Femtosecond laser-assisted three-dimensional microfabrication in silica

Optics Letters

Volumn 26, Issue 5, 2001, Pages 277-279

  Marcinkevičius, Andrius ^a   Juodkazis, Saulius ^a   Watanabe, Mitsuru ^a   Miwa, Masafumi ^a   Matsuo, Shigeki ^a   Misawa, Hiroaki ^a   Nishii, Junji ^b  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

^b OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FEMTOSECOND LASER PULSES;

ASPECT RATIO; ETCHING; INORGANIC ACIDS; LASER PULSES; SOLUTIONS;

FUSED SILICA;

EID: 0037489260     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.26.000277     Document Type: Article

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