.N.2    Sood, D.K.3    Uppal, J.S.4
  • 48
    • 0020180536 scopus 로고
    • Periodic surface structures frozen into CO2 laser-melted quartz
    • Keilmann F, Bai YH. Periodic surface structures frozen into CO2 laser-melted quartz. Appl Phys A 1982; 29: 9-18.
    • (1982) Appl Phys A , vol.29 , pp. 9-18
    • Keilmann, F.1    Bai, Y.H.2
  • 49
    • 60349128232 scopus 로고    scopus 로고
    • Mechanism for self-formation of periodic grating structures on a metal surface by a femtosecond laser pulse
    • Sakabe S, Hashida M, Tokita S, Namba S, Okamuro K. Mechanism for self-formation of periodic grating structures on a metal surface by a femtosecond laser pulse. Phys Rev B 2009; 79: 033409.
    • (2009) Phys Rev B , vol.79 , pp. 033409
    • Sakabe, S.1    Hashida, M.2    Tokita, S.3    Namba, S.4    Okamuro, K.5
  • 50
    • 0038636244 scopus 로고    scopus 로고
    • Femtosecond laser ablation of metals: Precise measurement and analytical model for crater profiles
    • Hashida M, Fujita M, Tsukamoto M, Semerok AF, Gobert O et al. Femtosecond laser ablation of metals: precise measurement and analytical model for crater profiles. Proc SPIE 2003; 4830: 452-457.
    • (2003) Proc SPIE , vol.4830 , pp. 452-457
    • Hashida, M.1    Fujita, M.2    Tsukamoto, M.3    Semerok, A.F.4    Gobert, O.5
  • 51
    • 0037390572 scopus 로고    scopus 로고
    • Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC
    • Yasumaru N,Miyazaki K, Kiuchi J. Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC. Appl Phys A 2003; 76: 983-985.
    • (2003) Appl Phys A , vol.76 , pp. 983-985
    • Yasumaru, N.1    Miyazaki, K.2    Kiuchi, J.3
  • 52
    • 0038374098 scopus 로고    scopus 로고
    • Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses
    • Borowiec A, Hauge HK. Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses. Appl Phys Lett 2003; 82: 4462-4464.
    • (2003) Appl Phys Lett , vol.82 , pp. 4462-4464
    • Borowiec, A.1    Hauge, H.K.2
  • 53
    • 0037443243 scopus 로고    scopus 로고
    • Surface patterning on insulators upon femtosecond laser ablation
    • Costache F, HenykM, Reif J. Surface patterning on insulators upon femtosecond laser ablation. Appl Surf Sci 2003; 208-209: 486-491.
    • (2003) Appl Surf Sci , vol.208-209 , pp. 486-491
    • Costache, F.1    Henyk, M.2    Reif, J.3
  • 54
    • 79251474374 scopus 로고    scopus 로고
    • Large-area, uniform, highspatial-frequency ripples generated on silicon using a nanojoule-femtosecond laser at high repetition rate
    • Le Harzic R, Dö rr D, Sauer D, Neumeier M, Epple M et al. Large-area, uniform, highspatial-frequency ripples generated on silicon using a nanojoule-femtosecond laser at high repetition rate. Opt Lett 2011; 36: 229-231.
    • (2011) Opt Lett , vol.36 , pp. 229-231
    • Le Harzic, R.1    Dörr, D.2    Sauer, D.3    Neumeier, M.4    Epple, M.5
  • 55
    • 80052795100 scopus 로고    scopus 로고
    • The thresholds of surface nano-/micromorphology modifications with femtosecond laser pulse irradiations
    • Wang C, Huo H, Johnson M, Shen M, Mazur E. The thresholds of surface nano-/micromorphology modifications with femtosecond laser pulse irradiations. Nanotechnology 2010; 21: 075304.
    • (2010) Nanotechnology , vol.21 , pp. 075304
    • Wang, C.1    Huo, H.2    Johnson, M.3    Shen, M.4    Mazur, E.5
  • 57
    • 54749136215 scopus 로고    scopus 로고
    • Origin of periodicity in nanostructuring on thin film surfaces ablated with femtosecond laser pulses
    • Miyaji G, Miyazaki K. Origin of periodicity in nanostructuring on thin film surfaces ablated with femtosecond laser pulses. Opt Express 2008; 16: 16265-16271.
    • (2008) Opt Express , vol.16 , pp. 16265-16271
    • Miyaji, G.1    Miyazaki, K.2
  • 58
    • 0000050015 scopus 로고    scopus 로고
    • Microstructuring of silicon with femtosecond laser pulses
    • DOI 10.1063/1.122241, PII S0003695198012388
    • Her TH, Finlay RJ, Wu C, Deliwala S, Mazur E. Microstructuring of silicon with femtosecond laser pulses. Appl Phys Lett 1998; 73: 1673-1675. (Pubitemid 128671948)
    • (1998) Applied Physics Letters , vol.73 , Issue.12 , pp. 1673-1675
    • Her, T.-H.1    Finlay, R.J.2    Wu, C.3    Deliwala, S.4    Mazur, E.5
  • 59
    • 0037349742 scopus 로고    scopus 로고
    • Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecondlaser pulses
    • Younkin R, Carey JE, Mazur E, Levinson JA, Friend CM. Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecondlaser pulses. J Appl Phys 2003; 93: 2626-2629.
