메뉴 건너뛰기




Volumn 64, Issue 6, 2005, Pages 789-818

Elastic PMLs for resonator anchor loss simulation

Author keywords

Anchor loss; High Q; Perfectly matched layer; Resonator loss; Semi infinite half space

Indexed keywords

CONVERGENCE OF NUMERICAL METHODS; DAMPING; ELASTIC WAVES; ELASTICITY; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; NUMERICAL METHODS; THERMOELASTICITY;

EID: 26844573883     PISSN: 00295981     EISSN: None     Source Type: Journal    
DOI: 10.1002/nme.1394     Document Type: Article
Times cited : (147)

References (48)
  • 2
    • 0003532560 scopus 로고    scopus 로고
    • Kluwer Academic Publishers: Norwell, MA
    • Senturia S. Microsystem Design. Kluwer Academic Publishers: Norwell, MA, 2001.
    • (2001) Microsystem Design
    • Senturia, S.1
  • 6
    • 0242468690 scopus 로고    scopus 로고
    • Modified Reynolds' equation and analytical analysis of squeeze-film air damping of perforated structures
    • Bao M, Yang H, Sun Y, French PJ. Modified Reynolds' equation and analytical analysis of squeeze-film air damping of perforated structures. Journal of Micromechanics and Microengineering 2003; 13:795-800.
    • (2003) Journal of Micromechanics and Microengineering , vol.13 , pp. 795-800
    • Bao, M.1    Yang, H.2    Sun, Y.3    French, P.J.4
  • 11
    • 0000018940 scopus 로고    scopus 로고
    • Thermoelastic damping in micro- and nanomechanical systems
    • Lifshitz R, Roukes ML. Thermoelastic damping in micro- and nanomechanical systems. Physical Review B 2000; 61:5600-5609.
    • (2000) Physical Review B , vol.61 , pp. 5600-5609
    • Lifshitz, R.1    Roukes, M.L.2
  • 12
    • 0036772239 scopus 로고    scopus 로고
    • Thermoelastic damping in fine-grained polysilicon flexural beam resonators
    • Srikar VT, Senturia SD. Thermoelastic damping in fine-grained polysilicon flexural beam resonators. Journal of Microelectromechanical Systems 2002; 11:499-504.
    • (2002) Journal of Microelectromechanical Systems , vol.11 , pp. 499-504
    • Srikar, V.T.1    Senturia, S.D.2
  • 13
    • 25744459153 scopus 로고
    • Internal friction in solids I: Theory of internal friction in reeds
    • Zener C. Internal friction in solids I: theory of internal friction in reeds. Physical Review 1937; 52: 230-235.
    • (1937) Physical Review , vol.52 , pp. 230-235
    • Zener, C.1
  • 14
    • 0003168583 scopus 로고
    • Internal friction in solids II: General theory of thermoelastic internal friction
    • Zener C. Internal friction in solids II: general theory of thermoelastic internal friction. Physical Review 1938; 53:90-99.
    • (1938) Physical Review , vol.53 , pp. 90-99
    • Zener, C.1
  • 15
    • 0003168584 scopus 로고
    • Internal friction in solids III: Experimental demonstration of thermoelastic internal friction
    • Zener C, Otis W, Nuckolls R. Internal friction in solids III: experimental demonstration of thermoelastic internal friction. Physical Review 1938; 53:100-101.
    • (1938) Physical Review , vol.53 , pp. 100-101
    • Zener, C.1    Otis, W.2    Nuckolls, R.3
  • 16
    • 26844451170 scopus 로고    scopus 로고
    • An investigation of MEMS anchor design for optimal stiffness and damping
    • Technical Report, University of California, Department of Mechanical Engineering, (M.S. Report)
    • Sherman D. An investigation of MEMS anchor design for optimal stiffness and damping. Technical Report, University of California, Department of Mechanical Engineering, 1996 (M.S. Report).
    • (1996)
    • Sherman, D.1
  • 17
    • 1942436710 scopus 로고    scopus 로고
    • High-fidelity modeling of MEMS resonators - Part 1: Anchor loss mechanisms through substrate
    • Park Y-H, Park KC. High-fidelity modeling of MEMS resonators-Part 1: anchor loss mechanisms through substrate. Journal of Microelectromechanical Systems 2004; 13:248-257.
    • (2004) Journal of Microelectromechanical Systems , vol.13 , pp. 248-257
    • Park, Y.-H.1    Park, K.C.2
  • 18
    • 1942436710 scopus 로고    scopus 로고
    • High-fidelity modeling of MEMS resonators-part II: Coupled beam-substrate dynamics and validation
    • Park Y-H, Park KC. High-fidelity modeling of MEMS resonators-part II: coupled beam-substrate dynamics and validation. Journal of Microelectromechanical Systems 2004; 13:248-257.
