RF CMOS-MEMS switch with low-voltage operation for single-chip RF LSIs

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2006, Pages

  Kuwabara, K ^a   Sato, N ^a   Shimamura, T ^a   Morimura, H ^a   Kodate, J ^a   Sakata, T ^a   Shigematsu, S ^a   Kudou, K ^b   Machida, K ^b   Nakanishi, M ^a   Ishii, H ^a  

^a NTT CORPORATION   (Japan)

^b NTT Advanced Technology Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHIP SCALE PACKAGES; COMPOSITE MICROMECHANICS; ELECTRIC SWITCHES; ELECTRON DEVICES; ELECTRONIC EQUIPMENT MANUFACTURE; ELECTRONICS PACKAGING; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; THICK FILMS;

CONTROL CIRCUITS; LOW-VOLTAGE OPERATIONS; MECHANICAL RELIABILITY; RF-CMOS; RF-MEMS SWITCHES; SINGLE CHIPS; SUPPLY VOLTAGES; WAFER LEVELS;

SWITCHES;

EID: 46049091598     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2006.346891     Document Type: Conference Paper

References (7)

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