    • (2003) J Appl Phys , vol.93 , pp. 2626-2629
    • Younkin, R.1    Carey, J.E.2    Mazur, E.3    Levinson, J.A.4    Friend, C.M.5
  • 60
    • 79959305708 scopus 로고    scopus 로고
    • Analysis of sunlight loss for femtosecond laser microstructured silicon and its solar cell efficiency
    • Wang F, Chen C, He H, Liu S. Analysis of sunlight loss for femtosecond laser microstructured silicon and its solar cell efficiency. Appl Phys A 2011; 103: 977-982.
    • (2011) Appl Phys A , vol.103 , pp. 977-982
    • Wang, F.1    Chen, C.2    He, H.3    Liu, S.4
  • 61
    • 55749095390 scopus 로고    scopus 로고
    • Biomimetic artificial surfaces quantitatively reproduce the water repellency of a lotus leaf
    • Zorba V, Stratakis E, Barberoglou M, Spanakis E, Tzanetakis P et al. Biomimetic artificial surfaces quantitatively reproduce the water repellency of a lotus leaf. Adv Mater 2008; 20: 4049-4054.
    • (2008) Adv Mater , vol.20 , pp. 4049-4054
    • Zorba, V.1    Stratakis, E.2    Barberoglou, M.3    Spanakis, E.4    Tzanetakis, P.5
  • 62
    • 34249010862 scopus 로고    scopus 로고
    • Spontaneous formation of nanospiked microstructures in germanium by femtosecond laser irradiation
    • Nayak BK, Gupta MC, Kolasinski KW. Spontaneous formation of nanospiked microstructures in germanium by femtosecond laser irradiation. Nanotechnology 2007; 18: 195302.
    • (2007) Nanotechnology , vol.18 , pp. 195302
    • Nayak, B.K.1    Gupta, M.C.2    Kolasinski, K.W.3
  • 63
    • 78049335894 scopus 로고    scopus 로고
    • Enhancement of resolution and quality of nano-hole structure on GaN substrates using the second-harmonic beam of nearinfrared femtosecond laser
    • Nakashima S, Sugioka K, Midorikawa K. Enhancement of resolution and quality of nano-hole structure on GaN substrates using the second-harmonic beam of nearinfrared femtosecond laser. Appl Phys A 2010; 101: 475-481.
    • (2010) Appl Phys A , vol.101 , pp. 475-481
    • Nakashima, S.1    Sugioka, K.2    Midorikawa, K.3
  • 64
    • 79957975270 scopus 로고    scopus 로고
    • Fabrication of high-aspectratio nanohole arrays on GaN surface by using wet-chemical-assisted femtosecond laser ablation
    • Nakashima S, Sugioka K, Ito T, Takai H, Midorikawa K. Fabrication of high-aspectratio nanohole arrays on GaN surface by using wet-chemical-assisted femtosecond laser ablation. J Laser Micro/Nanoeng 2011; 6: 15-19.
    • (2011) J Laser Micro/Nanoeng , vol.6 , pp. 15-19
    • Nakashima, S.1    Sugioka, K.2    Ito, T.3    Takai, H.4    Midorikawa, K.5
  • 65
    • 0037463257 scopus 로고    scopus 로고
    • Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy
    • Chimmalgi A, Choi TY, Grigoropoulos CP, Komvopoulos K. Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy. Appl Phys Lett 2003; 82: 1146-1148.
    • (2003) Appl Phys Lett , vol.82 , pp. 1146-1148
    • Chimmalgi, A.1    Choi, T.Y.2    Grigoropoulos, C.P.3    Komvopoulos, K.4
  • 67
    • 34447317248 scopus 로고    scopus 로고
    • Nanohole processing on silicon substrate by femtosecond laser pulse with localized surface plasmon polariton
    • DOI 10.1016/j.apsusc.2007.02.108, PII S0169433207003881, Photon-Assisted Synthesis and Processing of Functional Materials
    • Atanasov PA, Takada H, Nedyalkov NN, Obara M. Nanohole processing on silicon substrate by femtosecond laser pulse with localized surface plasmon polariton. Appl Surf Sci 2007; 253: 8304-8308. (Pubitemid 47058757)
    • (2007) Applied Surface Science , vol.253 , Issue.19 , pp. 8304-8308
    • Atanasov, P.A.1    Takada, H.2    Nedyalkov, N.N.3    Obara, M.4
  • 68
    • 34548253955 scopus 로고    scopus 로고
    • Plasmonic laser nanoablation of silicon by the scattering of femtosecond pulses near gold nanospheres
    • DOI 10.1007/s00339-007-4166-7, Plasmonics
    • Eversole D, Luk'yanchuk B, Ben-Yakar A. Plasmonic laser nanoablation of silicon by the scattering of femtosecond pulses near gold nanospheres. Appl Phys A 2007; 89: 283-291. (Pubitemid 47319462)
    • (2007) Applied Physics A: Materials Science and Processing , vol.89 , Issue.2 , pp. 283-291
    • Eversole, D.1    Luk'Yanchuk, B.2    Ben-Yakar, A.3
  • 69
    • 0030736545 scopus 로고    scopus 로고
    • Three-dimensional microfabrication with twophoton-absorbed photopolymerization
    • Maruo S, Nakamura O, Kawata S. Three-dimensional microfabrication with twophoton-absorbed photopolymerization. Opt Lett 1997; 22: 132-134.
