Piezoelectrically transduced single-crystal-silicon plate resonators

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2008, Pages 717-720

  Jaakkola, Antti ^a   Rosenberg, Piia ^a   Asmala, Samuli ^a   Nurmela, Arto ^a   Pensala, Tuomas ^a   Riekkinen, Tommi ^a   Dekker, James ^a   Mattila, Tomi ^a   Alastalo, Ari ^a   Holmgren, Olli ^b   Kokkonen, Kimmo ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

BULK ACOUSTIC WAVES; EIGEN MODES; MOTIONAL RESISTANCE; SCANNING LASER INTERFEROMETRIES; SINGLE CRYSTAL SILICON; SQUARE-EXTENSIONAL MODES;

ACOUSTIC RESONATORS; ACOUSTICS; LASER INTERFEROMETRY; LASER RESONATORS;

RESONATORS;

EID: 67649312571     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2008.0171     Document Type: Conference Paper

References (10)

1. R. Abdolvand and F. Ayazi, "Enhanced power handling and quality factor in thin-film piezoelectric-on-substrate resonators," in IEEE Ultrasonics Symposium, pp. 608-611, 2007.
2. A. Jaakkola, P. Rosenberg, A. Nurmela, T. Pensala, T. Riekkinen, J. Dekker, T. Mattila, and A. Alastalo, "Piezotransduced Single-Crystal Silicon BAW Resonators," in IEEE Ultrasonics Symposium, pp. 1653-1656, 2007.
3. V. Kaajakari, J. Kiihamäki, A. Oja, S. Pietikäinen, V. Kokkala, and H. Kuisma, "Stability of wafer level vacuum encapsulated single-crystal silicon resonators," Sensors & Actuators: A. Physical, vol.130, pp. 42-47, 2006. (Pubitemid 44037308)
4. V. Kaajakari, T. Mattila, A. Oja, J. Kiihamäki, and H. Seppä, "Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications," IEEE Electron Device Letters, vol.25, no. 4, pp. 173-175, 2004.
5. J. Knuuttila, P. Tikka, and M. Salomaa, "Scanning Michelson interferometer for imaging surface acoustic wave fields," Optics Letters, vol.25, no. 9, pp. 613-615, 2000.
6. V. Kaajakari, A. Alastalo, and T. Mattila, "Electrostatic transducers for micromechanical resonators: free space and solid dielectric," IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol.53, no. 12, pp. 2484-2489, 2006. (Pubitemid 46103994)
7. B. Auld, Acoustic fields and waves in solids. Wiley New York, 1973.
8. H. Luoto, K. Henttinen, T. Suni, J. Dekker, J. Mäkinen, and A. Torkkeli, "Mems on cavity-soi wafers," Solid-State Electronics, vol.51, pp. 328-332, 2007. (Pubitemid 46330467)
9. O. Holmgren, K. Kokkonen, T. Mattila, V. Kaajakari, A. Oja, J. Kiihamaki, J. Knuuttila, and M. Salomaa, "Visualization of in-and out-of-plane vibrations in a micromechanical RF-resonator," in IEEE Ultrasonics Symposium, vol.2, 2004.
10. O. Holmgren, K. Kokkonen, T. Mattila, V. Kaajakari, A. Oja, J. Kiihamaki, J. Knuuttila, and M. Salomaa, "Imaging of in-and out-of-plane vibrations in micromechanical resonator," Electronics Letters, vol.41, no. 3, pp. 121-122, 2005. (Pubitemid 40285649)