Direct femtosecond laser surface nano/microstructuring and its applications

Laser and Photonics Reviews

Volumn 7, Issue 3, 2013, Pages 385-407

  Vorobyev, Anatoliy Y ^a   Guo, Chunlei ^a  

^a UNIVERSITY OF ROCHESTER   (United States)

Author keywords

Ablation; Femtosecond laser; Microstructures; Nanostructures; Optical properties; Wetting properties

Indexed keywords

CONVENTIONAL LASERS; EXTENDED SURFACES; FEMTOSECOND LASER PROCESSING; ITS APPLICATIONS; SCIENTIFIC ACHIEVEMENTS; SUPER-HYDROPHILIC; SUPERHYDROPHOBIC; WETTING PROPERTY;

ABLATION; MATERIALS PROPERTIES; METALS; MICROSTRUCTURE; NANOSTRUCTURES; OPTICAL PROPERTIES; STRUCTURAL METALS; SURFACES; WETTING;

ULTRASHORT PULSES;

EID: 84877329882     PISSN: 18638880     EISSN: 18638899     Source Type: Journal    
DOI: 10.1002/lpor.201200017     Document Type: Review

References (221)

1. S. I. Anisimov and B. S. Luk'yanchuk, Phys. Uspekhi 45, 293-324 (2002).
2. P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, Opt. Commun. 114, 106-110 (1995).
3. F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, and B. N. Chichkov, Appl. Phys. A 77, 229-235 (2003).
4. P. Simon and J. Ihlemann, Appl. Surf. Sci. 109-110, 25-29 (1997).
5. S. Nolte, B. N. Chichkov, H. Welling, Y. Shani, K. Liebermann, and H. Terkel, Opt. Lett. 24, 914-916 (1999).
6. A. Chimmalgi, T. Y. Choi, C. P. Grigoropoulos, and K. Komvopoulos, Appl. Phys. Lett. 82, 1146-1148 (2003).
7. A. Plech, P. Leiderer, and J. Boneberg, Laser Photonics Rev. 3, 435-451 (2009).
8. V. Zorba, X. Mao, and R. E. Russo, Appl. Phys. Lett. 95, 041110 (2009).
9. C. Wu, C. H. Crouch, L. Zhao, J. E. Carey, R. Younkin, J. A. Levinson, E. Mazur, R. M. Farrell, P. Gothoskar, and A. Karger, Appl. Phys. Lett. 78, 1850-1852 (2001).
10. A. Pereira, A. Cros, P. Delaporte, S. Georgiou, A. Manousaki, W. Marine, and M. Sentis, Appl. Phys. A 79, 1433-1437 (2004).
11. S. Amoruso, G. Ausanio, R. Bruzzese, M. Vitello, and X. Wang, Phys. Rev. B 71, 033406 (2005).
12. A. V. Kabashin, M. Charbonneau-Lefort, M. Meunier, and R. Leonelli, Appl. Surf. Sci. 168, 328-331 (2000).
13. S. Eliezer, N. Eliaz, E. Grossman, D. Fisher, I. Gouzman, Z. Henis, Y. Horovitz, M. Frankel, S. Maman, and Y. Lereah, Phys. Rev. B 69, 144119 (2004).
14. A. Y. Vorobyev and C. Guo, Phys. Rev. B 72, 195422 (2005).
15. J. Koch, F. Korte, T. Bauer, C. Fallnich, A. Ostendorf, and B. N. Chichkov, Appl. Phys. A 81, 325-328 (2005).
16. Y. P. Meshcheryakov, and N. M. Bulgakova, Appl. Phys. A 82, 363-368 (2006).
17. D. S. Ivanov, B. Rethfeld, G. M. O'Connor, T. J. Glynn, A. N. Volkov, and L. V. Zhigilei, Appl. Phys. A 92, 791-706 (2008).
18. D. Eversole, B. Luk'yanchuk, and A. Ben-Yakar, Appl. Phys. A 89, 283-291 (2007).
19. A. Y. Vorobyev and C. Guo, Opt. Express 14, 2164-2169 (2006).
20. A. Y. Vorobyev and C. Guo, Appl. Surf. Sci. 253, 7272-7280 (2007).
21. Y. Nakata, T. Okada, and M. Maeda, Appl. Phys. A 79, 1481-1483 (2004).
22. J. Bekesi, J.-H. Klein-Wiele, and P. Simon, Appl. Phys. A 76, 355-357 (2003).
23. K. Paivasaari, J. J. J. Kaakkunen, M. Kuittinen, and T. Jaaskelainen, Opt. Express 15, 13838-13843 (2007).
24. J. J. J. Kaakkunen, K. Paivasaari, M. Kuittinen, and T. Jaaskelainen, Appl Phys A 94, 215-220 (2009).
25. C. Wang, Y. C. Chang, J. Yao, C. Luo, S. Yin, P. Ruffin, C. Brantley, and E. Edwards, Appl. Phys. Lett. 100, 023107 (2012).