    • (1997) Opt Lett , vol.22 , pp. 132-134
    • Maruo, S.1    Nakamura, O.2    Kawata, S.3
  • 71
    • 42949161610 scopus 로고    scopus 로고
    • Recent progress in multiphoton microfabrication
    • Maruo S, Fourkas JT. Recent progress in multiphoton microfabrication. Laser Photonics Rev 2008; 2: 100-111.
    • (2008) Laser Photonics Rev , vol.2 , pp. 100-111
    • Maruo, S.1    Fourkas, J.T.2
  • 72
    • 79956014261 scopus 로고    scopus 로고
    • Three-dimensional focal spots related to two-photon excitation
    • Sun HB, Tanaka T, Kawata S. Three-dimensional focal spots related to two-photon excitation. Appl Phys Lett 2002; 80: 3673-3675.
    • (2002) Appl Phys Lett , vol.80 , pp. 3673-3675
    • Sun, H.B.1    Tanaka, T.2    Kawata, S.3
  • 73
    • 0037217029 scopus 로고    scopus 로고
    • Control of the crosssectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser
    • Cheng Y, Sugioka K, Midorikawa K, Masuda M, Toyoda K et al. Control of the crosssectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser. Opt Lett 2003; 28: 55-57.
    • (2003) Opt Lett , vol.28 , pp. 55-57
    • Cheng, Y.1    Sugioka, K.2    Midorikawa, K.3    Masuda, M.4    Toyoda, K.5
  • 74
    • 0028460042 scopus 로고
    • Breaking the diffraction resolution limit by stimulated emission: Stimulated-emission-depletion fluorescence microscopy
    • Hell SW, Wichmann J. Breaking the diffraction resolution limit by stimulated emission: stimulated-emission-depletion fluorescence microscopy. Opt Lett 1994; 19: 780-782.
    • (1994) Opt Lett , vol.19 , pp. 780-782
    • Hell, S.W.1    Wichmann, J.2
  • 75
    • 66149129610 scopus 로고    scopus 로고
    • Achieving l/20 resolution by one-color initiation and deactivation of polymerization
    • Li L, Gattass RR, Gershgoren E, Hwang H, Fourkas JT. Achieving l/20 resolution by one-color initiation and deactivation of polymerization. Science 2009; 324: 910-913.
    • (2009) Science , vol.324 , pp. 910-913
    • Li, L.1    Gattass, R.R.2    Gershgoren, E.3    Hwang, H.4    Fourkas, J.T.5
  • 76
    • 58149140222 scopus 로고    scopus 로고
    • High efficiency multilevel phase-type fractal zone plates
    • Wu D, Niu LG, Chen QD, Wang R, Sun HB. High efficiency multilevel phase-type fractal zone plates. Opt Lett 2008; 33: 2913-2915.
    • (2008) Opt Lett , vol.33 , pp. 2913-2915
    • Wu, D.1    Niu, L.G.2    Chen, Q.D.3    Wang, R.4    Sun, H.B.5
  • 77
    • 55849089942 scopus 로고    scopus 로고
    • Dammann gratings as integratable micro-optical elements created by laser micronanofabrication via two-photon photopolymerization
    • Chen QD, Lin XF, Niu LG, Wu D, Wang WQ et al. Dammann gratings as integratable micro-optical elements created by laser micronanofabrication via two-photon photopolymerization. Opt Lett 2008; 33: 2559-2561.
    • (2008) Opt Lett , vol.33 , pp. 2559-2561
    • Chen, Q.D.1    Lin, X.F.2    Niu, L.G.3    Wu, D.4    Wang, W.Q.5
  • 78
    • 16244397426 scopus 로고    scopus 로고
    • Three-dimensional spiral-architecture photonic crystals obtained by direct laser writing
    • DOI 10.1002/adma.200401527
    • Seet KK, Mizeikis V, Matsuo S, Juodkazis S, Misawa H. Three-dimensional spiralarchitecture photonic crystals obtained by direct laser writing. Adv Mater 2005; 17: 541-545. (Pubitemid 40448700)
    • (2005) Advanced Materials , vol.17 , Issue.5 , pp. 541-545
    • Seet, K.K.1    Mizeikis, V.2    Matsuo, S.3    Juodkazis, S.4    Misawa, H.5
  • 79
    • 3042839181 scopus 로고    scopus 로고
    • Direct laserwriting of three-dimensional photonic-crystal templates for telecommunications
    • Deubel M, von Freymann G, Wegener M, Pereira S, BuschK et al. Direct laserwriting of three-dimensional photonic-crystal templates for telecommunications. Nat Mater 2004; 3: 444-447.
    • (2004) Nat Mater , vol.3 , pp. 444-447
    • Deubel, M.1    Von Freymann, G.2    Wegener, M.3    Pereira, S.4    Busch, K.5
  • 80
    • 45849111830 scopus 로고    scopus 로고
    • Photonic metamaterials by direct laser writing and silver chemical vapour deposition
    • Michael SR, Christine P, Michael T, Isabelle S, von Freymann G et al. Photonic metamaterials by direct laser writing and silver chemical vapour deposition. Nat Mater 2008; 7: 543-546.
    • (2008) Nat Mater , vol.7 , pp. 543-546
    • Michael, S.R.1    Christine, P.2    Michael, T.3    Isabelle, S.4    Von Freymann, G.5
  • 81
    • 70349337890 scopus 로고    scopus 로고
    • Gold helix photonic metamaterial as broadband circular polarizer
    • Gansel JK, Thiel M, Rill MS, Decker M, Bade K et al. Gold helix photonic metamaterial as broadband circular polarizer. Science 2009; 325: 1513-1515.
