High-Q integrated CMOS-MEMS resonators with deep-submicrometer gaps and quasi-linear frequency tuning

Journal of Microelectromechanical Systems

Volumn 21, Issue 3, 2012, Pages 688-701

  Chen, Wen Chien ^a   Fang, Weileun ^a   Li, Sheng Shian ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Capacitive transduction; CMOS MEMS; frequency tuning; micromechanical resonator; monolithic integration; RF MEMS; temperature compensation

Indexed keywords

CAPACITIVE TRANSDUCTION; CMOS-MEMS; FREQUENCY-TUNING; MONOLITHIC INTEGRATION; RF-MEMS; TEMPERATURE COMPENSATION;

CRYSTAL RESONATORS; MICROMECHANICAL RESONATORS; MONOLITHIC INTEGRATED CIRCUITS;

MICROELECTROMECHANICAL DEVICES;

EID: 84861908976     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2189360     Document Type: Article

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