Distributed MEMS tunable impedance-matching network based on suspended slow-wave structure fabricated in a standard CMOS technology

IEEE Transactions on Microwave Theory and Techniques

Volumn 58, Issue 4, 2010, Pages 1056-1064

  Fouladi, Siamak ^a   Domingue, Frédéric ^b   Zahirovic, Nino ^a   Mansour, Raafat R ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

^b UNIVERSITÉ DU QUÉBEC À TROIS RIVIÈRES   (Canada)

Author keywords

CMOS microelectromechanical systems (CMOS MEMS) integration; RF MEMS; Slow wave transmission lines; Tunable impedance matching networks

Indexed keywords

CMOS-MEMS; IMPEDANCE-MATCHING NETWORK; MICRO ELECTRO MECHANICAL SYSTEM; RF MEMS; SLOW WAVE; TRANSMISSION LINE;

ANTENNA PHASED ARRAYS; BANDPASS FILTERS; CMOS INTEGRATED CIRCUITS; COPLANAR WAVEGUIDES; ELECTRIC LINES; FREQUENCY BANDS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; STANDARDS; SWITCHING CIRCUITS; TRANSMISSION LINE THEORY; WAVE PROPAGATION; WAVE TRANSMISSION;

COMPOSITE MICROMECHANICS;

EID: 77951170209     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2010.2042511     Document Type: Article

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