Capacitive RF MEMS switches fabricated in standard 0.35-μm CMOS technology

IEEE Transactions on Microwave Theory and Techniques

Volumn 58, Issue 2, 2010, Pages 478-486

  Fouladi, Siamak ^a   Mansour, Raafat R ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

Capacitive switches; CMOS microelectromechanical systems (MEMS) integration; Millimeter wave CMOS; RF MEMS switches; Silicon monolithic integrated circuits

Indexed keywords

CAPACITIVE SWITCH; CMOS MICROELECTROMECHANICAL SYSTEMS (MEMS) INTEGRATION; CMOS RF; MICROELECTROMECHANICAL SYSTEMS;

BANDPASS FILTERS; CAPACITANCE; COMPOSITE MEMBRANES; COMPOSITE MICROMECHANICS; COMPUTER CRIME; ELECTRIC SWITCHES; ELECTROSTATIC ACTUATORS; FABRICATION; FREQUENCY BANDS; INTEGRATED CIRCUITS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MILLIMETER WAVE DEVICES; MILLIMETER WAVES; PLATES (STRUCTURAL COMPONENTS); STANDARDS; WEAVING;

CMOS INTEGRATED CIRCUITS;

EID: 76849102304     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2009.2038446     Document Type: Article

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