    • (2004) Journal of Microelectromechanical Systems , vol.13 , pp. 248-257
    • Park, Y.-H.1    Park, K.C.2
  • 20
    • 84966208271 scopus 로고
    • Absorbing boundary conditions for the numerical simulation of waves
    • Engquist B, Majda A. Absorbing boundary conditions for the numerical simulation of waves. Mathematics of Computation 1977; 31:629-651.
    • (1977) Mathematics of Computation , vol.31 , pp. 629-651
    • Engquist, B.1    Majda, A.2
  • 22
    • 0034327263 scopus 로고    scopus 로고
    • Infinite elements for wave problems: A review of current formulations and an assessment of accuracy
    • Astley RJ. Infinite elements for wave problems: a review of current formulations and an assessment of accuracy. International Journal for Numerical Methods in Engineering 2000; 49:951-976.
    • (2000) International Journal for Numerical Methods in Engineering , vol.49 , pp. 951-976
    • Astley, R.J.1
  • 23
    • 0037436477 scopus 로고    scopus 로고
    • Perfectly matched layers for time-harmonic elastodynamics of unbounded domains: Theory and finite-element implementation
    • Basu U, Chopra A. Perfectly matched layers for time-harmonic elastodynamics of unbounded domains: theory and finite-element implementation. Computer Methods in Applied Mechanics and Engineering 2003; 192:1337-1375.
    • (2003) Computer Methods in Applied Mechanics and Engineering , vol.192 , pp. 1337-1375
    • Basu, U.1    Chopra, A.2
  • 24
    • 3042742341 scopus 로고    scopus 로고
    • 1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support
    • Boston
    • Wang J, Butler JE, Feygelson T, Nguyen CT-C. 1.51-GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating support. Proceedings of MEMS 2004, Boston, 2004; 641-644.
    • (2004) Proceedings of MEMS 2004 , pp. 641-644
    • Wang, J.1    Butler, J.E.2    Feygelson, T.3    Nguyen, C.T.-C.4
  • 26
    • 10844259666 scopus 로고    scopus 로고
    • Introduction to the special issue on absorbing boundary conditions
    • Turkel E. Introduction to the special issue on absorbing boundary conditions. Applied Numerical Mathematics 1998; 27:327-329.
    • (1998) Applied Numerical Mathematics , vol.27 , pp. 327-329
    • Turkel, E.1
  • 27
    • 1642325209 scopus 로고    scopus 로고
    • High-order local non-reflecting boundary conditions: A review
    • Givoli D. High-order local non-reflecting boundary conditions: a review. Wave Motion 2004; 39:319-326.
    • (2004) Wave Motion , vol.39 , pp. 319-326
    • Givoli, D.1
  • 28
    • 28044459877 scopus 로고
    • A perfectly matched layer for the absorption of electromagnetic waves
    • Bérenger J-P. A perfectly matched layer for the absorption of electromagnetic waves. Journal of Computational Physics 1994; 114:185-200.
    • (1994) Journal of Computational Physics , vol.114 , pp. 185-200
    • Bérenger, J.-P.1
  • 29
    • 0032203675 scopus 로고    scopus 로고
    • The perfectly matched layer in curvilinear coordinates
    • Collino, F, Monk P. The perfectly matched layer in curvilinear coordinates. SIAM Journal on Scientific Computing 1998; 19:2061-2090.
    • (1998) SIAM Journal on Scientific Computing , vol.19 , pp. 2061-2090
    • Collino, F.1    Monk, P.2
  • 30
    • 0032137824 scopus 로고    scopus 로고
    • Absorbing PML boundary layers for wave-like equations
    • Turkel E, Yefet A. Absorbing PML boundary layers for wave-like equations. Applied Numerical Mathematics 1998; 27:533-557.
    • (1998) Applied Numerical Mathematics , vol.27 , pp. 533-557
    • Turkel, E.1    Yefet, A.2
  • 31
    • 0034275357 scopus 로고    scopus 로고
    • Complex space approach to perfectly matched layers: A review and some new developments
    • Teixeira F, Chew W. Complex space approach to perfectly matched layers: a review and some new developments. International Journal of Numerical Modelling 2000; 13:441-455.
    • (2000) International Journal of Numerical Modelling , vol.13 , pp. 441-455
    • Teixeira, F.1    Chew, W.2
  • 32
    • 0035071437 scopus 로고    scopus 로고
    • Application of the perfectly matched absorbing layer model to the linear elastodynamic problem in anisotropic heterogeneous media
