SCOPUS 정보 검색 플랫폼

ECS Transactions

Volumn 45, Issue 6, 2012, Pages 93-99

From MEMS-CMOS towards heterogeneous integration over scale

(3) Fujita, Hiroyuki a Toshiyoshi, Hiroshi a Ishida, Tadashi a

a INSTITUTE OF INDUSTRIAL SCIENCE (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHIP SCALE PACKAGES; ENERGY CONVERSION; FUNCTIONAL MATERIALS; INORGANIC COMPOUNDS; INTEGRATION; MICROSENSORS;

CHIP-SIZE SYSTEM; CMOS TECHNOLOGY; DEVICE PACKAGING; HETEROGENEOUS INTEGRATION; INORGANIC CHEMISTRY; MICROMACHINING TECHNOLOGIES; MORE THAN MOORE; MOVING MECHANISMS;

CMOS INTEGRATED CIRCUITS;

EID: 84869016221 PISSN: 19385862 EISSN: 19386737 Source Type: Conference Proceeding
DOI: 10.1149/1.3700942 Document Type: Conference Paper

Times cited : (1)

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