26. X. Li, D. Feng, T. Jia, Z. Sun, and Z. Xu, Micro & Nano Letters 6, 177-180 (2011).
27. M. Birnbaum, J. Appl. Phys. 36, 3688-3689 (1965).
28. D. C. Emmony, R. P. Howson, and L. J. Willis, Appl. Phys. Lett. 23, 598-600 (1973).
29. Z. Guosheng, P. M. Fauchet, and A. E. Siegman, Phys. Rev. B 26, 5366-5381 (1982).
30. J. E. Sipe, J. F. Young, J. F. Preston, and H. M. van Driel, Phys. Rev. B 27, 1141-1154 (1983).
31. S. A. Akhmanov, V. I. Emel'yanov, N. I. Koroteev, and V. N. Seminogov, Sov. Phys. Usp. 28, 1084-1124 (1985).
32. S. E. Clark and D. C. Emmony, Phys. Rev. B 40, 2031-2041 (1989).
33. A. M. Bonch-Bruevich, M. N. Libenson, V. S. Makin, and V. V. Trubaev, Opt. Eng. (Bellingham) 31, 718-730 (1992).
34. A. Borowiec and H. K. Haugen, Appl. Phys. Lett. 82, 4462-4464 (2003).
35. F. Costache, S. Kouteva-Arguirova, and J. Reif, Appl. Phys. A 79, 1429-1432 (2004).
36. J. Bonse, M. Munz, and H. Sturm, J. Appl. Phys. 97, 013538 (2005).
37. R. Le Harzic, H. Schuck, D. Sauer, T. Anhut, I. Riemann, and K. Konig, Opt. Express 13, 6651-6656 (2005).
38. C. Hnatovsky, J. R. Taylor, P. P. Rajeev, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, Appl. Phys. Lett. 87, 14104-14106 (2005).
39. M. Rohloff, S. K. Das, S. Horn, R. Grunwald, A. Rosenfeld, J. Kruger, and J. Bonse, J. Appl. Phys. 110, 014910 (2011).
40. A. Y. Vorobyev, V. S. Makin, and C. Guo, J. Appl. Phys. 101, 034903 (2007).
41. J. Wang and C. Guo, Appl. Phys. Lett. 87, 251914 (2005).
42. R. V. Volkov, D. M. Golishnikov, V. M. Gordienko, and A. B. Savel'ev, JETP Lett. 77, 473-476 (2003).
43. A. Weck, T. H. R. Crawford, D. S. Wilkinson, H. K. Haugen, and J. S. Preston, Appl. Phys. A 89, 1001-1003 (2007).
44. Y. Huang, S. Liu, W. Li, Y. Liu, and W. Yang, Opt. Express 17, 20756-20761 (2009).
45. M. Forster, W. Kautek, N. Faure, E. Audouard, and R. Stoian, Phys. Chem. Chem. Phys. 13, 4155-4158 (2011).
46. E. Rebollar, J. R. Vazquez de Aldana, J. A. Perez-Hernandez, T. A. Ezquerra, P. Moreno, and M. Castillejo, Appl. Phys. Lett. 100, 041106 (2012).
47. G. Dumitru, V. Romano, H. P. Weber, M. Sentis, and W. Marine, Appl. Phys. A 74, 729-739 (2002).
48. E. V. Golosov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, S. V. Makarov, Yu. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn, and A. R. Sharipov, Phys. Rev. B 83, 115426 (2011).
49. M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, ACS Nano 3, 4062-4070 (2009).
50. A. Y. Vorobyev and C. Guo, Appl. Phys. Lett. 92, 041914 (2008).
51. A. Y. Vorobyev and C. Guo, J. Appl. Phys. 104, 053516 (2008).
52. A. Y. Vorobyev and C. Guo, Opt. Express 19, A1031-A1036 (2011).
53. T. Baldacchini, J. E. Carey, M. Zhou, and E. Mazur, Langmuir 22, 4917-4919 (2006).
54. V. Zorba, L. Persano, D. Pisignano, A. Athanassiou, E. Stratakis, R. Cingolani, P. Tzanetakis, and C. Fotakis, Nanotechnology 17, 3234-3238 (2006).
