An integrated tunable band-pass filter using MEMS parallel-plate variable capacitors implemented with 0.35μm CMOS technology

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2007, Pages 505-508

  Fouladi, S ^a   Bakri Kassem, M ^a   Mansour, R R ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

CMOS; Integrated tunable filters; Microelectromechanical devices; RF MEMS; Tunable capacitors

Indexed keywords

BANDWIDTH; CAPACITORS; CMOS INTEGRATED CIRCUITS; INSERTION LOSSES; MEMS; MICROELECTROMECHANICAL DEVICES;

INTEGRATED TUNABLE FILTERS; QUALITY FACTOR;

BANDPASS FILTERS;

EID: 34748849558     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2007.380518     Document Type: Conference Paper

References (4)

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2. Y. C. Chiang, H. C. Chiu, and W. L. Hsieh, "Implementation of Second-order Ku-band Chip filter on Si Substrate with Commercial 0.18μm CMOS Technology," 2006 IEEE MTT-S Int. Microwave Symp. Dig. pp. 1249-1252, June 2006.
3. G. K. Fedder, and T. Mukherjee, 'Tunable RF and Analog Circuits Using On-Chip MEMS Passive Components," 2005 IEEE Solid-State Circuits Conf. Dig., vol. 1, pp. 390-391, February 2005.
4. A. Oz, and G. K. Fedder, "CMOS-compatible RF-MEMS Tunable Capacitors," 2003 IEEE MTT-S Int. Microwave Symp. Dig. pp. 97-100, June 2003.