Self-actuating scanning microwave microscopy probes

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2012, Pages

  Sarkar, Neil ^a   Azizi, Mostafa ^a   Fouladi, Siamak ^a   Mansour, R R ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

Microelectromechanical Systems (MEMS); Scanning Microwave Microscopy (SMM); Scanning Probe Microscopy (SPM)

Indexed keywords

AFM; APPROACH CURVE; ATOMIC FORCE MICROSCOPE (AFM); INTEGRATED MEMS; MATCHING NETWORKS; MEASUREMENT RESULTS; MEASUREMENT SENSITIVITY; MICROFABRICATED; MICROWAVE MICROSCOPY; MULTI-USER; OFF-CHIP; SCAN RANGE; SYSTEM DRIFT; TEST-BENCH;

ATOMIC FORCE MICROSCOPY; ELECTROMECHANICAL DEVICES; MEMS; PROBES; SEPARATION;

MICROWAVES;

EID: 84866786879     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2012.6259774     Document Type: Conference Paper

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