    • (2009) Science , vol.325 , pp. 1513-1515
    • Gansel, J.K.1    Thiel, M.2    Rill, M.S.3    Decker, M.4    Bade, K.5
  • 82
    • 84877684375 scopus 로고    scopus 로고
    • Development of optically-driven metallic microrotors using two-photon microfabrication
    • Ikegami T, Ozawa R, Stocker MP, Monaco K, Fourkas JT et al. Development of optically-driven metallic microrotors using two-photon microfabrication. J Laser Micro/Nanoeng 2013; 8: 6-10.
    • (2013) J Laser Micro/Nanoeng , vol.8 , pp. 6-10
    • Ikegami, T.1    Ozawa, R.2    Stocker, M.P.3    Monaco, K.4    Fourkas, J.T.5
  • 83
    • 68149156441 scopus 로고    scopus 로고
    • Femtosecond laser rapid prototyping of nanoshells and suspending components towards microfluidic devices
    • WuD, Chen QD, Niu LG, Wang JN, Wang J et al. Femtosecond laser rapid prototyping of nanoshells and suspending components towards microfluidic devices. Lab Chip 2009; 9: 2391-2394.
    • (2009) Lab Chip , vol.9 , pp. 2391-2394
    • Wud Chen, Q.D.1    Niu, L.G.2    Wang, J.N.3    Wang, J.4
  • 84
    • 84857350527 scopus 로고    scopus 로고
    • Integrated three-dimensional filter separates nanoscale frommicroscale elements in a microfluidic chip
    • Amato L, Gu Y, BelliniN, Eaton SM, CerulloG et al. Integrated three-dimensional filter separates nanoscale frommicroscale elements in a microfluidic chip. Lab Chip 2012; 12: 1135-1142.
    • (2012) Lab Chip , vol.12 , pp. 1135-1142
    • Amato, L.1    Gu, Y.2    Bellini, N.3    Eaton, S.M.4    Cerullo, G.5
  • 85
    • 84874851973 scopus 로고    scopus 로고
    • Recent developments in superhydrophobic surfaces with unique structural and functional properties
    • Zhang YL, Xia H, Kim E, Sun HB. Recent developments in superhydrophobic surfaces with unique structural and functional properties. Soft Matter 2012; 8: 11217-11231.
    • (2012) Soft Matter , vol.8 , pp. 11217-11231
    • Zhang, Y.L.1    Xia, H.2    Kim, E.3    Sun, H.B.4
  • 87
    • 84896773242 scopus 로고    scopus 로고
    • Optical waveguides in crystalline dielectric materials produced by femtosecond-laser micromachining
    • e-pub ahead of print 17 May 2013 doi:10.1002/lpor.201300025
    • Chen F, Vá zquez de Aldana JR. Optical waveguides in crystalline dielectric materials produced by femtosecond-laser micromachining. Laser Photonics Rev; e-pub ahead of print 17 May 2013; doi:10.1002/lpor.201300025.
    • Laser Photonics Rev
    • Chen, F.1    De Aldana Jr., V.2
  • 88
    • 53349178743 scopus 로고    scopus 로고
    • Investigation of ultrafast laser-photonic material interactions: Challenges for directly written glass photonics
    • Ams M, Marshall GD, Dekker P, Dubov M, Mezentsev VK et al. Investigation of ultrafast laser-photonic material interactions: challenges for directly written glass photonics. IEEE J Sel Top Quant 2008; 14: 1370-1381.
    • (2008) IEEE J Sel Top Quant , vol.14 , pp. 1370-1381
    • Ams, M.1    Marshall, G.D.2    Dekker, P.3    Dubov, M.4    Mezentsev, V.K.5
  • 89
    • 0346392435 scopus 로고    scopus 로고
    • Wavelength division with threedimensional couplers fabricated by filamentation of femtosecond laser pulses
    • Watanabe W, Asano T, Yamada K, Itoh K, Nishii J. Wavelength division with threedimensional couplers fabricated by filamentation of femtosecond laser pulses. Opt Lett 2003; 28: 2491-2493.
    • (2003) Opt Lett , vol.28 , pp. 2491-2493
    • Watanabe, W.1    Asano, T.2    Yamada, K.3    Itoh, K.4    Nishii, J.5
  • 90
    • 4944256902 scopus 로고    scopus 로고
    • Direct writing of fibre Bragg gratings by femtosecond laser
    • Martinez A, Dubov M, Khrushchev I, Bennion I. Direct writing of fibre Bragg gratings by femtosecond laser. Electron Lett 2004; 40: 1170-1172.
    • (2004) Electron Lett , vol.40 , pp. 1170-1172
    • Martinez, A.1    Dubov, M.2    Khrushchev, I.3    Bennion, I.4
  • 91
    • 55349119867 scopus 로고    scopus 로고
    • Electro-optic integration of embedded electrodes and waveguides in LiNbO3 using a femtosecond laser
    • Liao Y, Xu J, Cheng Y, Zhou ZH, He F et al. Electro-optic integration of embedded electrodes and waveguides in LiNbO3 using a femtosecond laser. Opt Lett 2008; 33: 2281-2283.
