A CMOS compatible back end MEMS switch for logic functions

2010 IEEE International Interconnect Technology Conference, IITC 2010

Volumn , Issue , 2010, Pages

  Joshi, Vikram ^a   Khieu, Cong ^a   Smith, Charles G ^a   Schepens, Cor ^a   Csaszar, Farkas ^a   Lacey, Damian ^a   Nagata, Toshi ^a   Renault, Mickael ^a   Van Kampen, Rob ^a   Knipe, Richard ^a   Yost, Dennis ^a  

^a Cavendish Kinetics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS COMPATIBLE; CMOS PROCESSS; DIELECTRIC SPACERS; LATERAL DIMENSION; LOGIC FUNCTIONS; MEMS SWITCHES; METALLIZATIONS; RESTORING FORCES; ROCKER SWITCHES; SUBMICRON;

CMOS INTEGRATED CIRCUITS;

ELECTRIC SWITCHES;

EID: 77955593076     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IITC.2010.5510694     Document Type: Conference Paper

References (3)

1. Beunder MA, Kampen RV, Lacey D, Renault M, Smith CG. "A new embedded NVM technology for low power, high temperature, rad hard applications." Proc Non-volatile Memory Tech Symp pp 65-8, 2005
2. Joshi et al, "A non volatile MEMS switch for harsh environment memory applications." IMAPS International Conference on High Temperature Electronics Network (HiTEN), Oxford, UK, 2009
3. G.M. Rebeiz, "RF MEMS Theory, Design, and Technology". New York: Wiley, 2003