BEOL embedded RF-MEMS switch for mm-wave applications

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2009, Pages

  Kaynak, M ^a   Ehwald, K E ^a   Drews, J ^a   Scholz, R ^a   Korndorfer F ^a   Knoll, D ^a   Tillack, B ^a   Barth, R ^a   Birkholz, M ^a   Schulz, K ^a   Sun, Y M ^a   Wolansky, D ^a   Leidich, S ^b   Kurth, S ^b   Gurbuz, Y ^c  

^a IHP   (Germany)

^b FRAUNHOFER INSTITUTE FOR ELECTRONIC NANO SYSTEMS ENAS   (Germany)

^c SABANCI UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

BACK END OF LINES; BI-CMOS; CAPACITANCE RATIO; CAPACITIVE SWITCH; DUAL-BAND; FREQUENCY RANGES; MM-WAVE; MM-WAVE APPLICATION; MM-WAVE FREQUENCIES; PERFORMANCE DEGRADATION; RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS; RF DESIGN; RF-MEMS; RF-MEMS SWITCHES; SINGLE CHIPS; STATE-OF-THE-ART PERFORMANCE; SWITCHING CYCLES; VOLTAGE CONTROLLED OSCILLATOR;

COMPOSITE MICROMECHANICS; DIELECTRIC MATERIALS; ELECTRIC SWITCHES; ELECTRON DEVICES; EMBEDDED SYSTEMS; MEMS; MICROELECTROMECHANICAL DEVICES;

MILLIMETER WAVES;

EID: 77952383150     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2009.5424219     Document Type: Conference Paper

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