CMOS-MEMS variable capacitors using electrothermal actuation

Journal of Microelectromechanical Systems

Volumn 19, Issue 5, 2010, Pages 1105-1115

  Reinke, John ^a   Fedder, Gary K ^a   Mukherjee, Tamal ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Actuators; capacitors; integrated circuits; microelectromechanical devices; varactors

Indexed keywords

AMBIENT TEMPERATURES; CAPACITANCE VALUES; CMOS-MEMS; ELECTROTHERMAL ACTUATION; MICRO-ELECTRO-MECHANICAL; MONOLITHICALLY INTEGRATED; POST-CMOS; RELIABILITY TESTING; SELF RESONANT FREQUENCY; TUNING RATIO; VARIABLE CAPACITOR;

ACTUATORS; CAPACITANCE; INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; MONOLITHIC INTEGRATED CIRCUITS; NATURAL FREQUENCIES; TUNING; VARACTORS;

CAPACITORS;

EID: 77957593436     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2067197     Document Type: Article

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