Efficient prediction of the quality factors of micromechanical resonators

Journal of Sound and Vibration

Volumn 329, Issue 1, 2010, Pages 84-95

  Choi, Jinbok ^a   Cho, Maenghyo ^a   Rhim, Jaewook ^b  

^a Seoul National University   (South Korea)

^b Agency for Defence Development   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL SOLUTIONS; COMPLEX EIGENVALUES; DISSIPATION MECHANISM; ENERGY LOSS; FINITE ELEMENT FORMULATIONS; FULLY-COUPLED; HIGH QUALITY FACTORS; LARGE SIZES; MICRO RESONATORS; MICROMECHANICAL RESONATOR; MODEL ORDER REDUCTION; NUMERICAL RESULTS; QUALITY FACTORS; THERMOELASTIC DAMPING; THERMOELASTIC PROBLEMS; THERMOELASTICS; WEAK FORM;

BANDPASS FILTERS; COMPUTATIONAL EFFICIENCY; EIGENVALUES AND EIGENFUNCTIONS; ENERGY DISSIPATION; RESONATORS; THERMOELASTICITY;

Q FACTOR MEASUREMENT;

EID: 70350568794     PISSN: 0022460X     EISSN: 10958568     Source Type: Journal    
DOI: 10.1016/j.jsv.2009.09.013     Document Type: Article

References (26)

1. R. Abdolvand, G.K. Ho, A. Erbil, F. Ayazi, Thermoelastic damping in trench-refilled polysilicon resonators, In: Proceedings of 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, June 2005, pp. 324-327.
2. Zener C. Internal friction in solids: I. Theory of internal friction in reeds. Physical Review 52 (1937) 230-235
3. Zener C. Internal friction in solids: II. General theory of thermoelastic internal friction. Physical Review 53 (1938) 90-99
4. Lifshitz R., and Roukes M.L. Thermoelastic damping in micro-and nanomechanical systems. Physical Review B 61 (2000) 5600-5609
5. Sun Y., Fang D., and Soh A.K. Thermoelastic damping in micro-beam resonators. International Journal of Solids and Structures 43 (2006) 3213-3229
6. Nayfeh A.H., and Younis M.I. Modeling and simulations of thermoelastic damping in microplates. Journal of Micromechanics and Microengineering 14 (2004) 1711-1717
7. Wong S.J., Fox C.H.J., and Mcwilliam S. Thermoelastic damping of the in-plane vibration of thin silicon rings. Journal of Sound and Vibration 293 (2006) 266-285
8. Wong S.J., Fox C.H.J., McWilliam S., Fell C.P., and Eley R. A preliminary investigation of thermo-elastic damping in silicon rings. Journal of Micromechanics and Microengineering 14 (2004) 108-113
9. Sun Y., and Tohmyoh H. Thermoelastic damping of the axisymmetric vibration of circular plate resonators. Journal of Sound and Vibration 319 (2009) 392-405
10. Silver M.J., and Peterson L.D. Predictive elastothermodynamic damping in finite element models by using a perturbation formulation. AIAA Journal 43 (2002) 2646-2653
11. Segalman D.J. Calculation of damping matrices for linearly viscoelastic structures. Journal of Applied Mechanics and Engineering 54 (1987) 585-588
12. Yi Y.B. Geometric effects on thermoelastic damping in MEMS resonators. Journal of Sound and Vibration 309 (2008) 588-599
13. Hao Z., Xu Y., and Durgam S.K. A thermal-energy method for calculating thermoelastic damping in micromechanical resonators. Journal of Sound and Vibration 322 (2009) 870-882
14. J.P. Gorman, Finite element model of thermoelastic damping in MEMS, Master of Science Thesis, Department of Material Science, MIT, 2002.
15. Nowacki W. Thermoelasticity. second ed. (1986), Pergamon Press, Oxford
16. Salimbahrami B., and Lohmann B. Order reduction of large scale second-order systems using Krylov subspace methods. Linear Algebra and its Applications 415 (2006) 385-405
17. Han J.S., Rudnyi E.B., and Korvink J.K. Efficient optimization of transient dynamic problems in MEMS devices using model order reduction. Journal of Micromechanics and Microengineering 15 (2005) 822-832
18. Freund R.W. Krylov-subspace methods for reduced-order modeling in circuit simulation. Journal of Computational and Applied Mathematics 123 (2000) 395-421
19. Su T.J., and Craig J.R. Krylov model reduction algorithm for undamped structural dynamics systems. Journal of Guidance, Control, and Dynamics 14 (1991) 1311-1313
20. Ardito R., Comi C., Corigliano A., and Frangi A. Solid damping in micro electro mechanical systems. Meccanica 43 (2008) 419-428
21. Foulgoc B.L., Bourouina T., Traon O.L., Bosseboeuf A., Marty F., Breluzeau C., Grandchamp J.P., and Masson S. Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor. Journal of Micromechanics and Microengineering 16 (2006) S45-S53
22. Duwel A., Candler R.N., Kenny T.W., and Varghese M. Engineering MEMS resonators with low thermoelastic damping. IEEE Journal of Microelectromechanical Systems 15 (2006) 1437-1445
23. Evoy S., Olkhovets A., Sekaric L., Parpia J.M., Craighead H.G., and Carr D.W. Temperature-dependent internal friction in silicon nanoelectromechanical systems. Applied Physics Letters 77 (2000) 2397-2399
24. Dai C.L., Kuo C.H., and Chiang M.C. Microelectromechanical resonator manufactured using CMOS-MEMS technique. Microelectronics Journal 38 (2007) 672-677
25. [Online] Available: 〈http://www.memsnet.org/material/〉.
26. 〈http://www.mathworks.com/〉.