55. V. Zorba, E. Stratakis, M. Barberoglou, E. Spanakis, P. Tzanetakis, and C. Fotakis, Appl. Phys. A 93, 819-825 (2008).
56. M. Barberoglou, V. Zorba, E. Stratakis, E. Spanakis, P. Tzanetakis, S. H. Anastasiadis, and C. Fotakis, Appl. Surf. Sci. 255, 5425-5429 (2009).
57. E. Fadeeva, S. Schlie, J. Koch, B. N. Chichkov, A. Y. Vorobyev, and C. Guo, in: Contact Angle, Wettability and Adhesion, Vol. 6, edited by K. L. Mittal (VSP/Brill, Leiden, 2009), pp. 163-171.
58. E. L. Papadopoulou, M. Barberoglou, V. Zorba, A. Manousaki, A. Pagkozidis, E. Stratakis, and C. Fotakis, J. Phys. Chem. C 113, 2891-2895 (2009).
59. A. Y. Vorobyev and C. Guo, J. Appl. Phys. 108, 123512 (2010).
60. A. Y. Vorobyev and C. Guo, Opt. Express 18, 6455-6460 (2010).
61. T. Y. Hwang, A. Y. Vorobyev, and C. Guo, Phys. Rev. B 79, 085425 (2009).
62. A. Y. Vorobyev, V. S. Makin, and C. Guo, Phys. Rev. Lett. 102, 234301 (2009).
63. A. Y. Vorobyev and C. Guo, Appl. Phys. Lett. 99, 193703 (2011).
64. T. Y. Hwang, A. Y. Vorobyev, and C. Guo, Appl. Phys. Lett. 95, 123111 (2009).
65. R. R. Gattass and E. Mazur, Nature Photonics 2, 219-224 (2008).
66. R. Ossellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photonics Rev. 5, 442-463 (2011).
67. E. G. Gamaly, A. V. Rode, B. Luther-Davies, and V. T. Tikhonchuk, Phys. Plasmas 9, 949-957 (2002).
68. B. Rethfeld, K. Sokolowski-Tinten, D. von der Linde, and S. I. Anisimov, Appl. Phys. A 79, 767-769 (2004).
69. N. M. Bulgakova, R. Stoian, A. Rosenfeld, and I. V. Hetrtel, in: Laser-Surface Interactions for New Materials Production, Springer Series in Materials Science, Vol. 130, edited by A. Miotello and P. Ossi (Springer, Berlin, Heidelberg, 2010), pp. 81-97.
70. L. V. Zhigilei, Z. Lin, and D. S. Ivanov, J. Phys. Chem. C 113, 11892 (2009).
71. B. J. Demaske, V. V. Zhakhovsky, N. A. Inogamov, and I. I. Oleynik, Phys. Rev. B 82, 064113 (2010).
72. M. E. Povarnitsyn, T. E. Itina, M. Sentis, K. V. Khishchenko, and P. R. Levashov, Phys. Rev. B 75, 235414 (2007).
73. A. K. Upadhyay, N. A. Inogamov, B. Rethfeld, and H. M. Urbassek, Phys. Rev. B 78, 045437 (2008).
74. G. L. Eesley, Phys. Rev. Lett. 51, 2140-2143 (1983).
75. J. G. Fujimoto, J. M. Liu, and E. P. Ippen, Phys. Rev. Lett. 53, 1837-1840 (1984).
76. H. E. Elsayedali, T. B. Norris, M. A. Pessot, and G. A. Mourou, Phys. Rev. Lett. 58, 1212-1215 (1987).
77. S. I. Anisimov, B. L. Kapeliovich, and T. L. Perel'man, Sov. Phys. JETP 39, 375-377 (1974).
78. K. Oguri, Y. Okano, T. Nishikawa, and H. Nakano, Phys. Rev. B 79, 144106 (2009).
79. T. E. Glover, G. D. Ackerman, R. W. Lee, H. A. Padmore, and D. A. Young, Chem. Phys. 299, 171-181 (2004).
80. N. M. Bulgakova and I. M. Bourakov, Appl. Surf. Sci. 197, 41-44 (2002).
81. L. V. Zhigilei, Appl. Phys. A 76, 339-350 (2003).
82. E. Leveugle, D. S. Ivanov, and L. V. Zhigilei, Appl. Phys. A 79, 1643-1649 (2004).
83. B. J. Garrison, T. E. Itina, and L. V. Zhigilei, Phys. Rev. E 68, 041501 (2003).
84. N. A. Inogamov, V. V. Zhakhovskii, S. I. Ashitkov, Yu. V. Petrov, M. B. Agranat, S. I. Anisimov, K. Nishihara, and V. E. Fortov, JETP 107, 1-19 (2008).