    • (2008) Opt Lett , vol.33 , pp. 2281-2283
    • Liao, Y.1    Xu, J.2    Cheng, Y.3    Zh, Z.4    He, F.5
  • 92
    • 59249092919 scopus 로고    scopus 로고
    • Monolithic 100mW Yb waveguide laser fabricated using the femtosecond-laser direct-write technique
    • Ams M, Dekker P, Marshall GD, Withford MJ. Monolithic 100mW Yb waveguide laser fabricated using the femtosecond-laser direct-write technique. Opt Lett 2009; 34: 247-249.
    • (2009) Opt Lett , vol.34 , pp. 247-249
    • Ams, M.1    Dekker, P.2    Marshall, G.D.3    Withford, M.J.4
  • 93
    • 25144467091 scopus 로고    scopus 로고
    • Depressed cladding, buried waveguide laser formed in a YAG : Nd 3+ crystal by femtosecond laser writing
    • DOI 10.1364/OL.30.002248
    • Okhrimchuk AG, Shestakov AV, Khrushchev I, Mitchell J. Depressed cladding, buried waveguide laser formed in a YAG:Nd31 crystal by femtosecond laser writing. Opt Lett 2005; 30: 2248-2250. (Pubitemid 41345861)
    • (2005) Optics Letters , vol.30 , Issue.17 , pp. 2248-2250
    • Okhrimchuk, A.G.1    Shestakov, A.V.2    Khrushchev, I.3    Mitchell, J.4
  • 94
    • 41049099506 scopus 로고    scopus 로고
    • Highly efficient laser action in femtosecond-written Nd:yttrium aluminum garnet ceramic waveguides
    • Torchia GA, Rodenas A, Benayas A, Cantelar E, Roso L et al. Highly efficient laser action in femtosecond-written Nd:yttrium aluminum garnet ceramic waveguides. Appl Phys Lett 2008; 92: 111103.
    • (2008) Appl Phys Lett , vol.92 , pp. 111103
    • Torchia, G.A.1    Rodenas, A.2    Benayas, A.3    Cantelar, E.4    Roso, L.5
  • 95
  • 96
    • 0042309804 scopus 로고    scopus 로고
    • Femtosecond writing of active optical waveguides with astigmatically shaped beams
    • Osellame R, Taccheo S, Marangoni M, Ramponi R, Laporta P et al. Femtosecond writing of active optical waveguides with astigmatically shaped beams. J Opt Soc Am B 2003; 20: 1559-1567.
    • (2003) J Opt Soc Am B , vol.20 , pp. 1559-1567
    • Osellame, R.1    Taccheo, S.2    Marangoni, M.3    Ramponi, R.4    Laporta, P.5
  • 97
    • 33644540529 scopus 로고    scopus 로고
    • Femtosecond laser microprocessing with three-dimensionally isotropic spatial resolution using crossedbeam irradiation
    • Sugioka K, Cheng Y, Midorikawa K, Takase F, Takai H. Femtosecond laser microprocessing with three-dimensionally isotropic spatial resolution using crossedbeam irradiation. Opt Lett 2006; 31: 208-210.
    • (2006) Opt Lett , vol.31 , pp. 208-210
    • Sugioka, K.1    Cheng, Y.2    Midorikawa, K.3    Takase, F.4    Takai, H.5
  • 98
    • 80052000689 scopus 로고    scopus 로고
    • Independent control of aspect ratios in the axial and lateral cross sections of a focal spot for three-dimensional femtosecond laser micromachining
    • He F, Cheng Y, Lin JT, Ni JL, Xu ZZ et al. Independent control of aspect ratios in the axial and lateral cross sections of a focal spot for three-dimensional femtosecond laser micromachining. New J Phys 2011; 13: 083014.
    • (2011) New J Phys , vol.13 , pp. 083014
    • He, F.1    Cheng, Y.2    Lin, J.T.3    Ni, J.L.4    Xu, Z.Z.5
  • 99
    • 59749104239 scopus 로고    scopus 로고
    • Ultrafast laser inscription: An enabling technology for astrophotonics
    • Thomson RR, Kar AK, Allington-Smith J. Ultrafast laser inscription: an enabling technology for astrophotonics. Opt Express 2009; 17: 1963-1969.
    • (2009) Opt Express , vol.17 , pp. 1963-1969
    • Thomson, R.R.1    Kar, A.K.2    Allington-Smith, J.3
  • 101
    • 84879611115 scopus 로고    scopus 로고
    • Integrated multimode interferometers with arbitrary designs for photonic boson sampling
    • Crespi A, Osellame R, Ramponi R, Brod DJ, Galvão EF et al. Integrated multimode interferometers with arbitrary designs for photonic boson sampling. Nat Photonics 2013; 7: 545-549.
    • (2013) Nat Photonics , vol.7 , pp. 545-549
    • Crespi, A.1    Osellame, R.2    Ramponi, R.3    Brod, D.J.4    Galvão, E.F.5
  • 103
    • 0037357191 scopus 로고    scopus 로고
    • 3-D microstructuring inside photosensitive glass by femtosecond laser excitation
    • Masuda M, Sugioka K, Cheng Y, Aoki N, KawachiMet al. 3-D microstructuring inside photosensitive glass by femtosecond laser excitation. Appl Phys A 2003; 76: 857-860.
