Tunable capacitor series/shunt design for integrated tunable wireless front end applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 805-808

  De Reus, D R ^a   Natarajan, S ^a   Cunningham, S J ^a   Morris, A S ^a  

^a Wisrpy Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITOR STRUCTURES; CMOS TECHNOLOGY; FRONT END; MEMS CAPACITORS; METAL COMPOSITES; METAL-OXIDE; MONOLITHICALLY INTEGRATED; RF-MEMS; SHUNT CAPACITORS; TEMPERATURE COEFFICIENT; TUNABLE CAPACITORS;

CMOS INTEGRATED CIRCUITS; DESIGN; MECHANICAL ENGINEERING; MECHANICS; MEMS; REACTIVE ION ETCHING;

CAPACITORS;

EID: 79953795122     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734547     Document Type: Conference Paper

References (8)

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