Forced oscillation and higher harmonic detection in an integrated CMOS-MEMS scanning probe microscope

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2012, Pages 307-310

  Sarkar, N ^a   Mansour, R R ^a   Trainor, K ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; CMOS INTEGRATED CIRCUITS; MICROSYSTEMS; SCANNING;

CHIP DESIGN; FORCED OSCILLATIONS; HIGHER HARMONICS; INTERMITTENT CONTACT MODES; INTERMITTENT-CONTACTS; MULTIPLE MODES OF OPERATION; THERMAL COUPLING; THERMAL PROFILING;

SOLID-STATE SENSORS;

EID: 84944678241     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2012.82     Document Type: Conference Paper

References (13)

1. N. Sarkar et. al., "CMOS-MEMS Atomic Force Microscope," TRANSDUCERS 2011, pp. 2610-2613.
2. Akamine, S. et al.,"Microfabricated Scanning Tunneling Microscope," IEEE Electron Device Letters, V. 10, No 11, 1989.
3. Xu, Y. et al. "Integrated micro-scanning tunneling microscope," Appl. Phys. Lett. 67 (16), 1995.
4. D. Barrettino, et al., "CMOS Monolithic Atomic Force Microscope," 2004 Symposium On VLSl Circuits Digest of Technical Papers, pp. 306-309.
5. http://www.akiyamaprobe.com
6. Gianchandani, Y. B. et al, "A Silicon Micromachined Scanning Thermal Profiler with Integrated Elements for Sensing and Actuation," IEEE Trans. Elec. Dev., v 44, no 11, pp 1857-1868.
7. Baltes, Brand, Fedder, Hierold, Korvink, Tabata, "CMOS-MEMS," volume 2, Wiley, 2004.
8. Lange, Brand, Baltes, "CMOS Cantilever Sensor Systems," Springer, 2002.
9. Gilgunn, P.J. et al., "CMOS-MEMS Lateral Electrothermal Actuators," J. Microelectromech. Syst., 17 (2006), pp. 103-114.
10. Senturia, S.D., "Microsystem Design," Kluwer, 2001.
11. Todd, S. et. al., "An electrothermomechanical lumped element model of an electrothermal bimorph actuator," J. Microelectromech. Syst., 17, (2008), pp. 213-225.
12. Sahin, O. et al, Springer Handbook of Nanotechnology, p. 717, 2007.
13. "High-speed tapping mode imaging with active Q-control for AFM," T. Sulchek et. al., Appl. Phys. Lett. 76 (1473), 2000.