    • (2003) Appl Phys A , vol.76 , pp. 857-860
    • Masuda, M.1    Sugioka, K.2    Cheng, Y.3    Aoki, N.4    Kawachi, M.5
  • 104
    • 0002367898 scopus 로고    scopus 로고
    • Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses
    • Li Y, ItohK, Watanabe W, Yamada K, Kuroda Det al. Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses. Opt Lett 2001; 26: 1912-1914. (Pubitemid 33693142)
    • (2001) Optics Letters , vol.26 , Issue.23 , pp. 1912-1914
    • Li, Y.1    Itoh, K.2    Watanabe, W.3    Yamada, K.4    Kuroda, D.5    Nishii, J.6    Jiang, Y.7
  • 105
    • 78149232274 scopus 로고    scopus 로고
    • Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing
    • Liao Y, Ju YF, Zhang L, He F, Zhang Q et al. Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing. Opt Lett 2010; 35: 3225-3227.
    • (2010) Opt Lett , vol.35 , pp. 3225-3227
    • Liao, Y.1    Ju, Y.F.2    Zhang, L.3    He, F.4    Zhang, Q.5
  • 106
    • 84862907524 scopus 로고    scopus 로고
    • Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing
    • Liao Y, Song J, Li E, Luo Y, Shen YL et al. Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing. Lab Chip 2012; 12: 746-749.
    • (2012) Lab Chip , vol.12 , pp. 746-749
    • Liao, Y.1    Song, J.2    Li, E.3    Luo, Y.4    Shen, Y.L.5
  • 107
    • 84872504512 scopus 로고    scopus 로고
    • Femtosecond laser nanostructuring in porous glass with sub-50 nm feature sizes
    • Liao Y, Shen YL, Qiao LL, Chen D, Cheng Y et al. Femtosecond laser nanostructuring in porous glass with sub-50 nm feature sizes. Opt Lett 2013; 38: 187-189.
    • (2013) Opt Lett , vol.38 , pp. 187-189
    • Liao, Y.1    Shen, Y.L.2    Qiao, L.L.3    Chen, D.4    Cheng, Y.5
  • 108
    • 4544298103 scopus 로고    scopus 로고
    • Microfluidic laser embedded in glass by threedimensional femtosecond laser microprocessing
    • Cheng Y, Sugioka K, Midorikawa K. Microfluidic laser embedded in glass by threedimensional femtosecond laser microprocessing. Opt Lett 2004; 29: 2007-2009.
    • (2004) Opt Lett , vol.29 , pp. 2007-2009
    • Cheng, Y.1    Sugioka, K.2    Midorikawa, K.3
  • 109
    • 42149194362 scopus 로고    scopus 로고
    • Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass
    • Hanada Y, Sugioka K, Kawano H, Ishikawa IS, Miyawaki A et al. Nano-aquarium for dynamic observation of living cells fabricated by femtosecond laser direct writing of photostructurable glass. Biomed Microdevices 2008; 10: 403-410.
    • (2008) Biomed Microdevices , vol.10 , pp. 403-410
    • Hanada, Y.1    Sugioka, K.2    Kawano, H.3    Ishikawa, I.S.4    Miyawaki, A.5
  • 110
    • 79958081648 scopus 로고    scopus 로고
    • 3Dmicrofluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria
    • Hanada Y, Sugioka K, Shihira-Ishikawa I, Kawano H, Miyawaki A et al. 3Dmicrofluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria. Lab Chip 2011; 11: 2109-2115.
    • (2011) Lab Chip , vol.11 , pp. 2109-2115
    • Hanada, Y.1    Sugioka, K.2    Shihira-Ishikawa, I.3    Kawano, H.4    Miyawaki, A.5
  • 111
    • 77950828660 scopus 로고    scopus 로고
    • Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection
    • Crespi A, Gu Y, Ngamsom B, Hoekstra HJ, Dongre C et al. Three-dimensional Mach-Zehnder interferometer in a microfluidic chip for spatially-resolved label-free detection. Lab Chip 2010; 10: 1167-1173.
    • (2010) Lab Chip , vol.10 , pp. 1167-1173
    • Crespi, A.1    Gu, Y.2    Ngamsom, B.3    Hoekstra, H.J.4    Dongre, C.5
  • 112
    • 84865214042 scopus 로고    scopus 로고
    • Highly sensitive optofluidic chips for biochemical liquid assay fabricated by 3D femtosecond laser micromachining followed by polymer coating
    • Hanada Y, Sugioka K, Midorikawa K. Highly sensitive optofluidic chips for biochemical liquid assay fabricated by 3D femtosecond laser micromachining followed by polymer coating. Lab Chip 2012; 12: 3688-3693.
    • (2012) Lab Chip , vol.12 , pp. 3688-3693
    • Hanada, Y.1    Sugioka, K.2    Midorikawa, K.3
  • 113
    • 62749134516 scopus 로고    scopus 로고
    • Single cell detection using a glassbased optofluidic device fabricated by femtosecond laser pulses
    • KimM, Hwang DJ,Hiromatsu K, Grigoropoulos CP. Single cell detection using a glassbased optofluidic device fabricated by femtosecond laser pulses. Lab Chip 2009; 9: 311-318.
    • (2009) Lab Chip , vol.9 , pp. 311-318
    • Kim, M.1    Hwang, D.J.2    Hiromatsu, K.3    Grigoropoulos, C.P.4
  • 114
    • 77954343478 scopus 로고    scopus 로고
    • Optofluidic chip for single cell trapping and stretching fabricated by a femtosecond laser
    • Bragheri F, Ferrara L, BelliniN, Vishnubhatla KC, Minzioni P et al. Optofluidic chip for single cell trapping and stretching fabricated by a femtosecond laser. J Biophotonics 2010; 3: 234-243.