85. N. A. Inogamov, A. Ya. Faenov, V. V. Zhakhovskii, I. Yu. Skobelev, V. A. Khokhlov, Y. Kato, M. Tanaka, T. A. Pikuz, M. Kishimoto, M. Ishino, M. Nishikino, Y. Fukuda, S. V. Bulanov, T. Kawachi, Yu. V. Petrov, S. I. Anisimov, and V. E. Fortov, Contrib. Plasma Phys. 51, 361-366 (2011).
86. D. Perez and L. J. Lewis, Phys. Rev. Lett. 89, 255504 (2002).
87. D. Bouilly, D. Perez, and L. J. Lewis, Phys. Rev. B 76, 184119 (2007).
88. S. Amoruso, R. Bruzzese, M. Vitiello, N. N. Nedialkov, and P. A. Atanasov, J. Appl. Phys. 98, 044907 (2005).
89. S. Amoruso, R. Bruzzese, X. Wang, N. N. Nedialkov, and P. A. Atanasov, J. Phys. D, Appl. Phys. 40, 331-340 (2007).
90. K. Oguri, Y. Okano, T. Nishikawa, and H. Nakano, Phys. Rev. Lett. 99, 165003 (2007).
91. J. Perriere, C. Boulmer-Leborgne, R. Benzerga, and S. Tricot, J. Phys. D, Appl. Phys. 40, 7069-7076 (2007).
92. I. N. Zavestovskaya, A. P. Kanavin, and N. A. Men'kova, J. Opt. Technol. 75, 353-358 (2008).
93. A. Y. Vorobyev and C. Guo, Appl. Phys. A 86, 235-241 (2007).
94. S. Amoruso, R. Bruzzese, X. Wang, and J. Xia, Appl. Phys. Lett. 92, 041503 (2008).
95. A. Pereira, P. Delaporte, M. Sentis, W. Marine, A. L. Thomann, and C. Boulmer-Leborgne, J. Appl. Phys. 98, 064902 (2005).
96. C. A. Zuhlke, D. R. Alexander, J. C. Bruce III, N. J. Ianno, C. A. Kamler, and W. Yang, Opt. Express 18, 4329-4339 (2010).
97. S. K. Das, K. Dasari, A. Rosenfeld, and R. Grunwald, Nanotechnology 21, 155302 (2010).
98. H. Ouyang, Y. Deng, W. H. Knox, and P. M. Fauchet, Phys. Stat. Sol. (a) 204, 1255-1259 (2007).
99. R. Wagner, J. Gottmann, A. Horn, and E. W. Kreutz, Appl. Surf. Sci. 252, 8576-8579 (2006).
100. A. V. Zayats and I. I. Smolyaninov, J. Opt. A, Pure Appl. Opt. 5, S16-S50 (2003).
101. A. Y. Vorobyev and C. Guo, Appl. Phys. A 86, 321-324 (2007).
102. A. Y. Vorobyev and C. Guo, J. Appl. Phys. 104, 063523 (2008).
103. E. V. Golosov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn, JETP 113, 14-26 (2011).
104. T. Y. Hwang and C. Guo, J. Appl. Phys. 108, 073523 (2010).
105. A. K. Sharma, J. Smedley, T. Tsang, and T. Rao, Rev. Sci. Instrum. 82, 033113 (2011).
106. Y. Yang, J. Yang, L. Xue, and Y. Guo, Appl. Phys. Lett. 97, 141101 (2010).
107. J. Bonse and J. Kruger, J. Appl. Phys. 108, 034903 (2010).
108. K. Okamuro, M. Hashida, Y. Miyasaka, Y. Ikuta, S. Tokita, and S. Sakabe, Phys. Rev. B 82, 165417 (2010).
109. S. Sakabe, M. Hashida, S. Tokita, S. Namba, and K. Okamuro, Phys. Rev. B 79, 033409 (2009).
110. M. Hashida, Y. Miyasaka, Y. Ikuta, S. Tokita, and S. Sakabe, Phys. Rev. B 83, 235413 (2011).
111. E. V. Golosov, V. I. Emel'yanov, A. A. Ionin, Yu. R. Kolobov, S. I. Kudryashov, A. E. Ligachev, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn, JETP Lett. 90, 107-110 (2009).
