Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses

Optics Letters

Volumn 26, Issue 23, 2001, Pages 1912-1914

  Li, Yan ^a   Itoh, Kazuyoshi ^a   Watanabe, Wataru ^a   Yamada, Kazuhiro ^a   Kuroda, Daisuke ^a   Nishii, Junji ^b   Jiang, Yongyuan ^c  

^a OSAKA UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FEMTOSECOND PULSES;

AMPLIFICATION; ASPECT RATIO; DRILLING; LASER PULSES; MICROMACHINING; SOLID STATE LASERS;

BOROSILICATE GLASS;

EID: 0002367898     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.26.001912     Document Type: Article

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