CMOS-MEMS atomic force microscope

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2610-2613

  Sarkar, N ^a   Mansour, R R ^a   Patange, O ^a   Trainor, K ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

Atomic Force Microscope; CMOS MEMS; electrothermal actuator; nanopositioning

Indexed keywords

3-D MEMS; AFM; ATOMIC FORCE MICROSCOPES; CMOS-MEMS; ELECTROTHERMAL ACTUATOR; FABRICATION PROCESS; IMAGE DISTORTIONS; NANO-POSITIONING; OFF-CHIP; PIEZOELECTRIC POSITIONING SYSTEM; POSITION SENSING; THERMAL DRIFTS;

ACTUATORS; ATOMIC FORCE MICROSCOPY; ELECTROSTATIC ACTUATORS; INTEGRATION; MICROSCOPES; MICROSYSTEMS;

SOLID-STATE SENSORS;

EID: 80052107046     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969836     Document Type: Conference Paper

References (6)

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2. Xu, Y. et al. "Integrated micro-scanning tunneling microscope" Appl. Phys. Lett. 67 (16), 1995.
3. D. Barrettino, et al., "CMOS Monolithic Atomic Force Microscope," 2004 Symposium On VLSl Circuits Digest of Technical Papers, pp. 306-309
4. Gilgunn, P.J.et al., "CMOS-MEMS Lateral Electrothermal Actuators," J. Microelectromech. Syst., 17 (2006), pp. 103-114.
5. Fedder. G. K., et al., "Technologies for Cofabricating MEMS and electronics,"Proc. IEEE, Vol. 96, No. 2, pp. 306-322, 2008.
6. Liu, J. et al., "Polysilicon sensors for CMOS-MEMS electrothermal probes," TRANSDUCERS, 2009, pp. 2425-2428.