    • (2010) J Biophotonics , vol.3 , pp. 234-243
    • Bragheri, F.1    Ferrara, L.2    Bellinin Vishnubhatla, K.C.3    Minzioni, P.4
  • 116
    • 84864528352 scopus 로고    scopus 로고
    • Lab on a chip technologies for algae detection: A review
    • Schaap A, Rohrlack T, Bellouard Y, Lab on a chip technologies for algae detection: a review. J Biophotonics 2012; 5: 661-672.
    • (2012) J Biophotonics , vol.5 , pp. 661-672
    • Schaap, A.1    Rohrlack, T.2    Bellouard, Y.3
  • 117
    • 0038339015 scopus 로고    scopus 로고
    • Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser
    • Cheng Y, Sugioka K, Midorikawa K, Masuda M, Toyoda K et al. Three-dimensional micro-optical components embedded in photosensitive glass by a femtosecond laser. Opt Lett 2003; 28: 1144-1146.
    • (2003) Opt Lett , vol.28 , pp. 1144-1146
    • Cheng, Y.1    Sugioka, K.2    Midorikawa, K.3    Masuda, M.4    Toyoda, K.5
  • 118
    • 35348933252 scopus 로고    scopus 로고
    • Three-dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing
    • DOI 10.1007/s00339-007-4273-5, Special Issue: Molecular and Structural Archaeology
    • Wang Z, Sugioka K, Midorikawa K. Three dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing. Appl Phys A 2007; 89: 951-955. (Pubitemid 47613077)
    • (2007) Applied Physics A: Materials Science and Processing , vol.89 , Issue.4 , pp. 951-955
    • Wang, Z.1    Sugioka, K.2    Midorikawa, K.3
  • 119
    • 75749119808 scopus 로고    scopus 로고
    • Two-photon fluorescence excitationwith a microlens fabricated on the fused silica chip by femtosecond laser micromachining
    • He F, Cheng Y, Qiao LL, Wang C, Xu ZZ et al. Two-photon fluorescence excitationwith a microlens fabricated on the fused silica chip by femtosecond laser micromachining. Appl Phys Lett 2010; 96: 041108.
    • (2010) Appl Phys Lett , vol.96 , pp. 041108
    • He, F.1    Cheng, Y.2    Qiao, L.L.3    Wang, C.4    Xu, Z.Z.5
  • 120
    • 77957581123 scopus 로고    scopus 로고
    • Ultrafast manipulation of self-assembled form birefringence in glass
    • Shimotsuma Y, Sakakura M, Kazansky PG, Beresna M, Qiu JR et al. Ultrafast manipulation of self-assembled form birefringence in glass. Adv Mater 2010; 22: 4039-4043.
    • (2010) Adv Mater , vol.22 , pp. 4039-4043
    • Shimotsuma, Y.1    Sakakura, M.2    Kazansky, P.G.3    Beresna, M.4    Qiu, J.R.5
  • 121
    • 84859337898 scopus 로고    scopus 로고
    • Polarization sensitive elements fabricated by femtosecond laser nanostructuring of glass
    • Beresna M, Gecevicius M, Kazansky PG. Polarization sensitive elements fabricated by femtosecond laser nanostructuring of glass. Opt Mater Express 2011; 1: 783-795.
    • (2011) Opt Mater Express , vol.1 , pp. 783-795
    • Beresna, M.1    Gecevicius, M.2    Kazansky, P.G.3
  • 122
    • 33846818836 scopus 로고    scopus 로고
    • The state of the art and future prospects for laser direct-write for industrial and commercial applications
    • Sugioka K, Gu B, Holmes A. The state of the art and future prospects for laser directwrite for industrial and commercial applications. MRS Bull 2007; 32: 47-54. (Pubitemid 46214743)
    • (2007) MRS Bulletin , vol.32 , Issue.1 , pp. 47-54
    • Sugioka, K.1    Gu, B.2    Holmes, A.3
  • 123
    • 21844439206 scopus 로고    scopus 로고
    • Femtosecond laser ablation and deposition of metal films on transparent substrates with applications in photomask repair
    • DOI 10.1117/12.601008, 03, Commercial and Biomedical Applications of Ultrafast Lasers V
    • Haight R, Wagner A, Longo P, Lim D. Femtosecond laser ablation and deposition of metal films on transparent substrates with applications in photomask repair. Proc SPIE 2005; 5714: 24-36. (Pubitemid 40953418)
    • (2005) Proceedings of SPIE - The International Society for Optical Engineering , vol.5714 , pp. 24-36
    • Haight, R.1    Wagner, A.2    Longo, P.3    Lim, D.4
  • 124
    • 84938541438 scopus 로고    scopus 로고
    • Laseroberflä chenstrukturierung-Verbesserung der tribologischen Eigenschaften
    • 25-26 September 2003; Stuttgart, Germany. FGSW: Stuttgart, Germany
    • Abeln T, Klink U. Laseroberflä chenstrukturierung-Verbesserung der tribologischen Eigenschaften. In: Proceedings of Stuttgarter Lasertage 2003; 25-26 September 2003; Stuttgart, Germany. FGSW: Stuttgart, Germany, 2003; 107-110.
