High frequency micromechanical piezo-on-silicon block resonators

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2003, Pages 957-960

  Humad, Shweta ^a   Abdolvand, Reza ^a   Ho, Gavin K ^a   Piazza, Gianluca ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; FABRICATION; IMPEDANCE MATCHING (ELECTRIC); PIEZOELECTRIC DEVICES; PIEZOELECTRIC TRANSDUCERS; SILICA; SINGLE CRYSTALS; SPUTTER DEPOSITION; SUBSTRATES;

SURFACE ACOUSTIC WAVES (SAW); ULTRAHIGH FREQUENCY BAND (UHF);

RESONATORS;

EID: 0842266485     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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7. M. J. Madou, Fundamentals of Microfabrication, 2nd ed., Boca Raton, FL: CRC Press, 2002, pp. 560.
8. H. J. Mcskimin, "Measurement of elastic constants at low temperature by means of ultrasonic waves data for silicon and germanium single crystals and for fused silica", Journal of Applied Physics, vol. 24, 1953, pp. 988997.