    • Collino F, Tsogka C. Application of the perfectly matched absorbing layer model to the linear elastodynamic problem in anisotropic heterogeneous media. Geophysics 2001; 66:294-307.
    • (2001) Geophysics , vol.66 , pp. 294-307
    • Collino, F.1    Tsogka, C.2
  • 33
    • 0035604025 scopus 로고    scopus 로고
    • Fictitious domains, mixed finite elements, and perfectly matched layers for 2d elastic wave propagation
    • Bécache E, Joly P, Tsogka C. Fictitious domains, mixed finite elements, and perfectly matched layers for 2d elastic wave propagation. Journal of Computational Acoustics 2001; 9:1175-1201.
    • (2001) Journal of Computational Acoustics , vol.9 , pp. 1175-1201
    • Bécache, E.1    Joly, P.2    Tsogka, C.3
  • 34
    • 19644366751 scopus 로고    scopus 로고
    • Mixed spectral finite elements for the linear elasticity system in unbounded domains
    • Cohen G, Fauqueux S. Mixed spectral finite elements for the linear elasticity system in unbounded domains. SIAM Journal on Scientific Computing 2005; 26(3):864-884.
    • (2005) SIAM Journal on Scientific Computing , vol.26 , Issue.3 , pp. 864-884
    • Cohen, G.1    Fauqueux, S.2
  • 35
    • 26844508238 scopus 로고    scopus 로고
    • Anisotropic perfectly matched layers for elastic waves in cartesian and curvilinear co-ordinates
    • Technical Report, MIT Earth Resources Laboratory, Available at
    • Zheng Y, Huang X. Anisotropic perfectly matched layers for elastic waves in cartesian and curvilinear co-ordinates. Technical Report, MIT Earth Resources Laboratory, 2002. Available at http://eaps.mit.edu/er1/ research/report1/reports.html
    • (2002)
    • Zheng, Y.1    Huang, X.2
  • 39
  • 40
    • 0034345540 scopus 로고    scopus 로고
    • Analytical and numerical studies of a finite element PML for the Helmholtz equation
    • Harari I, Slavutin M, Turkel E. Analytical and numerical studies of a finite element PML for the Helmholtz equation. Journal of Computational Acoustics 2000; 8:121-137.
    • (2000) Journal of Computational Acoustics , vol.8 , pp. 121-137
    • Harari, I.1    Slavutin, M.2    Turkel, E.3
  • 43
    • 2942653250 scopus 로고    scopus 로고
    • Algorithm 832: UMFPACK - An unsymmetric-pattern multifrontal method
    • Davis TA. Algorithm 832: UMFPACK-an unsymmetric-pattern multifrontal method. ACM Transactions on Mathematical Software 2004; 30:196-199.
    • (2004) ACM Transactions on Mathematical Software , vol.30 , pp. 196-199
    • Davis, T.A.1
  • 45
    • 0036776433 scopus 로고    scopus 로고
    • Krylov subspace techniques for reduced-order modeling of large-scale dynamical systems
    • Bai Z. Krylov subspace techniques for reduced-order modeling of large-scale dynamical systems. Applied Numerical Mathematics 2002; 43:9-44.
    • (2002) Applied Numerical Mathematics , vol.43 , pp. 9-44
    • Bai, Z.1
  • 46
    • 0005387477 scopus 로고    scopus 로고
    • Approximation of large-scale dynamical systems
    • Technical Report TR01-01.pdf, Department of Computational and Applied Mathematics, Rice University
    • Antoulas AC, Sorensen DC. Approximation of large-scale dynamical systems. Technical Report TR01-01.pdf, Department of Computational and Applied Mathematics, Rice University, 2001.
    • (2001)
    • Antoulas, A.C.1    Sorensen, D.C.2
  • 47
    • 26844536741 scopus 로고    scopus 로고
    • Model reduction for RF MEMS simulation
    • Lecture Notes in Computer Science. Springer: Berlin, June in press
    • Bindel DS, Bai Z, Demmel JW. Model reduction for RF MEMS simulation. Proceedings of PARA 04, Lecture Notes in Computer Science. Springer: Berlin, June 2004, in press.
    • (2004) Proceedings of PARA 04
    • Bindel, D.S.1    Bai, Z.2    Demmel, J.W.3
  • 48
    • 6344287762 scopus 로고    scopus 로고
    • A Jacobi-Davidson method for solving complex symmetric eigenvalue problems
    • Arbenz P, Hochstenbach ME. A Jacobi-Davidson method for solving complex symmetric eigenvalue problems. SIAM Journal on Scientific Computing 2004; 25:1655-1673.
    • (2004) SIAM Journal on Scientific Computing , vol.25 , pp. 1655-1673
    • Arbenz, P.1    Hochstenbach, M.E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.