Piezoelectrically actuated micromechanical BAW resonators

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2008, Pages 2181-2184

  Rosenberg, Piia ^a   Jaakkola, Antti ^a   Dekker, James ^a   Nurmela, Arto ^a   Pensala, Arto ^a   Asmala, Samuli ^a   Riekkinen, Tommi ^a   Mattila, Tomi ^a   Alastalo, Ari ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE LAYER; ANCHOR LOSS; BAW RESONATOR; BEAM WIDTHS; IN-VACUUM; MICRO-MECHANICAL; QUALITY FACTORS; SILICON BEAMS;

ALUMINA; ALUMINUM NITRIDE; NITRIDES;

RESONATORS;

EID: 67649307398     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2008.0540     Document Type: Conference Paper

References (12)

1. John R Vig and Arthur Ballato: Frequency Control Devices; From Ultrasonic Instruments and Devices 1999, Academic Press, Inc.; pp. 637-664
2. Clark T.-C. Nguyen: MEMS Technology for Timing and Frequency Control; IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control; Vol.54, No. 2, February 2007, pp. 251-270
3. http://www.sitime.com/
4. http://www.discera.com/
5. Antti Jaakkola, Piia Rosenberg, Arto Nurmela, Tuomas Pensala, Tommi Riekkinen, James Dekker, Tomi Mattila, and Ari Alastalo: Piezotransduced Single-Crystal Silicon BAW Resonators; 2007 IEEE International Ultrasonics Symposium, pp. 1653-1656
6. Reza Abdolvand, Farrokh Ayazi: Enhanced Power Handling and Quality Factor in Thin-Film Piezoelectric-on-Substrate Resonators; 2007 IEEE International Ultrasonics Symposium, pp. 608-611
7. Gianluca Piazza, Reza Abdolvand, Gavin K. Ho, Farrokh Ayazi: Voltagetunable piezoelectrically-transduced single-crystal silicon micromechanical resonators; Sensors and Actuators A 111 (2004), pp. 71-78
8. Shweta Humad, Reza Abdolvand, Gavin K. Ho, Gianluca Piazza and Farrokh Ayazi: High frequency micromechanical piezo-on-silicon block resonators; Electron Devices Meeting, 2003, pp. 39.3.1 - 39.3.4
9. Ville Kaajakari, Ari T. Alastalo, and Tomi Mattila: Correspondence: Electrostatic Transducers for Micromechanical Resonators: Free Space and Solid Dielectrics; IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control; Vol.53, No. 12, December 2006, pp. 2484-2489 (Pubitemid 46103994)
10. http://www.ioffe.rssi.ru/SVA/NSM/Semicond/ AlN/magnetic.html (28.8.2008)
11. David S. Bindel and Sanjay Govindjee: Elastic PMLs for resonator anchor loss simulation; International Journal for Numerical Methods in Engineering(2005), Vol.64, pp. 789-818 (Pubitemid 41444698)
12. Hannu Luoto, Kimmo Henttinen, Tommi Suni, James Dekker, Jari Mkinen, Altti Torkkeli: MEMS on cavity-SOI wafers; Solid-State Electronics 51 (2007), pp.328-332 2184 (Pubitemid 46330467)