Temperature compensation in integrated CMOS-MEMS scanning probe microscopes

Micro and Nano Letters

Volumn 7, Issue 4, 2012, Pages 297-300

  Sarkar, N ^a   Trainor, K ^a   Mansour, R R ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED-LOOP CONTROL; CMOS-MEMS; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; ELECTRO-THERMAL ACTUATORS; ELECTROTHERMAL ACTUATION; IMAGE DISTORTIONS; MULTIPLE IMAGING; OFF-CHIP; ON CHIPS; OPEN LOOPS; PARASITIC EFFECT; PIEZOELECTRIC POSITIONING SYSTEM; PIEZORESISTIVE FORCE SENSORS; POSITION SENSING; SCANNER DESIGNS; SCANNING PROBE MICROSCOPE; TEMPERATURE COMPENSATION; THERMAL DRIFTS; THREE-AXIS;

ELECTROMECHANICAL DEVICES; ELECTROSTATIC ACTUATORS; MEMS; SCANNING;

INTEGRATION;

SILICON DIOXIDE;

ARTICLE; GEOMETRY; KNOWLEDGE; MICROELECTROMECHANICAL SYSTEM; NANOFABRICATION; PIEZOELECTRICITY; SCANNING PROBE MICROSCOPY; SEMICONDUCTOR; SENSOR; TEMPERATURE; THERMAL ANALYSIS; THREE DIMENSIONAL IMAGING;

EID: 84860577831     PISSN: None     EISSN: 17500443     Source Type: Journal    
DOI: 10.1049/mnl.2011.0470     Document Type: Article

References (10)

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