CMOS-MEMS 3-bit digital capacitors with tuning ratios greater than 60:1

IEEE Transactions on Microwave Theory and Techniques

Volumn 59, Issue 5, 2011, Pages 1238-1248

  Reinke, John ^a   Fedder, Gary K ^a   Mukherjee, Tamal ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Actuators; capacitive microelectromechanical systems (MEMS) switches; integrated systems; microelectromechanical systems (MEMS); reconfigurable circuits; RF MEMS

Indexed keywords

CAPACITIVE MICROELECTROMECHANICAL SYSTEMS (MEMS) SWITCHES; INTEGRATED SYSTEMS; MICROELECTROMECHANICAL SYSTEMS; RECONFIGURABLE CIRCUITS; RF-MEMS;

CAPACITORS; CMOS INTEGRATED CIRCUITS; DIGITAL INTEGRATED CIRCUITS; DIGITAL RADIO; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; INTEGRATION; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; TUNING;

COMPOSITE MICROMECHANICS;

EID: 79955948083     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2011.2114363     Document Type: Conference Paper

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