    • (2003) Proceedings of Stuttgarter Lasertage 2003 , pp. 107-110
    • Abeln, T.1    Klink, U.2
  • 125
    • 84940278255 scopus 로고    scopus 로고
    • Applications and perspectives of ultrashort pulsed lasers
    • Bauer T, König J. Applications and perspectives of ultrashort pulsed lasers. Tech Dig LPM 2010; 2010: 127.
    • (2010) Tech Dig LPM 2010 , pp. 127
    • Bauer, T.1    König, J.2
  • 127
    • 79956117483 scopus 로고    scopus 로고
    • Laser processing in industrial solar module manufacturing
    • Booth H. Laser processing in industrial solar module manufacturing. J Laser Micro/Nanoeng 2010; 5: 183-191.
    • (2010) J Laser Micro/Nanoeng , vol.5 , pp. 183-191
    • Booth, H.1
  • 128
    • 81155131647 scopus 로고    scopus 로고
    • High-power pico-and femtosecond lasers enable new applications
    • Weiler S. High-power pico-and femtosecond lasers enable new applications. Laser Focus World 2011; 47: 55-63.
    • (2011) Laser Focus World , vol.47 , pp. 55-63
    • Weiler, S.1
  • 130
    • 1242296933 scopus 로고    scopus 로고
    • Flap dimensions created with the IntraLase FS laser
    • DOI 10.1016/S0886-3350(03)00578-9
    • Binder PS. Flap dimensions created with the IntraLase FS laser. J Cataract Refract Surg 2004; 30: 26-32. (Pubitemid 38234330)
    • (2004) Journal of Cataract and Refractive Surgery , vol.30 , Issue.1 , pp. 26-32
    • Binder, P.S.1
  • 131
    • 84940285699 scopus 로고    scopus 로고
    • IntraLaseTM FS Laser: http://www.amo-inc.com/products/refractive/ilasik/ intralase-fslaser.
    • Intra Lase TM FS Laser
  • 132
    • 84877685894 scopus 로고    scopus 로고
    • Microcutting and hollow 3D microstructures in glasses by in-volume selective laser-induced etching (ISLE)
    • Gottmann J, Hermans M, Ortmann J. Microcutting and hollow 3D microstructures in glasses by in-volume selective laser-induced etching (ISLE). J Laser Micro/Nanoeng 2013; 8: 15-18.
    • (2013) J Laser Micro/Nanoeng , vol.8 , pp. 15-18
    • Gottmann, J.1    Hermans, M.2    Ortmann, J.3
  • 133
    • 77957656286 scopus 로고    scopus 로고
    • Fiber lasers and amplifiers: An ultrafast performance evolution
    • Tü nnermann A, Schreiber T, Limpert J. Fiber lasers and amplifiers: an ultrafast performance evolution. Appl Opt 2010; 49: F71-F78.
    • (2010) Appl Opt , vol.49
    • Tünnermann, A.1    Schreiber, T.2    Limpert, J.3
  • 134
    • 77954899228 scopus 로고    scopus 로고
    • Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses
    • He F, Xu H, Cheng Y, Ni JL, Xiong H et al. Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses. Opt Lett 2010; 35: 1106-1108.
    • (2010) Opt Lett , vol.35 , pp. 1106-1108
    • He, F.1    Xu, H.2    Cheng, Y.3    Ni, J.L.4    Xiong, H.5
  • 135
    • 77956391809 scopus 로고    scopus 로고
    • Temporally focused femtosecond laser pulses for low numerical aperture micromachining through optically transparent materials
    • Vitek DN, Adams DE, Johnson A, Tsai PS, Backus S et al. Temporally focused femtosecond laser pulses for low numerical aperture micromachining through optically transparent materials. Opt Express 2010; 18: 18086-18094.
    • (2010) Opt Express , vol.18 , pp. 18086-18094
    • Vitek, D.N.1    Adams, D.E.2    Johnson, A.3    Tsai, P.S.4    Backus, S.5
  • 136
    • 83655193012 scopus 로고    scopus 로고
    • Enhancement of peak intensity in a filament core with spatiotemporally focused femtosecond laser pulses
    • Zeng B, Chu W, Gao H, Liu WW, Li GH et al. Enhancement of peak intensity in a filament core with spatiotemporally focused femtosecond laser pulses. Phys Rev A 2011; 84: 063819.
    • (2011) Phys Rev A , vol.84 , pp. 063819
    • Zeng, B.1    Chu, W.2    Gao, H.3    Liu, W.W.4    Li, G.H.5
  • 137
    • 77954949378 scopus 로고    scopus 로고
    • High-throughput three-dimensional lithographic microfabrication
    • Kim D, So PT. High-throughput three-dimensional lithographic microfabrication. Opt Lett 2010; 35: 1602-1604.
    • (2010) Opt Lett , vol.35 , pp. 1602-1604
    • Kim, D.1    So, P.T.2
  • 138
    • 78649698412 scopus 로고    scopus 로고
    • Spatio-temporally focused femtosecond laser pulses for nonreciprocal writing in optically transparent materials
    • Vitek DN, Block E, Bellouard Y, Adams DE, Backus S et al. Spatio-temporally focused femtosecond laser pulses for nonreciprocal writing in optically transparent materials. Opt Express 2010; 18: 24673-24678.
    • (2010) Opt Express , vol.18 , pp. 24673-24678
    • Vitek, D.N.1    Block, E.2    Bellouard, Y.3    Adams, D.E.4    Backus, S.5


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