112. M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, Opt. Express 18, A600-A619 (2010).
113. V. S. Makin, R. S. Makin, A. Y. Vorobyev, and C. Guo, Tech. Phys. Lett. 34, 387-390 (2008).
114. S. Hou, Y. Huo, P. Xiong, Y. Zhang, S. Zhang, T. Jia, Z. Sun, J. Qiu, and Z. Xu, J. Phys. D, Appl. Phys. 44, 505401 (2011).
115. M. Shen, J. E. Carey, C. H. Crouch, M. Kandyla, H. A. Stone, and E. Mazur, Nano Lett. 8, 2087-2091 (2008).
116. V. P. Korolkov, A. A. Ionin, S. I. Kudryashov, L. V. Seleznev, D. V. Sinitsyn, R. V. Samsonov, A. I. Masliy, A. Zh. Medvedev, and B. G. Goldenberg, Quantum Electron. 41, 387-392 (2011).
117. L. Qi, K. Nishii, and Y. Namba, Opt. Lett. 34, 1846-1848 (2009).
118. J. W. Yao, C. Y. Zhang, H. Y. Liu, Q. F. Dai, L. J. Wu, S. Lan, A. V. Gopal, V. A. Trofimov, and T. M. Lysak, Opt. Express 20, 905-911 (2012).
119. H. Raether, Surface Plasmons on Smooth, and Rough Surfaces and on Gratings (Springer-Verlag, Berlin, 1988).
120. Q. Z. Zhao, S. Malzer, and L. J. Wang, Opt. Express 15, 15741-15746 (2007).
121. T. Y. Hwang and C. Guo, Opt. Lett. 36, 2575-2577 (2011).
122. Z. Li, P. Li, J. Fan, R. Fang, and D. Zhang, Opt. Lasers Eng. 48, 64-68 (2010).
123. J. P. Colombier, F. Garrelie, N. Faure, S. Reynaud, M. Bounhalli, E. Audouard, R. Stoian, and F. Pigeon, J. Appl. Phys. 111, 024902 (2012).
124. J. Reif, O. Varlamova, S. Varlamov, and M. Bestehorn, Appl Phys A 104, 969-973 (2011).
125. O. Varlamova, J. Reif, S. Varlamov, and M. Bestehorn, J. Nanosci. Nanotechnol. 11, 9274-9281 (2011).
126. J. Reif, in: Laser-Surface Interactions for New Materials Production, Springer Series in Materials Science, Vol. 130, edited by A. Miotello and P. Ossi (Springer, Berlin, Heidelberg, 2010), pp. 19-41.
127. D. Dufft, A. Rosenfeld, S. K. Das, R. Grunwald, and J. Bonse, J. Appl. Phys. 105, 034908 (2009).
128. E. M. Hsu, T. H. R. Crawford, C. Maunders, G. A. Botton, and H. K. Haugen, Appl. Phys. Lett. 92, 221112 (2008).
129. S. E. Kirkwood, M. T. Taschuk, Y. Y. Tsui, and R. Fedoseyevs, J. Phys. Conf. Ser. 59, 591-594 (2007).
130. K. Vestentoft and P. Balling, Appl. Phys. A 84, 207-213 (2006).
131. C. Y. Zhang, J. W. Yao, H. Y. Liu, Q. F. Dai, L. J. Wu, S. Lan, V. A. Trofimov, and T. M. Lysak, Opt. Lett. 37, 1106-1108 (2012).
132. K. Dou, E. T. Knobbe, R. L. Parkhill, B. Irwin, L. Matthews, and K. H. Church, Appl. Phys. A 76, 303-307 (2003).
133. X. Li, C. Yuan, H. Yang, J. Li, W. Huang, D. Tang, and Q. Xu, Appl. Surf. Sci. 256, 4344-4349 (2010).
134. Y. Dai, M. He, H. Bian, B. Lu, X. Yan, and G. Ma, Appl. Phys. A 106, 567-574 (2012).
135. E. Stratakis, V. Zorba, M. Barberoglou, C. Fotakis, and G. Shafeev, Nanotechnology 20, 105303 (2009).
136. E. B. Barmina, E. Stratakis, C. Fotakis, and G. A. Shafeev, Quantum Electron. 40, 1012-1020 (2010).
137. E. V. Barmina, M. Barberoglu, V. Zorba, A. V. Simakin, E. Stratakis, C. Fotakis, and G. A. Shafeev, Quantum Electron. 39, 89-93 (2009).
