Wideband CMOS compatible capacitive MEMS switch for RF applications

IEEE Microwave and Wireless Components Letters

Volumn 18, Issue 9, 2008, Pages 599-601

  Zhang, Shumin ^b   Su, Wansheng ^b   Zaghloul, Mona ^a,c   Thibeault, Brian ^a,d  

^a IEEE

^b HUGHES NETWORK SYSTEMS   (United States)

^c The George Washington University   (United States)

^d University of California   (United States)

Author keywords

Capacitive shunt switch; CMOS; Micorelectromechanical system (MEMS) switch; Radio frequency (RF) MEMS

Indexed keywords

BANDPASS FILTERS; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; MEMS; MICROELECTROMECHANICAL DEVICES; NETWORKS (CIRCUITS); OPTICAL DESIGN; REACTIVE ION ETCHING;

CAPACITIVE COUPLINGS; CAPACITIVE SHUNT SWITCH; CMOS; CMOS PROCESSING; CMOS-COMPATIBLE; INSERTION LOSSES; MASKLESS; MATCHING NETWORKS; MEASUREMENT RESULTS; MEMS SWITCHES; MICORELECTROMECHANICAL SYSTEM (MEMS) SWITCH; MICROELECTROMECHANICAL SYSTEM SWITCH; POST-PROCESSING; RADIO FREQUENCY (RF)-MEMS; RADIO-FREQUENCY; RECONFIGURABLE RF CIRCUITS; RF APPLICATIONS; VOLTAGE-CONTROLLED OSCILLATORS; WIDE BANDS;

SWITCHING CIRCUITS;

EID: 52049096399     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2008.2002455     Document Type: Article

References (11)

1. G. M. Rebeiz and J. B. Muldavin, "RF MEMS switches and switch circuits," IEEE Microw. Mag., vol. 2, no. 4, pp. 59-71, Dec. 2001.
2. J. Kiriazi, H. Ghali, H. Ragaie, and H. Haddara, "Reconfigurable dual-band dipole antenna on silicon using series MEMS switches," in IEEE Antennas Propagat. Soc. Int. Symp., Jun. 2003, vol. 1, pp. 403-406.
3. L. Zhou, K. S. Satish, and K. K. Samuel, "Reconfigurable microstrip rectangular loop antennas using RF MEMS switches,." Microw. Opt. Technol. Lett., vol. 1, no. 50, pp. 252-256, 2008.
4. D. John, P. Calvin, and T. Niall, "Using MEMS capacitive switches in tunable RF amplifiers," EURASIP J. Wireless Commun. Netw., vol. 2, pp. 21-21, 2006.
5. R. G. Polcawich et al., "Surface micromachined microelectromechancial ohmic series switch using thin-film piezoelectric actuators," IEEE Trans. Microw. Theory Tech., vol. 55, no. 12, pp. 2642-2654, Dec. 2007.
6. N. E. McGruer, G. G. Adams, L. Chen, Z.J. Guo, and Y. Du. "Mechanical, thermal, and material influences on ohmic-contact-type MEMS switch operation," in Proc. IEEE Micro Electro Mechanical Syst., 2006, pp. 230-233.
7. D. Saias et al., "An above IC MEMS RF switch," IEEE J. Solid-State Circuits, vol. 12, no. 38, pp. 2318-2324, Dec. 2003.
8. G. David, P. Lluís, L. Antonio, and N. Alvar, " Electrothermally-actuated RF-MEMS suspended parallel switch," Microw. Opt. Technol. Lett., vol. 12, no. 49, pp. 2894-2896, 2007.
9. M. Daneshmand, W. D. Yan, and R. R. Mansour, "Thermally actuated multiport RF MEMS switches and their performance in a vacuumed environment," IEEE Trans. Microw. Theory Tech., vol. 55, no. 6, pp. 1229-1236, Jun. 2007.
10. Z. Shumin, S. Wansheng, and E. Z. Mona, "Low noise wideband CMOS voltage controlled oscillator using MEMS switch technology," in Proc. Wireless Microw. Technol. Conf. (WAMICON), 2006, pp. 1-5.
11. S.J. Lammerink et al., "Performance of thermally excited resonators," Sensors Act. A: Phys., vol. 1-3, no. 21, pp. 352-356, 1990.