CMOS integrated digital RF MEMS capacitors

2011 IEEE 11th Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 2011 - Digest of Papers

Volumn , Issue , 2011, Pages 173-176

  Natarajan, Saravana P ^a   Cunningham, Shawn J ^a   Morris III, Arthur S ^a   Dereus, Dana R ^a  

^a Wispry Inc   (United States)

Author keywords

MEMS; MEMS capacitors; MEMS tuners; Mobile phone tuners; RF CMOS; Variable capacitors

Indexed keywords

CELL PHONE; DIGITAL RF; FLIP CHIP; HIGH QUALITY FACTORS; MASS PRODUCTION; MEMS CAPACITORS; PORTABLE WIRELESS DEVICE; RF-CMOS; RF-MEMS; SELF RESONANT FREQUENCY; SUPPLY VOLTAGES; TUNING RATIO; VARIABLE CAPACITORS;

BANDPASS FILTERS; CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUITS; INTEGRATION; MOBILE PHONES; NATURAL FREQUENCIES; RADIOFREQUENCY SPECTROSCOPY; TELEPHONE; TELEPHONE SETS; TUNERS; TUNING;

CAPACITORS;

EID: 79952848513     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SIRF.2011.5719327     Document Type: Conference Paper

References (6)

1. G. M. Rebeiz, RF MEMS Theory, Design, and Technology, J.Wiley and Sons, 2003.
2. J. Reinke, A. Jajoo, L. Wang, G. Fedder, T. Mukherjee, "CMOS-MEMS variable capacitors with low parasitic capacitance for frequency-reconfigurable RF circuits," Proc. 2009 IEEE Radio Frequency Integrated Circuits Symposium, pp.509-512.
3. M. Bakri-Kassem, S.Fouladi and R.R. Mansour, "Novel High-Q Curled- Plate Variable Capacitors Fabricated in 0.35- μm CMOS Technology, IEEE Trans. Microwave Theory and Techniques, vol. 56, no. 2, pp. 530-541, Feb. 2008.
4. L. Gi, X. Li, "Variable Capacitors and Tunable LC -Tanks Formed by CMOS-Compatible Metal", Proc. IEEE Electron Devices Meeting, pp. 427-430, 2007.
5. th Intl. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, pp. 335-337, 2005.
6. A. Oz, G. K. Fedder, "RF CMOS-MEMS capacitor having large tuning range," Proc. 12th International Conference on Solid-State Sensors, Actuators and Microsystems, vol.1, pp. 851-854, 2003.