138. V. V. Zhakhovskii, N. A. Inogamov, and K. Nishihara, JETP Lett. 87, 423-427 (2008).
139. R. Kelly and J. E. Rothenberg, Nucl. Instrum. Methods Phys. Res. B 7/8, 755-763 (1985).
140. Y. Y. Tsui, J. Santiago, Y. M. Li, and R. Fedosejevs, Opt. Commun. 111, 360-369 (1994).
141. V. N. Tokarev, Laser Physics 16, 1291-1307 (2006).
142. N. Seifert, G. Betz, and W. Husinsky, Appl. Surf. Sci. 103, 63-70 (1996).
143. S. Bashir, M. S. Rafique, and W. Husinsky, Appl. Surf. Sci. 255, 8372-8376 (2009).
144. S. Lugomer, A. Maksimovic, B. Farkas, Z. Geretovszky, T. Szorenyic, A. L. Toth, Z. Zolnai, and I. Barsony, Appl. Surf. Sci. 258, 3589-3597 (2012).
145. G. D. Tsibidis, E. Stratakis, and K. E. Aifantis, J. Appl. Phys. 111, 053502 (2012).
146. T. H. Her, R. J. Finlay, C. Wu, S. Deliwala, and E. Mazur, Appl. Phys. Lett. 73, 1673-1675 (1998).
147. E. Skantzakis, V. Zorba, D. G. Papazoglou, I. Zergioti, and C. Fotakis, Appl. Surf. Sci. 252, 4462-4466 (2006).
148. V. Zorba, N. Boukos, I. Zergioti, and C. Fotakis, Appl. Opt. 47, 1846-1850 (2008).
149. R. Yonkin, J. E. Carey, E. Mazur, J. A. Levinson, and C. M. Friend, J. Appl. Phys. 93, 2626-2629 (2003).
150. M. A. Sheehy, L. Winston, J. E. Carey, C. M. Friend, and E. Mazur, Chem. Mater. 17, 3582-3586 (2005).
151. M. Halbwax, T. Sarnet, Ph. Delaporte, M. Sentis, H. Etienne, F. Torregrosa, V. Vervisch, I. Perichaud, and S. Martinuzzi, Thin Solid Films 516, 6791-6795 (2008).
152. C. H. Crouch, J. E. Carey, J. M. Warrender, M. J. Aziz, E. Mazur, and F. Y. Genin, Appl. Phys. Lett. 84, 1850-1852 (2004).
153. E. Stratakis, A. Ranella, and C. Fotakis, Biomicrofluidics 5, 013411 (2011).
154. M. Y. Shen, C. H. Crouch, J. E. Carey, and E. Mazur, Appl. Phys. Lett. 85, 5694-5696 (2004).
155. M. Tsukamoto, T. Kayahara, H. Nakano, M. Hashida, M. Katto, M. Fujita, M. Tanaka, and N. Abe, J. Phys. Conference Series 59, 666-669 (2007).
156. V. Oliveira, S. Ausset, and R. Vilar, Appl. Surf. Sci. 255, 7556-7560 (2009).
157. B. K. Nayak and M. C. Gupta, Opt. Lasers Eng. 48, 940-949 (2010).
158. Y. Yang, J. Yang, C. Liang, H. Wang, X. Zhu, and N. Zhang, Opt. Express 17, 21124-21133 (2009).
159. A. Y. Vorobyev and C. Guo, Appl. Surf. Sci. 257, 7291-7294 (2011).
160. E. Fadeeva, S. Schlie, J. Koch, and B. N. Chichkov, J. Adhesion, Sci. Technol. 24, 2257-2270 (2010).
161. A. R. Parker, J. Opt. A, Pure Appl. Opt. 2, R15-R28 (2000).
162. S. Kinoshita, Structural Colors in the Realm of Nature (World Scientific, New Jersey, 2008).
163. P. Vukusic, J. R. Sambles, C. R. Lawrence, and R. J. Wootton, Proc. R. Soc. Lond. B 266, 1403-1411 (1999).
164. A. Y. Vorobyev and C. Guo, J. Appl. Phys. 103, 043513 (2008).
165. A. Y. Vorobyev, V. S. Makin, and C. Guo, in: Conference Proceedings of the 52nd IEEE International Midwest Symposium on Circuits and Systems, Cancun, Mexico, 2009, pp. 909-911.
