RF MEMS-CMOS device integration: An overview of the potential for RF researchers

IEEE Microwave Magazine

Volumn 14, Issue 1, 2013, Pages 39-56

  Mansour, Raafat R ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANALOG DEVICES; CAVENDISH KINETICS; DEVICE INTEGRATION; DIGITAL MICRO-MIRROR DEVICE; MICROMACHINING TECHNIQUES; MONOLITHIC INTEGRATION; RF-MEMS; RF-MEMS SWITCHES; SEMICONDUCTOR MANUFACTURING PROCESS; STMICROELECTRONICS; TEXAS INSTRUMENTS;

CMOS INTEGRATED CIRCUITS; ELECTROMECHANICAL DEVICES; MEMS; MICROPROCESSOR CHIPS; SEMICONDUCTOR DEVICE MANUFACTURE; SIGNAL PROCESSING;

ACCELEROMETERS;

EID: 84873358467     PISSN: 15273342     EISSN: None     Source Type: Journal    
DOI: 10.1109/MMM.2012.2226539     Document Type: Review

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