Piezotransduced single-crystal silicon BAW resonators

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 1653-1656

  Jaakkola, Antti ^a   Rosenberg, Piia ^a   Nurmela, Arto ^a   Pensala, Tuomas ^a   Riekkinen, Tommi ^a   Dekker, James ^a   Mattila, Tomi ^a   Alastalo, Ari ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM COMPOUNDS; LIGHT METALS; NITRIDES; NONMETALS; OPTICAL DESIGN; POWDERS; SILICON; ULTRASONICS;

ALUMINUM NITRIDE LAYER; BAW RESONATORS; MOTIONAL RESISTANCE; QUALITY FACTOR; SINGLE-CRYSTAL-SILICON; TRANSDUCTION MECHANISM;

RESONATORS;

EID: 48149115479     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.416     Document Type: Conference Paper

References (11)

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