166. B. Dusser, Z. Sagan, H. Soder, N. Faure, J. P. Colombier, M. Jourlin, and E. Audouard, Opt. Express 18, 2913-2924 (2010).
167. Md. S. Ahsan, F. Ahmed, Y. G. Kim, M. S. Lee, and M. B. G. Jun, Appl. Surf. Sci. 257, 7771-7777 (2011).
168. A. Y. Vorobyev and C. Guo, Proc. SPIE 7005, 70051T (2008).
169. J. Z. Zhang and C. Noguez, Plasmonics 3, 127-150 (2008).
170. A. Y. Vorobyev and C. Guo, Adv. Mech. Eng. 2010, 452749 (2010).
171. A. Y. Vorobyev, A. N. Topkov, O. V. Gurin, V. A. Svich, and C. Guo, Appl. Phys. Lett. 95, 121106 (2009).
172. V. V. Iyengar, B. K. Nayak, and M. C. Gupta, Appl. Opt. 49, 5983-5988 (2010).
173. Y. Yang, J. Yang, C. Liang, and H. Wang, Opt. Express 16, 11259-11265 (2008).
174. F. Ghmari, T. Ghbara, M. Laroche, R. Carminati, and J.-J. Greffet, J. Appl. Phys. 96, 2656-2664 (2004).
175. U. Kreibig and M. Vollmer, Optical Properties of Metal Clusters (Springer, Berlin, 1995).
176. I. H. H. Zabel and D. Stroud, Phys. Rev. B 46, 8132-8138 (1992).
177. S. Lal, S. Link, and N. J. Halas, Nature Photonics 1, 641-648 (2007).
178. C. H. Crouch, J. E. Carey, M. Y. Shen, E. Mazur, and F. Y. Genin, Appl. Phys. A 79, 1635-1641 (2004).
179. J. E. Carey, C. H. Crouch, M. Y. Shen, and E. Mazur, Opt. Lett. 30, 1773-1775 (2005).
180. Z. Huang, J. E. Carey, M. Liu, X. Guo, E. Mazur, and J. C. Campbell, Appl. Phys. Lett. 89, 033506 (2006).
181. Y. Liu, S. Liu, Y. Wang, G. Feng, J. Zhu, and L. Zhao, Laser Phys. 18, 1148-1152 (2008).
182. A. V. Kabashin, Ph. Delaporte, A. Pereira, D. Grojo, R. Torres, Th. Sarnet, and M. Sentis, Nanoscale Res. Lett. 5, 454-463 (2010).
183. H. D. Yang, X. H. Li, G. Q. Li, C. Wen, R. Qiu, W. H. Huang, and J. B. Wang, Appl Phys A 104, 749-753 (2011).
184. W. Barthlott and C. Neinhuis, Planta 202, 1-8 (1997).
185. J. Drelich and E. Chibowski, Langmuir 26, 18621-18623 (2010).
186. E. Stratakis, A. Mateescu, M. Barberoglou, M. Vamvakaki, C. Fotakis, and S. H. Anastasiadis, Chem. Commun. (Cambridge) 46, 4136-4138 (2010).
187. B. Wu, M. Zhou, J. Li, X. Ye, G. Li, and L. Cai, Appl. Surf Sci. 256, 61-66 (2009).
188. A. M. Kietzig, S. G. Hatzikiriakos, and P. Englezos, Langmuir 25, 4821-4827 (2009).
189. Z. K. Wang, H. Y. Zheng, C. P. Lim, and Y. C. Lam, Appl. Phys. Lett. 95, 111110 (2009).
190. T. O. Yoon, H. J. Shin, S. C. Jeoung, and Y. I. Park, Opt. Express 16, 12715-12725 (2008).
191. H. Pazokian, A. Selimis, J. Barzin, S. Jelvani, M. Mollabashi, C. Fotakis, and E. Stratakis, J. Micrimech. Microeng. 22, 035001 (2012).
192. A. Y. Vorobyev and C. Guo, Optics & Photonics News December, 38 (2010), Video at http://www.opnmagazine-digital.com/opn/201012/?pg=40/#pg40.
