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Volumn 33, Issue 4, 2009, Pages 493-498

A BEM technique for free-molecule flows in high frequency MEMS resonators

Author keywords

Dissipation; Free molecule flow; MEMS

Indexed keywords

BOUNDARY ELEMENT METHOD; MEMS; MOLECULES; POLYSILICON; SURFACE ROUGHNESS; THREE DIMENSIONAL;

EID: 59649118915     PISSN: 09557997     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.enganabound.2008.08.012     Document Type: Article
Times cited : (18)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.