A generalized foundry CMOS platform for capacitively-transduced resonators monolithically integrated with amplifiers

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 204-207

  Chen, Wen Chien ^a   Chen, Che Sheng ^b   Wen, Kuei Ann ^b   Fan, Long Sheng ^a   Fang, Weileun ^a   Li, Sheng Shian ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIER CIRCUITS; CMOS-MEMS; DESIGN FLEXIBILITY; FLEXIBLE DESIGNS; IC FABRICATION; MECHANICAL BOUNDARIES; MICROMECHANICAL RESONATOR; MONOLITHICALLY INTEGRATED; MULTI-USER; PERFORMANCE ENHANCEMENTS; RF APPLICATIONS; STRUCTURAL MATERIALS; VARIOUS CONFIGURATION;

BUILDING MATERIALS; ELECTRIC CONVERTERS; FOUNDRY PRACTICE; MECHANICAL ENGINEERING; MECHANICS; REACTIVE ION ETCHING; RESONATORS; TURNAROUND TIME;

CMOS INTEGRATED CIRCUITS;

EID: 77952770590     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442531     Document Type: Conference Paper

References (10)

1. C. T.-C. Nguyen, Trans. Ultrason., Ferroelect., Freq. Contr., vol. 54, no. 2, pp. 251-270, 2007.
2. T. Core, et al., Tech. Digest, Solid State Technology, pp. 39-44, 1993.
3. C. T.-C. Nguyen, et al., J. Solid-State Circuits, vol. 34, no. 4, pp. 440-455, April 1999.
4. J. H. Smith, et al., Tech. Digest, IEDM'95, pp. 609-612, 1995.
5. A. B. Graham, et al., Tech. Digest, MEMS'09, Sorrento, Italy, pp. 23-26, 2009.
6. W.-L. Huang, et al., Tech. Digest, MEMS'08, Tucson, Arizona, pp. 10-13, 2008.
7. J. Costa, et al., Tech. Digest, Hilton Head'08, Hilton Head Island, South Carolina, pp. 18-21, 2008.
8. C. Lo, et al., Tech. Digest, Transducers'05, Seoul, Korea, pp. 2074-2077, 2005.
9. J. Teva, et al., Tech. Digest, MEMS'08, Tucson, Arizona, USA, pp. 82-85, 2008.
10. K. Wang, et al., J. Microelectromech. Syst., vol. 9, no. 3, pp. 347-360, Sept. 2000.