193. L. A. Romero and F. G. Yost, J. Fluid, Mech. 322, 109-129 (1996).
194. J. A. Mann, L. Romero, R. R. Rye, and F. G. Yost, Phys. Rev. E 52, 3967-3972 (1995).
195. R. R. Rye, J. A. Mann, and F. G. Yost, Langmuir 12, 555-565 (1996).
196. A. Y. Vorobyev and C. Guo, Appl. Phys. Lett. 94, 224102 (2009).
197. N. T. Nguyen and Z. Wu, J. Micromech. Microeng. 15, R1-R16 (2005).
198. A. D. Stroock, S. K. W. Dertinger, A. Ajdari, I. Mezic, H. A. Stone, and G. M. Whitesides, Science 295, 647-651 (2002).
199. T. J. Johnson, D. Ross, and L. E. Locascio, Anal. Chem. 74, 45-51 (2002).
200. P. F. Man, C. H. Mastrangelo, M. A. Burns, and D. T. Burke, in: Proceedings of the 11th IEEE Annual International Workshop on Micro Electro Mechanical Systems, Heidelberg, Germany, 1998, pp. 45-50.
201. K. K. Liu, R. G. Wu, Y. J. Chuang, H. S. Khoo, S. H. Huang, and F. G. Tseng, Sensors 10, 6623-6623 (2010).
202. J. Melin, N. Roxhed, G. Gimenez, P. Griss, W. van der Wijngaart, and G. Stemme, Sens. Actuators B, Chem. 100, 463-468 (2004).
203. T. S. Leu and P. Y. Chang, Sens. Actuators A, Phys. 115, 508-515 (2004).
204. H. Andersson, W. van der Wijngaart, P. Griss, F. Niklaus, and G. Stemme, Sens. Actuators B, Chem. 75, 136-141 (2004).
205. H. Cho, H. Y. Kim, J. Y. Kang, and T. S. Kim, J. Colloid Interface, Sci. 306, 379-385 (2007).
206. M. Zimmermann, P. Hunziker, and E. Delamarche, Microfluid. Nanofluid. 5, 395-402 (2008).
207. J. P. Brody and P. Yager, Sens. Actuators A, Phys. 58, 13-18 (1997).
208. M. Zimmermann, H. Schmid, P. Hunziker, and E. Delamarche, Lab Chip 7, 119-125 (2007).
209. D. Juncker, H. Schmid, U. Drechsler, H. Wolf, M. Wolf, B. Michel, N. de Rooij, and E. Delamarche, Anal. Chem. 74, 6139-6144 (2002).
210. Z. Z. Gu, H. Uetsuka, K. Takahashi, R. Nakajima, H. Onishi, A. Fujishima, and O. Sato, Angew. Chem. Int. Ed. 42, 894-897 (2003).
211. C. Monat, P. Domachuk, and B. J. Eggleton, Nature Photonics 1, 106-114 (2007).
212. D. M. Brunette, P. Tengvall, M. Textor, and P. Thomsen, (eds.), Titanium in Medicine: Material Science, Surface Science, Engineering, Biological Responses and Medical Applications (Springer, Berlin, 2001).
213. A. Y. Vorobyev and C. Guo, Proc. SPIE 7203, 72030O (2009).
214. A. Ranella, M. Barberoglou, S. Bakogianni, C. Fotakis, and E. Stratakis, Acta Biomater. 6, 2711-2720 (2010).
215. E. L. Papadopoulou, A. Samara, M. Barberoglou, A. Manousaki, S. N. Pagakis, E. Anastasiadou, C. Fotakis, and E. Stratakis, Tissue Eng. C, Methods 16, 497-502 (2010).
216. Y. H. Jeong, H. C. Choe, and W. A. Brantley, Thin Solid Films 519, 4668-4675 (2011).
217. M. Erdogan, B. Oktem, H. Kalaycioglu, S. Yavas, P. Mukhopadhyay, K. Eken, Y. Aykac, U. H. Tazebay, and F. O. Ilday, Opt. Express 19, 10986-10996 (2011).
218. J. Yang, Y. Yang, B. Zhao, Y. Wang, and X. Zhu, Appl. Phys. B 106, 349-355 (2012).
219. T. Y. Hwang, A. Y. Vorobyev, and C. Guo, Opt. Express 19, A824-A829 (2011).
220. H. W. Chang, Y. C. Tsai, C. W. Cheng, C. Y. Lin, Y. W. Lin, and T. M. Wu, J. Colloid Interface, Sci. 360, 305-308 (2011).
221. T. F. Yao, P. H. Wub, T. M. Wub, C. W. Cheng, and S. Y. Yang, Microelectron. Eng. 88, 2908-2912 (2011).